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1998 Fiscal Year Final Research Report Summary

Investigation on Quantitative Evaluation of Surface Molecular Ions by Means of Time-of-Flight Static Secondary Ion Mass Spectrometry

Research Project

Project/Area Number 08650965
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 工業分析化学
Research InstitutionSeikei University

Principal Investigator

KUDO Masahiro  Seikei Univcersity, Faculty of Engeineering, Professor, 工学部, 教授 (10114464)

Project Period (FY) 1996 – 1998
KeywordsSecondary Ion Mass Spectrometry (SIMS) / Time-of Flight SIMS / Surface Chemical Structure / Surface Quantitative Analysis / Static SIMS
Research Abstract

In this research project, we investigated on the quantification of the surface secondary ion species from such samples as standard polymer films and Langmuir-Blodett(1B) films, using Time-of-Flight SIMS (ToF-SIMS) and X-ray Photoelectron Spectroecopy (XPS).
Due to the usage of a very small amount of primary ion dosages static secondary ion mass spectrometry (S-SIMS) has generally been classified as a non-destructive analytical technique and recognized as suitable for surface chemical state analysis of such organic materials as polymers. However, in S-SIMS, the obtainable mass spectra change a great deal according to the primary ion dosage and this fact is regarded as one of the main causes, as well as the so-called "matrix effect", for the difficulty of quantification by this technique. It is believed that the ionization mechanisms of the secondary ion species have quite significant influences on this kind of issue. Although some analysis data have been presented for typical materials, the detailed interpretations on the mechanisms of secondary ion formation and criteria for practical quantitative analysis have not been established yet.
We showed that the secondary ion species can be evaluated quantitatively with reasonable accuracy and precision by using a TOE-SIMS instrument and further proceeded to the interpretation which lead to fundamental understanding of the origin of SIMS spectra with reference to the bond orders obtained by semi-empirical MO calculation

  • Research Products

    (14 results)

All Other

All Publications (14 results)

  • [Publications] 長沼康広: "TOF-SIMSによりポリメタクリル酸メチル(PMMA)表面から得られた二次イオン強度の解析" 表面科学. 19. 469-474 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 斎藤玲子: "TOF-SIMSによるUV照射したフォトレジスト表面の化学構造変化の評価" 表面科学. 19. 428-432 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Kudo: "Secondary Ion Emission from Langmuir-Blodgett Films formed on Different Substrate Materials Investigated by TOF-SIMS" Secondary Ion Mass Spectrometry SIMS. XI. 471-474 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Ichinohe: "Ion Induced Damage on Poly(methy Methacrylate)and Ply(ethylane Terephthalate) Investigated by TOF-SIMS and XPS" Secondary Ion Mass Spectrometry SIMS. XI. 467-470 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Endo: "Spectral Analysis of Eight Polymers in SIMS by MO Calculation" Polymer Journal. 29. 457-466 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hoshi: "Secondary Ion Emissions from Fluorolubricants under Several Primary Beam Conditions by TOF-SIMS" Appl.Surface Sci.,. 121. 146-151 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Kudo: "Ion Induced Damages on Poly (methyl methacrylate) Investi-gated by TOF-SIMS, XPS and Semi-Empirical MO Calculation." Proceedings of the 7th European Conference on Applications of Surface and Interface Analysis. 759-762 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Naganuma, M.Soga, T.Hoshi, K.Endo, Y.Ichinohe, M.Kudo: "Investigation of the Secondary Ion Intensity from Poly (methyl methacrylate) (PMMA) Surface by TOF-SIMS" Journal of The Surface Scince society of Japan (Hymen Kagaku). 19 (7). 479-474 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] R.Saito, N.Makino, Y.Ichinohe, T.Hoshi, M.Kudo: "TOF-SIMS Analysis of Chemical State Changes in cresolnovolak Photorsist Surface Caused by UV Irradation" Journal of The Surface Scince society of Japan (Hymen Kagaku). 19 (7). 428-432 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Kudo, N.Ogura, S.Yamada, Y.Ichinohe, T.Watanabe, T.Hoshi, K.Endo: "Secondary Ion Emission from Langmuir-Blodgett Films formd on Different Substrate Materials Investigated by TOF-SIMS" Secondary Ion Mass Spectrometry SIMS XI,John Wiley & Sons.471-474 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Ichinohe, Y.Naganuma, M.Soga, T.Hoshi, K.Endo, M.Kudo: "Ion Induced Damage on Poly (methyl Methacrylate) and Poly (ethylane Terephthalate) Investigated by TOF-SIMS and XPS" Secondary Ion Mass Spectro-metry SIMS-XI,John Wiley & Sons.467-470 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Endo, T.Hoshi, H.Miura, N.Kobayashi, M.Kudo: "Spectral Analysis of Eight Polymers in SIMS by MO Calculations." Polymer Journal. Vol.29, No.5. 457-466 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hoshi, M.Tozu, R.Oiwa, M.Kudo: "Secondary Ion Emissions from Fluorolubricants under Several Primary Beam Conditions by TOF-SIMS" Appl.Surface Sci.121/122. 146-151 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Kudo, Y.Naganuma, M.Soga, T.Hoshi, K.Endo, Y.Ichinohe, M.Kudo: "Ion Induced Damages on Poly (methylmethacrylate) Investigated by ToF-SIMS,XPS and Semi-empirical MO Calculation" 7th European Conference on Application of Surface and Interface Anal.759-762 (1997)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-12-08  

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