1998 Fiscal Year Final Research Report Summary
Microvibration Control in Precision Equipments and Structures
| Project/Area Number |
08455113
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (B)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Dynamics/Control
|
|---|
| Research Institution | Osaka University |
|---|
Principal Investigator |
IKEDA Masao Osaka University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (00031146)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
FUJIOKA Hisaya Kyoto University, Graduate School of Infomatics, Associate Professor, 大学院・情報学研究科, 助教授 (60273596)
WATANABE Ryo Osaka University, Graduate School of Engineering, Leturer, 大学院・工学研究科, 講師 (90304013)
OHTA Yoshito Osaka University, Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (30160518)
|
|---|
| Project Period (FY) |
1996 – 1998
|
| Keywords | vibration control / control system design / modeling / optimal control / robust control / system structure |
|---|
| Research Abstract |
This reserach project aimed at resolving the microvibration problems in precision equipments such as semiconductor lithography systems, atomic force microscopes, high-speed color printers, etc. and large space structures. Three major strategies have been considered to remove the harmful effects of vibrations, which are the following :
・Suppression of vibrations at the sources.
・Suppression of vibration tranmissions by using passive isolation materials or active isolation systems, or by changing structures of transmission routes.
・Application of disturbance rejection control to precision equipments or whole systems including vibration sources.
To suppress vibrations at the sources, the present research has proposed application of feedforward control input to cancel the direct disturbance caused by a stepper on an active isolation system, which is computed beforehand using experimental data. It has proposed also computaion methods for the optimal reference input which achieves high-speed movement in good accuracy without generating vibrations.
To suppress vibration transmissions, this research has considered modeling and control of an active vibration isolation system. Couplings in the six degrees of freedom of translations and rotations of its table have been identified. H* control is applied to strongly coupled subsystems decentrally for the attitude control. It is also considered optimal structural design for suppression of vibration transmissions using the H* norm as the transmission gain.
To suppress vibrations by control of the whole system, this paper has been proposed optimal regulation of large space structures under the assumption of sensors/actuators collocation. Both static feedback of velocity and displacement and simple dynamic feedback of displacement have been considered, and tuning methods for controller gains have been presented.
|
