1998 Fiscal Year Final Research Report Summary
Investigation of the decomposition reaction and measurement of the rate coefficient between N_2 (A^3SIGMA^+_) and contamination gas.
| Project/Area Number |
08458167
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
環境保全
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| Research Institution | Chiba Institute of Technology |
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Principal Investigator |
ITOH Huruo Chiba Institute of Technology, Department of Electrical Engineering, Professor, 工学部, 教授 (90083849)
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| Co-Investigator(Kenkyū-buntansha) |
SUZUKI Susumu Chiba Institute of Technology, Department of Physics, Assistant, 工学部, 助手 (00265472)
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| Project Period (FY) |
1996 – 1998
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| Keywords | metastable molecule / N_2 (A^3SIGMA^+_) / contamination gas / quenching rate coefficient |
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| Research Abstract |
It is interested in the destruction of ozone layer by the fluorocarbons and in the atmospheric green-house effect by C0_2, SF_6, CF_4, and so on. In order to remove these contamination gases, the discharge plasma is widely used. In this case1 if the plasma reactor is operated in the atmospheric pressure, it is important to understand the reaction processes between the contamination gas in atmospheric pressure and the nitrogen radicals generated in the plasma reactor. Particularly, the metastable nitrogen molecule N_2(A^3SIGMA^+_) of one of the nitrogen radicals has various effects in the reaction processes in plasmas.
In this research, the loss processes of N_2(A^3SIGMA^+_) by CO_x, NO_x, CCl_2F_2, CH_2FCF_3 CF_4 and C_2F_6 are investigated in Townsend discharge. We systematically determine the collisional quenching rate coefficients of N_2(A^3SIGMA^+_) by them.
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