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2000 Fiscal Year Final Research Report Summary

Development of X-ray and infrared detectors using micromachining technologies

Research Project

Project/Area Number 09440092
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section一般
Research Field Astronomy
Research InstitutionInstitute of Space and Astronautical Science

Principal Investigator

MITSUDA Kazuhisa  Institute of Space and Astronautical Science, High Energy Astrophysics, Professor, 宇宙圏研究系, 教授 (80183961)

Co-Investigator(Kenkyū-buntansha) HIROSE Kazuyuki  Institute of Space and Astronautical Science, High Energy Astrophysics, Associate Professor, 衛星応用工学系, 助教授 (00280553)
FUJIMOTO Ryuichi  Institute of Space and Astronautical Science, High Energy Astrophysics, Research Associate, 宇宙圏研究系, 助手 (20280555)
SHOJI Shuji  Waseda University, School of Science and Engineering, Professor, 理工学部, 教授 (00171017)
SHIMIZU Hirohiko  Institute of Chemical Research, Senior Research Staff, 理化学研究所, 研究員 (50249900)
MURAKAMI Hiroshi  Institute of Space and Astronautical Science, High Energy Astrophysics, Professor, 宇宙圏研究系, 教授 (40135299)
Project Period (FY) 1997 – 2000
KeywordsDetectors / X-ray / infrared / Spectrometer / Superconductors / microcalorimeters / bolometers / SQUID / SQUID array amp. / Imaging / micromachining
Research Abstract

We studied new approaches to develop imaging microcalorimeters. We fabricated test models to confirm the new ideas experimentally. Major results are summarized below.
(1) Micrormachine processing to fabricate microcalorimeter pixel structures
We developed processes suited for imaging device. Finally we succeeded to fabricate calorimeter pixels with dry processes alone.
(2) Fabrication of X-ray absorber on the calorimer pixel with micromachine processing
We developed new processes utilizing plating to fabricate X-ray absorbers of "mushroom structure" which covers the calorimeter pixels with high covering efficiencies.
(3) Ti-Au bilayer TES thermometers
In our calorimeters, the temperature is sensed by the superconducting transition edge sensors (TES). We developed TES with Ti-Au bilayer membrane.
(4) Microcalorimeter imaging readout system
Number of signal lines allowed between the cryogenic to room temperatures is very limited. We developed a new method to multiplex calorimeter signals on frequency space. We developed a SQUID with multiple number of input coils and experimentally proved our new approach with a two-pixel calorimeter.
(5) Evaluation of the X-ray microcalorimeters
We evaluated the energy resolution of our X-ray microcalorimeter operating at 200 mK.The energy resolution was 99 eV.This is not good enough. We studied the extra noise factors which limit our resolutions.

  • Research Products

    (21 results)

All Other

All Publications (21 results)

