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1998 Fiscal Year Final Research Report Summary

Development of modified magnetron-typed plasma source

Research Project

Project/Area Number 08558043
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field プラズマ理工学
Research InstitutionTohoku University

Principal Investigator

SATO Noriyoshi  Tohoku Univ.Electrical Eng.Prof., 大学院・工学研究科, 教授 (40005252)

Co-Investigator(Kenkyū-buntansha) LI Yunlong  Tohoku Univ.Electrical Eng.Assistant, 工学部, 助手 (50260419)
HIRATA Takamichi  Tohoku Univ.Electrical Eng.Assistant, 大学院・工学研究科, 助手 (80260420)
HATAKEYAMA Rikizo  Tohoku Univ.Electronic Eng.Prof., 大学院・工学研究科, 教授 (00108474)
IIZUKA Satoru  Tohoku Univ.Electrical Eng.Asociate Prof., 大学院・工学研究科, 助教授 (20151227)
Project Period (FY) 1996 – 1998
Keywordsmagnetron discharge / large-diameter plasma / uniform plasma / RF discharge / high-density plasma / electron energy control / ion-energy control / plasma processing
Research Abstract

A new plasma source named "modified magnetron-typed (MMT) radio frequency (RF) plasma source" which has following several advantages compared with other plasma sources is successfully developed.
High-density plasma is easily produced and confined in a localized magnetic field supplied by permanent magnet rings which are annularly wounded on a cylindrical RF electrode. The effect of the magnetic field is, however, reduced on the surface of the substrate with a diameter of 12 inch. Changing the strength and spacing of the magnet rings controls plasma density profile. Two substrate plates are placed on both sides of the RF electrode. If necessary, one of them can be used as a subsidiary electrode for a control of the density uniformity.
Ion energy distribution function (IEDF) hitting the RF electrode is also controlled by the magnetic fields, as a result of the change of sheath potential in front of the RF electrode, where the magnetic field is arranged parallel to the RF electrode surface. Therefore, the sputtering yield from the RF electrode as well as the : energy width of the JEDF can also be controlled by the magnetic field.
Electron energy distribution function (EEDF) of the MMT plasma is easily controlled by changing the slit width of two cylindrical grids which are connected axially, separating a central plasma region from the plasma production region. The range of the EEDF variation is about one order of magnitude, and quite low electron temperature plasma is produced in the central region. Variation of the electron energy is confirmed by the optical emission method.

  • Research Products

    (46 results)

All Other

All Publications (46 results)

