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1999 Fiscal Year Final Research Report Summary

Development of Novel Materials Assembling Method Based on Nano-space Chemical Reactions

Research Project

Project/Area Number 09305044
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Inorganic materials/Physical properties
Research InstitutionNagoya University

Principal Investigator

KOUMOTO Kunihito  Nagoya University, School of Engineering, Professor, 工学研究科, 教授 (30133094)

Co-Investigator(Kenkyū-buntansha) SUZUKI Yutaka  School of Engineering, Research Associate, 工学研究科, 助手 (60023214)
SEO Won Son  School of Engineering, Associate Professor, 工学研究科, 助教授 (30242829)
Project Period (FY) 1997 – 1999
KeywordsCeramics / Thin Film / Micropatterning / Self-Assembled Monolayer / Fine Particle / Arrangement / Titanium Dioxide / Silica
Research Abstract

We have succeeded in fabricating micropatterned TiOィイD22ィエD2 films on self-assembled monolayers (SAM) of phenyltrichlorosilane (PTCS) through the precipitation from an aqueous solution containing TiFィイD26ィエD2ィイD12-ィエD1 ions. A PTCS monolayers was first formed on a silicon water and UV light was irradiated onto the masked monolayer to obtain the SAM with two-dimensionally patterned hydrophilic/hydrophobic surfaces. This patterned substrate was immersed in an aqueous solution to directly deposit TiOィイD22ィエD2 (anatase). Sonication treatment after the deposition resulted in a micropatterned TiOィイD22ィエD2 thin film.
We also succeeded in fabricating micropatterns of titanium dioxide thin films on SAMs. SAMs of OTS (octadecyltrichloro-silane) were formed on Si wafers, and were modified by UV irradiation using a photomask to generate methyl/silanol-pattern. They were used as templates to deposit titanium dioxide thin films by the use of TDD (titanium dichloride diethoxide). Amorphous films with approximate compositions Ti : O : Cl : C = 1 : 2.2 : 0.17 : 0.37 were selectively deposited on silanol regions. Line width variation of the pattern of an as-deposited film was improved to be well below the electronics design rule, 5%.
Novel processes to arrange fine silica spheres two-dimensionally on SAMs were developed. SiOィイD22ィエD2 sphere surfaces were modified to have CN groups by the use of trichlorocyanoethysilane, and CN groups were oxidized to COOH groups with t-BuOK. A SAM of PTCS with a phenyl/silanol-group pattern was used as a template to arrange fine SiOィイD22ィエD2 spheres. SiOィイD22ィエD2 spheres were selectively attached to silanol surfaces possibly forming ester bonds, which enabled the fabrication of micropatterned arrangement of SiOィイD22ィエD2 spheres.

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] H. Lin, W. S. Seo, K. Koumoto et al.: "Preparation of Metallic Crystal by Langmuir-Blodgett Tech"Mol. Cryst. Liq. Cryst.. 295. 129-132 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] W. S. Seo, K. Kuwabara, K. Koumoto et al.: "Vapor Growth of Two-Dimensionally Assembled Organic Molecules"Supramol. Sci.. 5. 423-426 (198)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H. Lin, W. S. Seo, K. Koumoto et al.: "Crystal Growth of Lepidocrocite and Magnetite under Langmuir Monolayers"J. Cryst. Growth. 192. 250-256 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K. Koumoto, S. Seo, T. Sugiyama: "Micropatterning of Titanium on Self-assembled Monolayers Using a Liquid Phase"Chem. Mater.. 11・9. 2305-2309 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 河本邦仁: "セラミックス薄膜のバイオミメティック成長"季刊化学総説. 42. 83-93 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 増田佳文、河本邦仁: "無機微粒子が発見する新機能と粒子配列技術"無機マテリアル. 7. 4-12 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H. Lin, W. S. Seo, K. Koumoto et al.: "Preparation of Metallic Crystals by Langmuir Blodgett Technique"Mol. Cryst. Liq. Cryst.. 295. 129-132 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] W. S. Seo, K. Kuwabara, K. Koumoto et al.: "Vapor-growth of Sn on Stearic Acid Molecular Layers"Supramol Sci.. 5(3-4). 423-426 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Lin, W. S. Seo, K. Koumoto et al.: "Crystal Growth of Lepidocrocite and Magnetite under Langmuir Monolayers"J. Cryst. Growth. 192. 250-256 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Koumoto, S. Seo, T. Sugiyama et al.: "Micropatterning of Titanium Dioxide on Self-assembled Monolayers Using a Liquid Phase Deposition Process"Chem. Mater.. 11(9). 2305-2309 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Koumoto: "Biomimetic Growth of Ceramic Thin Films"Kagaku Sosetsu. 42. 83-93 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Masuda, K. Koumoto: "Novel Functions of Inorganic Fine Particles and Their Assembly Techniques"Inorganic Materials. 7. 4-12 (2000)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2001-10-23  

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