1997 Fiscal Year Final Research Report Summary
Development of Simplified Simulation Method of Diffusion Based on Monte Carlo Analysis
| Project/Area Number |
08555025
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (B)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 展開研究 |
|---|
| Research Field |
Materials/Mechanics of materials
|
|---|
| Research Institution | KYOTO UNIVERSITY |
|---|
Principal Investigator |
KITAMURA Takayuki Kyoto Univ., Eng., Associate Professor, 工学研究科, 助教授 (20169882)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
TADA Naoya Kyoto Univ., Eng., Research Associate, 工学研究科, 助手 (70243053)
OHTANI Ryuichi Kyoto Univ., Eng., Professor, 工学研究科, 教授 (50025946)
|
|---|
| Project Period (FY) |
1996 – 1997
|
| Keywords | Atomic Simulation / Molecular Dynamics / Monte Carlo Method / Simplified Simulation / Surface Diffusion / Grain Boundary Groove / Defect / キャビティ |
|---|
| Research Abstract |
The failure of microelement such as conductors in a LSI is caused mostly by the atomic scale defects. The defect mucleation often takes place by diffusion along boundaries. The molecular dynamics simulation, however, can not be applied to the process in a real component because it can simulate the behavior of atoms in a very short period. A Monte Carlo method to simulate the process of defect nucleation in a longer period is proposed focusing on the jumps of atoms along the surface. In this study, the nucleation process of grain boundary grooving in an aluminum conductor is analyzed in terms of atomic mechanics. The formation of grooving is successfully simulated by the method. Then, the motion of atoms near an intersection between grain boundary and surface near the melting temperature is simulated by a molecular dynamics and the formation of grooving can be recognized for low SIGMA boundaries. The validity of new method is examined by the molecular dynamics result.
|
