| Co-Investigator(Kenkyū-buntansha) |
ITAYA Hisao Gunze Limited, Shiga Research Laboratory, Chief Researcher, 滋賀研究所, 主任研究員
FURUKAWA Shuji Gunze Limited, Shiga Research Laboratory, Researcher, 滋賀研究所, 研究員
TAKATA Shinzo Kanazawa Institute of Technology, Engineering, Professor, 工学部, 教授 (70064467)
MINAMI Tadatsugu Kanazawa Institute of Technology, Engineering, Professor, 工学部, 教授 (70113032)
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| Research Abstract |
New multicomponent (ZnO)_1-x-(MgO)x-(In_2O_3)_1-Y-(Ga_2O_3)Y-SnO_2 system transparent conducting oxide thin films have been preapred by magnetron sputtering using oxide powder targets. First, thin films using multicomponent oxides consisting of a combination of different binary compounds were pareapred by controlling the composition. In these systems, new transparent conducting oxide thin films were prepared in materials identified as ternary compounds such as Zn_2In_2O_5, ZnSnO_3, MgIn_2O_4, InGaO_3 and In_4Sn_3O_<12>. Consequently, thin films using multicomponent oxides consisting of a combination of different ternary compounds were pareapred by controlling the composition. In these systems, transparent conducting films could be prepared with all compositions of the multicomponent oxides. Highly transparent conducting thin films were prepared with the overall composition in multicomponent oxides such as Zn_2In_2O_5-ZnSnO_3, Zn_2In_2O_5-MgIn_2O_4, Zn_2In_2O_5-InGaO_3, Zn_2In_2O_5-In_4Sn_3O_<12> and ZnSnO_3-In_4Sn_3O_<12> systems. The resulting electrical, optical and chemical properties of multicomponent oxide films changed continuously as the composition in the target was varied : the resistivity, band-gap energy, refractive index, etching rate and work function of Zn_2In_2O_5-ZnSnO_3, Zn_2In_2O_5-MgIn_2O_4, Zn_2In_2O_5-InGaO_3, Zn_2In_2O_5-In_4Sn_3O_<12> and ZnSnO_3-In_4Sn_3O_<12> could be controlled continuously. It is concluded that transparent conducting multicomponent oxide thin films are applicable to specialized applications because their physical and chemical properties can be controlled by altering the composition of the components.
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