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1998 Fiscal Year Final Research Report Summary

Cooperative Research on Precision Machining

Research Project

Project/Area Number 09045060
Research Category

Grant-in-Aid for international Scientific Research

Allocation TypeSingle-year Grants
SectionUniversity-to-University Cooperative Research
Research Field 機械工作・生産工学
Research InstitutionKanagawa Institute of Technology

Principal Investigator

HASHIMOTO Hiroshi  Kanagawa Inst.Tech., Mechanical Dept., Prof., 工学部, 教授 (10198690)

Co-Investigator(Kenkyū-buntansha) LIN Bin  Tianjin Univ., Mechanical Dept., Assistant Prof., 工学部, 助教授
TAN Jin  Northeastern Univ., Mechanical Dept., Assistant Prof., 機械工学院, 講師
GUANG Qi Cai  Northeastern Univ., Mechanical Dept., Prof., 機械工学院, 教授
喬 暁林  ハルビン工大, 咸海校・教授, 学長
IMAI Kenichiro  Kanagawa Inst.Tech., Mechanical Dept., Research Asso., 工学部, 助手 (00308537)
QIAO-XIAO Lin  Harbin Inst.Tech., Weihai Campus, The President
Project Period (FY) 1997 – 1998
KeywordsUltrasonic Vibration / Shear-mode grinding / Brittle material / Single Crystal Si / Diamond wheel / Engineering Tool / Grinding Force
Research Abstract

In our experimental results of shear(ductile) mode grinding, there are two serious problems as obstacles to its development. One is that the removal rate is limited by the contact area of wheel to workpiece which might cause heat generation. During the experiment, cracks caused by burning appeared on the ground surface ; shear mode grinding was impossible. From this result, we guessed that a large contact area limits the induction of coolant and promotes high temperatures in the coolant zone where heat is generated. In some types of grinding geometry a large contact area is difficult to avoid. Therefore, we already suggested that an alternative is to excite the wheel at ultrasonic frequency, which also admits coolant between wheel and workpiece, The results showed that the grinding force value was lower than that obtained with no vibration (conventional) grinding in shear mode. Further, exciting the wheel to induce a coolant in the contact zone, it was found possible that removal rate is increased 2 times.
Another is that the ground surface is scratched by various abrasive grits on the grinding wheel surface. Therefore, it is very difficult to keep a high quality ground surface, because, it is impossible to uniform the grits size, form, density, and orientation, using the grinding wheel. Thus, we were led to the conclusion that we need a new diamond tool instead of the grinding wheel. It is "Engineered Tool" . This tool has many small posts on the single crystal diamond surface (1,0,0). The diamond size is 2*2*1mm. Those posts was precisely machined 15 g in apart from each other, using Excimer Laser. Each post size is 5 mu m square, 10 mu m height. This represents a very high density of active diamond with constant and known spacing. We expect. that the "Engineered Tool" technique contrivutes to the development of high precision machining of hard and brittle materials, as contrasted with conventional machining.

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] Kenichiro Imai: "Grinding Force Criteria in Shear-Mode Grinding" The proceedings of ASPE, The 13^<th> Annual Meeting. 136-139 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Hiroshi Hashimoto: "Speculation on Ultrasonic-Assisted Grinding with an Engineered Wheel" OSA Technical Digest Series Volume12, OMB3-1. 20 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Hiroshi Hashimoto: "Epistemology and Abduction in Shear (Ductile)-mode Grinding of Brittle Materials" The proceedings of ASPE, Topical Meeting. 36-39 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Yuji Yoshida: "An Application of 40kHz Ultrasonic Vibration to Shear-mode Grinding of Silicon Wafers" The Proceedings of ASPE, The 12^<th> Annual Meeting. 262-266 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 今井健一郎: "シェアモード研削加工における研削代の評価-ぜい性破壊痕の減少にともなう比研削エネルギーの変化-" 精密工学会誌. 63. 1023-1027 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 今井健一郎: "定常的な研削抵抗に基づくシェアモード研削加工の研究" 精密工学会誌. 63. 849-853 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kenichiro Imai and Hiroshi Hashimoto: "Grinding Force Criteria in Shear-Mode Grinding" The 13^<th> Annual Meeting The proceedings of ASPE. 136-139 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hiroshi Hashimoto, Kenichiro Imai, et al: "Speculation on Ultrasonic-Assisted Grinding with an Engineered Wheel" OSA Technical Digest Series. Volume 12. 20 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hiroshi Hashimoto and Kenichiro Imai: "Epistemology and Abduction in Shear (Ductile)-mode Grinding of Brittle Materials" Topical Meeting The proceedings of ASPE. 36-39 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Yuji Yoshida, Kenichiro Imai, Hiroshi Hashimoto, et al: "An Application of 40kHz Ultrasonic Vibration to Shear-mode Grinding of Silicon Wafers" The 12^<th> Annual Meeting, The proceedings of ASPE. 262-266 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kenichiro Imai and Hiroshi Hashimoto: "Shear-Mode Grinding Aallowance to Remove Residual Damage Caused in Brittle-mode Grinding" Journal of the Japan Society for Precision Engineering. Vol.63, No.7. 1023-1027 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kenichito Imai and Hiroshi Hashimoto: "Shear-Mode Grinding Based on The Constant Grinding Force" Journal of the Japan Society for Precision Engineering. Vol.63, No.6. 849-853 (1997)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-12-08  

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