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1998 Fiscal Year Final Research Report Summary

Processes to Fabricate 3-Dimentional Micro Structure

Research Project

Project/Area Number 09044135
Research Category

Grant-in-Aid for international Scientific Research

Allocation TypeSingle-year Grants
SectionJoint Research .
Research Field Applied physics, general
Research InstitutionTokyo metropolitan Institute of Technology (1998)
The University of Tokyo (1997)

Principal Investigator

HARASHIMA Fumio  Tokyo Metropolitan Institute of Technology, President, 学長 (60013116)

Co-Investigator(Kenkyū-buntansha) LEE Kok-meng  Georgia Institute of Technology, Mechanical Department, Associate Professor, 機械工学科, 助教授
SCHMIDT Gunter  Munich Institute of Technology, Control Department, Professor, 制御工学科, 教授
HASHIMOTO Hideki  Institute of Industrial Science, Univ.of Tokyo, Associate Professor, 生産技術研究所, 助教授 (30183908)
FUJITA Hiroyuki  Institute of Industrial Science, Univ.of Tokyo, Professor, 生産技術研究所, 教授 (90134642)
MASUZAWA Takahisa  Institute of Industrial Science, Univ.of Tokyo, Professor, 生産技術研究所, 教授 (60013215)
Project Period (FY) 1997 – 1998
KeywordsMicro-Mechatronics / 3-dimensional micro structure / Nano Technology / Process / Manipulation / Tele-operation / Micro Actuator / Micro Sensor
Research Abstract

We have visited each other according to the program of this year's project Our discussion, exchange information and cooperation were successful based on the results of last year's project. Especially Japanese and French members organized a international workshop on Nano technology and did extensive discussion how to organize Nano technology research with the viewpoint of micro mechanical technology. The discussion attracted a lot of attention from all over the world and we showed the new research direction of nano and micro technology by using this project.
The results of this project were presented in many well-known international conference and workshop. There were so sincere and serious discussion with positive attitude to our international cooperative project. And we could lead the new research fields of nano technology. We hope that our leadership in nano and micro technology fields would last after completing this project.

  • Research Products

    (26 results)

All Other

All Publications (26 results)

  • [Publications] S.Nakamura: "A One-Body Mems Device Composed of Mutually Insulated Metallic Parts" Micro Electro Mechanical Systems. 278-283 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Makoto Mita: "An Out-of-Plane Polysilicon Actuator with a Smooth Vertical Mirror for Optical Fiber Switch Application" 1998 IEEE/LEOS Summer Topical Meetings. 33-34 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Toshiyoshi: "Micromechanical Fiber Optic Switches based on Electromagnetic Torsion Mirros" 1998 IEEE/LEOS Summer Topical Meetings. 23-24 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Hiroyuki Fujita: "Micromachined Optical Switches for Free-Space Beam Steering" 1998 IEEE/LEOS Summer Topical Meetings. 19-20 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] E.H.Yang: "Fabrication and Characterization of U-shaped Beams for the Determination of Young's Modulus Modification due to Joule Heating of Polysilicon Microstructures" Transducers 97. Volume 1. 603-606 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] P.Langlet: "A quantitative analysis of Scratch Dreive Actuation for integrated X/Y motion system" Transducers 97. Volume 2. 773-776 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Nakamura: "An Electrostatic Micro Actuator for a Magnetic Head Tracking System of Hard Disk Drives" Transducers 97. Volume 2. 1081-1084 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Yoshio Mita: "Two Dimensional Micro Conveyance System with Through Holes for Electrical and Fluidic Interconnection" Transducers 97. Volume 1. 37-40 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Metin Sitti: "Nano Tele-Manipulation Using Virtual Reality Interface" Proceedings of IEEE International symposium on Industrial Electronics. Volume 1 of 2. 171-176 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Metin Sitti: "Tele-Manipulation Using Atomic Force Microscope" Proceedings of 1998 IEEE/RSJ International Conference Intelligent Robots and Systems. Volume 3. 1739-1746 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Satoshi Horiguchi: "Virtual Reality User Interface for Teleoperated Nanometer Scale Object" Proceedings of the 7th IEEE International Workshop on Robot and Human Communication. Volume 1. 142-147 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Metin Sitti: "Trends on Mechatronics for Micro/Nano Telemanipulation : Survey and Requirements" Proceedings of the 9th International Federation of Automatic Control. Volume 1. 235-240 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Metin Sitti: "Macro to Nano Tele-Manipulation Through Nanoelectromechanical Systems" Proceedings of the 24th Annual Conference of the IEEE Industrial Electronics Society. Volume 1 of 4. 98-103 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Nakamura: "A One-Body Mems Device Composed of Mutually Insulated Metallic Parts" Micro Electro Mechanical Systems. 278-283 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Makoto Mita: "An Out-of-Plane Polysilicon Actuator with a Smooth Vertical Mirror for Optical Fiber Switch Application" 1998 IEEE/LEOS Summer Topical Meetings. 33-34 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Toshiyoshi: "Micromechanical Fiber Optic Switches based on Electromagnetic Torsion Mirros" 1998 IEEE/LEOS Summer Topical Meetings. 23-24 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hiroyuki Fujita: "Micromachined Optical Switches for Free-Space Beam Steering" 1998 IEEE/LEOS Summer Topical Meetings. 19-20 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] E.H.Yang: "Fabrication and Characterization of U-shaped Beams for the Determination of Young's Modulus Modification due to Joule Heating of Polysilicon Microstructures" Transducers 97. Volume 1. 603-606 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.Langlet: "A quantitative analysis of Scratch Dreive Actuation for integrated X/Y motion system" Transducers 97. Volume 2. 773-776 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Nakamura: "An Electrostatic Micro Actuator for a Magnetic Head Tracking System of Hard Disk Drives" Transducers 97. Volume 2. 1081-1084 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Yoshio Mita: "Two Dimensional Micro Conveyance System with Through Holes for Electrical and Fulidic Interconnection" Transducers 97. Volume 1. 37-40 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Metin Sitti: "Nano Tele-Manipulation Using Virtual Reality Interface" Proceedings of IEEE International symposium on Industrial Electronics. Volume 1 of 2. 171-176 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Metin Sitti: "Tele-Nanorobotics Using Atomic Force Microscope" Proceedings of 1998 IEEE/RSJ International Conference Intelligent Robots and Systems. Volume 3. 1739-1746 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Satoshi Horiguchi: "Virtual Reality User Interface for Teleoperated Nanometer Scale Object Manipulation" Proceedings of the 7th IEEE International Workshop on Robot and Human Communication. Volume 1. 142-147 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Metin Sitti: "Trends on Mechatronics for Micro/Nano Telemanipulation : Survey and Requirements" Proceedings of the 9th International Federation of Automatic Control. Volume 1. 235-240 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Metin Sitti: "Macro to Nano Tele-Manipulation Through Nanoelectromechanical Systems" Proceedings of the 24th Annual Conference of the IEEE Industrial Electronics Society. Volume 1 of 4. 98-103 (1998)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-12-08  

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