  • [Publications] Y.Li: "Plasma density control in the magnetron-type RF plasma" Plasma Sources Science and Techndogy. 5. 241-244 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Li: "Electron temperature control in large-diameter radio-frequency plasma" Proc.3rd Asia-Pacific Conf.on Plasma Sci.and Technol.435-439 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Li: "Control of plasma structure in modified magnetron-typed radio-frequency discharge" 1996 Int.Conf.on Plasma Phys.1338-1341 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Li: "Plasma structure in a modified magnetron-typed RF discharge" Proc.13th Symp.on Plasma Processing. 53-56 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 李 雲龍: "変形マグネトロン高周波放電による大面積プラズマの生成" 電気学会プラズマ研究会資料. EP-96-97. 21-30 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 佐藤徳芳: "大面積均一プラズマの生成技術" Breakthrough. 1-4 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Li: "Production of a large-diameter uniform plasma by modified magnetron-typed radio frequency discharge" Jpn.J.Appl.Phys.36. 4554-4557 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Li: "Control of sputtering in a modified magnetron-typed radio-frequency discharge" Nucl.Instrum.Methods in Phys.Research. 132. 585-588 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Li: "Production of large-diameter uniform plasma by modified magnetron-typed RF discharge" Proc.3rd Int.Conf.on Reactive Plasmas. 211-212 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Sato: "Sputtering control in a modified RF plasma" Proc.Int.Workshop on Basic Aspects of Non Equitobrium plasmas Interactino with Surface. 27-28 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Wickramanayaka: "Modified magnetron-type plasma source for etching applications" Abstract on 38th Conf.of Vacuum Society. Japan. 248-249 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Wickramanayaka: "Measurements of power absorption in a modifiedmagnetron-type discharge" Jpn.J.Appl.Phys.36. 5306-5309 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Li: "Production of l-m-size uniform plasmaby modified magnetron-typed RF discharge with a subsidary electrode for resonance" Proc.10th Symp.Plasma Science Materials. 42- (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Sato: "Effects of negative ions and magnetic field on potential structure in RF plasmas" Proc.1st Asia-Pacific Int.Symp.Basic and Appl.Plasma Techoology. 15-16 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Wickramanayaka: "Variation of radial plasma density profile with the excitation frequency in a magnetron-type plasma" Jpn.J.Appl.Phys.37. 2035-2038 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Wickramanayaka: "Modified magnetron-type plasma source for etching applications" J.Vacuum Soc.Jpn. 41. 315-319 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Urano: "Production of l-m-size uniform plasma by modfied magnetron-typed RF discharge with a subsidary electrode for resonance" Thin Solid Films. 316. 60-64 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 飯塚 哲: "大面積均一プラズマの生成と電子温度制御" 電気学会論文誌. 118A. 971-978 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Nakagomi: "Control of electron energy in a large-diameter modified magnetron-typed RF discharge" Proc.15th Symp.Plasma Processing. 597-600 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Shimizu: "Ion-energy control by inagenetic field near an RF electrode in modified magnetron-typed RF discharge" Proc.15th Sym.Plasma Processing. 593-596 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Kanno: "High-density plasma production by an auxiliary electrocle in modified magnetron-typed discharge" Pro.15th Symp.Plasma Processing. 601-604 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 佐藤徳芳: "プラズマ応用の基礎(第1章プラズマの基礎的性質)" (社)プラズマ・核融合学会, 170 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 飯塚 哲: "プラズマ応用の基礎(第3章プラズマ生成とエネルギー制御)" (社)プラズマ・核融合学会, 170 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Li, S.Iizuka and N.Sato: "Plasma density control in the magnetron-type RF plasma" Plasma Sources Science and Technology. 5. 241-244 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Li, K.Nakagomi, K.Kato, S.Iizuka and N.Sato: "Electron temperature control in large-diameter radio-frequency plasma" Proc.of 3rd Asia-Pacific Conf.on Plasma Sci.and Technol.Vol.2. 435-439 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Li, S.Iizuka and N.Sato: "Control of Plasma structure in modified magnetron-typed radio-frequency discharge" Proc.of 1996 Int.Conf.on Plasma Phys., Nagoya. 1338-1341 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Li, S.Iizuka and N.Sato: "Plasma structure in a modified magnetron-typed RF discharge" Proc.of 13th Symp.on Plasma Proc.53-56 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Li, S.Iizuka and N.Sato: "Production of large-diameter plasma by magnetron-typed RF discharge" Plasma Kenkyukai, IEE Jpn.EP-96-97. 21-30 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Sato: "Technology of large diameter uniform-plasma production" Breakthrough. 1-4 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Li, S.Iizuka and N.Sato: "Production of a large-diameter uniform plasma by modified magnetorn-typed radio frequency discharge" Jpn.J.Appl.Phys.36. 4554-4557 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Li, S.Iizuka and N.Sato: "Control of sputtering in a modified magnetron-typed radio-frequency discharge" Nucl.Instrum.Methods in Phys.Res.B : Beam Interac.Materials and Atoms. 132. 585-588 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Li, S.Iizuka and N.Sato: "Production of large-diameter uniform plasma by modified magnetron-typed RF discharge" Proc.of 3rd Int.Conf.on Reactive Plasmas 14th Symp.on Plasma Proc.211-212 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Sato, Y.Li and S.Iizuka: "Sputtering control in a modified RF plasma" Proc.of Int.Workshop on Basic Aspects of Non Equilibrium Plasmas Interacting with Surface. 27-28 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Wickramanayaka, Y.Nakagawa, T.Tsukada, Y.Li, S.Iizuka and N.Sato: "Modified magnetron-type plasma source for etching applications" Abstracts of 38th Conf.of Vacuum Soc.Jpn.248-249 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Wickramanayaka, K.Takagi, Y.Nakagawa, T.Tsukada and N.Sato: "Measurements of power absorption in a modified magnetron-type discharge" Jpn.J.Appl.Phys.36. 5306-5309 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Li, Y.Urano, K.Kanno, S.Iizuka and N.Sato: "Production of 1-m-size uniform plasma by modified magnetron-typed RF discharge with a subsidary electrode for resonance" Proc.of 10th Symp.Plasma Sci.Mater.42 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Sato: "Effects of negative ions and magnetic field on potential structure in RF plasmas" Proc.1^<st> Asia-Pacific Int.Symp.Basic and Appl.Plasma Technol.79-82 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Wickramanayaka, Y.Li, S.Iizuka, K.Takagi, Y.Nakagawa, T.Tsukada and N.Sato: "Variation of radial plasma density profile with the excitation frequency in a magnetron-type plasma" Jpn.J.Appl.Phys.37. 2035-2038 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Wickramanayaka, Y.Li, S.Iizuka, K.Takagi, Y.Nakagawa, T.Tsukada and N.Sato: "Modified magnetron-type plasma source for etching applications" J.Vacuum Soc.Jpn.41. 315-319 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Urano, Y.Li, K.Kanno, S.Iizuka and N.Sato: "Production of 1-m-size uniform plasma by modified magnetron-typed RF discharge with a subsidary electrode for resonance" Thin Solid Films. 316. 60-64 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Iizuka and N.Sato: "Production of large diameter uniform plasmas and control of electron temperature" IEE Jpn. 118A. 971-978 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Nakagomi, K.Kato, Y.Li, S.Iizuka and N.Sato: "Control of electron energy in a large-diameter modified magnetron-typed RF discharge" Proc.15th Symp.Plasma Processing. 597-600 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Shimizu, Y.Li, S.Iizuka and N.Sato: "Ion-energy control by magnetic field near an RF electrode in modified magnetron- typed RF discharge" Proc.15th Symp.Plasma Processing. 593-596 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Kanno, Y.Urano, Y.Li, S.Iizuka and N.Sato: "High-density plasma production by an auxiliary electrode in modified magnetron-typed discharge" Proc.15th Symp.Plasma Processing. 601-604 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Sato: "Basis of Plasma Applications (Chap.1 : Basic properties of Plasmas)" Jpn.Soc.of Plasma Sci.and Nuclear Fusion Res.170 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Iizuka: "Basis of Plasma Applications (Chap.3 : Plasma Production and energy Control)" Jpn.Soc.of Plasma Sci.and Nuclear Fusion Res.170 (1998)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-12-08  

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