  • [Publications] H.Kudo,S.shoji,R.Fujimoto,K.Mitsuda, 他: "Development of the high energy resolution X-ray Micro-bolometer for detecting Cosmic Rays"in Proceedings of the 2nd Int.Symp.on Electrochemical Microsystem Technology. 122-123 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Kudo,S.Shoji,r.Fujimoto,K.Mitsuda, 他: "Development of a high energy resolution X-ray microcalorimeter using Ti/Au TES"in Proceedings of SPIE on Design, Characterization, and Packaging for MEMS and Microelectronics. 3893. 241-249 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Mitsuda,R.Fujimoto,S.Shoji et al.: "Multi-pixel readout of transition-edge sensors using a multi-input SQUID"Nuclear Instruments and Methods in Physics Research A. 436. 252-255 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] R.Fujimoto,K.Mitsuda,S.Shoji, et al.: "Development of a superconduting X-ray microcalorimeter with a titanium/gold thin film as a thermometer"Nuclear Instruments and Methods in Physics Research A. 444. 180-183 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Kudo,S.Shoji,R.Fujimoto,K.Mitsuda, 他: "Improvements of an x-ray microcalorimeter for detecting cosmic rays."in Proceedings of SPIE on Micromachining and Microfabrication. 4230. 58-65 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 満田和久,藤本龍一 他: "チタン-金薄膜TESX線マイクロカロリメータの開発"放射線. 26. 115-122 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] R.Fujimoto,K.Mitsuda et al.: "Status of X-ray Microcalorimeter Development at ISAS"Conference series of Astronomical Society of Pacific ('New Century of X-ray Astronomy'ed. by H.Kunieda et al.). (印刷中). (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Oshima,R.Fujimoto, et al.: "Performance of SII SQUID Amplifiers"Conference series of Astronomical Society of Pacific ('New Century of X-ray Astronomy'ed. by H.Kunieda et al.). (印刷中). (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Ishisaki,R.Fujimoto et al.: "Development of a TES microcalorimeter system for the future X-ray mission"Conference series of Astronomical Society of Pacific ('New Century of X-ray Astronomy'ed. by H.Kunieda et al.). (印刷中). (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Miyazaki,K.Mitsuda, et al.: "AC Calorimeter Bridge ; a new multi-pixel readout method for TES calorimeter arrays"Conference series of Astronomical Society of Pacific ('New Century of X-ray Astronomy'ed. by H.Kunieda et al.). (印刷中). (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Hiroyuki Kudo, Yuichi Yokoyama, Shuichi Shoji, Yoichi Aruga, Ryuichi Fujimoto, Kazuhisa Mitsuda, Toshiyuki Miyazaki: "Development of the high energy resolution X-ray Microbolometer for detecting Cosmic Rays"in Proceedings of the 2nd Int.Symp.on Electrochemical Microsystem Technology. 122-123 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hiroyuki Kudo, Yuichi Yoloyama, Shuichi Shoji, Tai Oshima, Yoichi Aruga, Kana Maegami, Ryuichi Fujimoto, Toshiyuki Miyazaki, Kazuhisa Mitsuda: "Development of a high energy resolution X-ray microcalorimeter using Ti/Au TES"in Proceedings of SPIE on Design, Characterization, and Packaging for MEMS and Microelectronics. 3893. 241-249 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Mitsuda, R.Fujimoto, T.Miyazaki, K.Maegami, Y.Aruga, T.Oshima, S.Nakayama, S.Shoji, H.Kudo, Y.Yokoyama, T.Mihara, H.M.Shimizu: "Multi-pixel readout of transition-edge sensors using a multi-input SQUID"Nuclear Instruments and Methods in Physics Research A. 436. 252-255 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] R.Fujimoto, K.Mitsuda, T.Miyazaki, K.Maegami, Y.Aruga, T.Oshima, M.Yamazaki, S.shoji, H.Kudo, Y.Yokoyama, T.Mihara, H.M.Shimizu: "Development of a superconduting X-ray microcalorimeter with a titanium/gold thin film as a thermometer"Nuclear Instruments and Methods in Physics Research A. 444. 180-183 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hiroyuki Kudo, Yuichi Yokoyama, Shuichi Shoji, Kazuhisa Mitsuda, Ryuichi Fujimoto, Toshiyuki Miyazaki, Tai Oshima, Masahiro Yamazaki, Naoko Iyomoto, Kazuo Futamoto, Yoshitaka Ishisaki, Tomohiro Kagei: "Improvements for an x-ray microcalorimeter for detecting cosmic rays"in Proceedings of SPIE on Micromachining and Microfabrication. 4230. 58-65 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Mitsuda, R.Fujimoto, T.Miyazaki, T.Oshima, M.Yamazaki, S.Shoji, H.Kudo, Y.Yokoyama: "Development of Ti-Au TES calorimeters"Houshasen (Radiations). 26. 115-122 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] R.Fujimoto, K.Mitsuda, N.Iyomoto, M.D.Audley, T.Miyazaki, T.Oshima, M.Yamazaki, K.Futamoto, Y.Ishisaki, N.Yamasaki, T.Ohashi, T.Kagei, A.Kushino, T.Hiroike, S.Shoji, H.Kudo, Y.Yokoyama, H.Sato, T.Nakamura, E.Gotoh, Y.Kuroda, M.Onishi, M.Goto: "Status of X-ray Microcalorimeter Development at ISAS"in proceedings New Century of X-ray Astronomy, ed.by H.Kunieda et al.. (in press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Ishisaki, N.Yamasaki, T.Ohashi, T.Kagei, T.Miyazaki, K.Mitsuda, R.Fujimoto, N.Iyomoto, T.Oshima, M.Yamazaki, K.Futamoto, M.D.Audley, S.Shoji, H.Kudo, Y.Yokoyama: "Development of a TES microcalorimeter system for the future X-ray mission"in proceedings of New Century of X-ray Astronomy, ed.by H.Kunieda et al.. (in Press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Oshima, M.Yamazaki, K.Mitsuda, R.Fujimoto, N.Iyomoto, M.D.Audley, T.miyazaki, K.Futamoto, Y.Ishisaki, N.Yamasaki, T.Ohashi, T.Kagei, S.Shoji, H.Kudo, Y.Yokoyama, A.Kushino, T.Hiroike: "Performance of SII SQUID Amplifiers"in proceedings of New Century of X-ray Astronomy, ed.by H.Kunieda et al.. (in press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Yamasaki, A.Kushino, Y.Aoki, Y.Ishisaki, T.Ohashi, K.Mitsuda: "Measurement of the specific heat of Er-doped YAG and its application to the X-ray astronomy"in proceedings of New Century of X-ray Astronomy, ed.by H.Kunieda et al.. (in press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Miyazaki, M.Yamazaki, K.Futamoto, K.Mitsuda, R.Fujimoto, N.Iyomoto, T.Oshima, M.D.Audley, Y.Ishisaki, N.Yamasaki, T.Ohashi, T.Kagei, S.Shoji, H.Kudo, Y.Yokoyama: "AC Calorimeter Bridge ; a new multi-pixel readout method for TES calorimeter arrays"in proceedings of New Century of X-ray Astronomy, ed.by H.Kunieda et al.. (in press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2002-03-26  

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