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1998 Fiscal Year Final Research Report Summary

Laser-Ablation Fabrication and TR Structure Measurements

Research Project

Project/Area Number 09044131
Research Category

Grant-in-Aid for international Scientific Research

Allocation TypeSingle-year Grants
SectionJoint Research
Research Field Electronic materials/Electric materials
Research InstitutionUniversity of Tsukuba

Principal Investigator

MURAKAMI K.  Inst, Materials Science, Professor, 物質工学系, 教授 (10116113)

Co-Investigator(Kenkyū-buntansha) 吉田 岳人  松下技研(株), 光エレクトロニクス研究機構, 研究員
AZIZ M.J.  Harvard Univ., Applied Science, Professor, 応用科学科, 教授
GEDREGAN D.B  オークリッジ国立研究所, 固体物性部, 研究員
LOWNDES D.H.  Oak Ridge NL,Solid State Div.Group Leader, 固体物性部, 研究リーダー
YOSHIDA T.  Matsushita Res.Inst.Tokyo, Inc., Research
GEOHEGON D.B.  Oak Ridge NL,Solid State Div., Researcher
Project Period (FY) 1997 – 1998
KeywordsLaser Ablation / Si Nano particles / Visible Hight Emission / Si nanoparticles / Si Ge EL Device / Time-resolued measurements / Oxidation / Photo luminescence
Research Abstract

We have studied the abovementioned title for the recent two years from April, 1997 to March, 1999, and we have obtained the results as shown below. These indicate that we can synthesize more functional nanostructures by means of the second pulsed modification of the surfaces of nanoparticles and fabricate Si nanoparticle films exhibiting high efficient photoluminescence(PL) and electroluminescence (EL) without any contaminations, using laser ablation technique.
[I] Time-resolved structure measurement of growth og Si nanoparticles : 1) No significant clustering and growth of nanoparticles have been observed until 15 mu s by time-resolved laser-plasma soft-X-ray absorption measurement. 2) By time-resolved PL and Rayleigh scattering measurements, it was found that the nanoparticle growth takes place at around 1 ms and that the spatial distribution of formed nanoparticles is much different between He and Ar gas atmosphere. 3) It was clarified by the newly developed second-laser irradiation method that relatively small Si nanoparticles begins to grow in the time scale from 100 mu s to 1 ms.
[II] Fabrication of Si and SiGe nanoparticle films : 1) We observed three PL bands for Si nanoparticle films, and the PL intensity depends strongly on the surface oxidation. 2) The size of Si nanoparticles ranges form 2 to 3 nm. 3) Si nanocrystallites in SiO2 with strong PL can be realized by annealing SiOx films deposited by laser ablation. The optimum value of x is 1.3-1.4 for obtaining high efficient light emission. 4) By laser ablation, we have fabricated EL-device structures using SiGe nanoparticles, which shows visible EL.

  • Research Products

    (17 results)

All Other

All Publications (17 results)

  • [Publications] K.Murakami 他: "Dynamics of Si Plume produced by Laser Ablation in Ambient Inent Gas and Formation of Si Nanoclusters" Applied Surface Science. 127-129. 368-372 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Makimura 他: "Si Nanoparticles embedded in SiO_2 Films with Visible Photoluminescence" Applied Surface Science. 127-129. 388-392 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 村上 浩一,牧村 哲也: "可視発光シリコンナノ微粒子" 応用物理. 67. 817-821 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] D.B.Geohegan 他: "Time-resolved Imaging of Gas Phase Nanoparticle Synthesis by Laser Ablation" Applied Physics Letters. 72. 2987-2989 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] D.H.Lowndes 他: "Si and Zn Te Nanoparticles Synthesized by Pulsed Laser Ablation into Ambient Gas" J.Material Research. 14(印刷中). (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Yoshida 他: "Crystallinities and Light Emitting Properties of Nanostructured Si Ge Alloy prepared by Laser Ablation in Inert Background Gases" Proc. SPIE. 印刷中. (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Makimura, Y.Kunii, N.Ono and K.Murakami: "Nano-Structured Silicon-Based Films with Visible Light Emission Synthesized by Laser Ablation" Mat.Res.Soc.Symp.Proc.vol.452. 135-140 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Murakami, T.Makimura, N.Ono, T.Sakuramoto, A.Miyashita and O.Yoda: "Dynamics of Si Plume produced by Laser Ablation in Ambient Inert Gas and Formation of Si Nanoclusters"

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Makimura, Y.Kunii, N.Ono, and K.Murakami: "Silicon Nanoparticles embedded in SiO2 Films with Visible Photoluminescence" Appl.Surface Science. 127-129. 388-392 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Murakami et al.: "Si Nanoparticles with Visible PL" Oyobutsuri. 67. 817 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Makimura, T.Mizuta, T.Ueda, and K.Murakami: "Formation Process of Si Nanoparticles Formed by Laser Ablation Method" Mat.Res.Soc.Symp.Proc.in press.

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Murakami: "Synthesis of Si Nanoparticles with Visible Photoluminescence and Dynamics of Laser Ablation (Invited Paper)" PCPM'99 (International Symposium on Photoreaction Control and Photofunctional Materials, Tsukuba, 1999) Extended Abstracts. 47-50

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Suzuki, T.Ueda, S.Shida, T.Makimura, C.B.Arnold, M.J.Aziz, M.Tamura, and K.Murakami: "SiOx Films with Tunable and Intense photoluminescence Synthesized by Laser Ablation" PCPM'99 (International Symposium on Photoreaction Control and Photofunctional Materials, Tsukuba, 1999) Extended Abstracts. 165-166

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Makimura, T.Mizuta, T.Ueda, C.B.Geohegan, D.H.Lowndes and K.Murakami: "Formation Process of Si nanoparticles resulting from Laser Ablation observed by a Decomposition Method" PCPM'99 (International Symposium on Photoreaction Control and Photofunctional Materials, Tsukuba, 1999) Extended Abstracts. 173-174

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.B.Geohegan, A.A.Puretzky, G.Duscher, and S.J.Pennycook: "Time-resolved Imaging of Gas Phase Nanoparticles Synthesized by Laser Ablation" Appl.Phys.Lett.72. 2987 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.H.Lowndes, C.M.Rouleau, T.Thundat, G.Duscher, E.A.Kenik, and S.J.Pennycook: "Silicon and Zinc Telluride Nanoparticles Synthesized by Low Energy Density Pulsed Laser Ablation in Ambient Gases" J.of materials Research. 14. 359 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Yoshida, Y.Yamada, N.Suzuki, T.Makino, T.Orii, K.Murakami, D.B.Geohegan, D.H.Lowndes, and M.J.Aziz: "Crystallinities and Light Emitting Properties of Nanostructured SiGe Alloy Prepared by Pulsed Laser Ablation in Inert background Gases" Proc.International Society for Optical Engineering (SPIE), High Power Lasers & Applications (LASE'99), 3618-68 (San Jose, CA,Jan.1999).

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-12-08  

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