1999 Fiscal Year Final Research Report Summary
A three dimensional measuring machine using a crystal as the scale reference
| Project/Area Number |
09355013
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
計測・制御工学
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| Research Institution | The University of Tokyo |
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Principal Investigator |
KAWAKATAU Hideki Institute of Industrial Science, University of Tokyo, Associate Prof., 生産技術研究所, 助教授 (30224728)
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| Co-Investigator(Kenkyū-buntansha) |
HOSHI Yasuo Institute of Industrial Science, University of Tokyo, Research Associate, 生産技術研究所, 助手 (80301133)
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| Project Period (FY) |
1997 – 1999
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| Keywords | AFM / STM / METROLOGY |
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| Research Abstract |
A Linear encorder was realized using an atomic force microscope and a crystalline lattice. Maximum velocity of 20 microns/s was realized by selecting the combination of the rubbing surface. The velocity corresponds to a count rate of around 100kcounts/s, where one count corresponds to one lattice. Due to the fast scan rate, measurement is little affected by drift during the data acquisition. For example, assuming a drift of 1pm/s, the drift within the time to scan 1micron is 1pm/s x 0.05S = 0.05 pm. This is negligible compared to other cause of error. The above result is important, since in the case of conventional apparatuses using a crystal as the scale reference, the effect of drift was the dominant cause of measurement error.
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