1998 Fiscal Year Final Research Report Summary
Development of the quantitative characterization method for microstructures on semiconductor surfaces by using X-ray diffraction
| Project/Area Number |
09450016
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
表面界面物性
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| Research Institution | Osaka University |
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Principal Investigator |
UMENO Masataka Osaka Univ., Graduate School of Eng., Professor, 大学院・工学研究科, 教授 (50029071)
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| Co-Investigator(Kenkyū-buntansha) |
益子 洋治 三菱電機(株), ULSI開発研究所, グループマネージャ(
SHIMURA Takayoshi Osaka Univ., Graduate School of Eng., Research Associate, 大学院・工学研究科, 助手 (90252600)
YOHJI Mashiko Mitsubishi Electric Corp., ULSI Iab., Group Manager (researcher)
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| Project Period (FY) |
1997 – 1998
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| Keywords | X-ray diffraction / CTR scattering / Microdevice / Microstructure / silicon |
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| Research Abstract |
Microstructures of ditches were formed on the Si(O01) surfaces by lithography and chemical etching with KOH.The width of the ditches ranges from 0.2 to 5.0mum.
The ratio of the width and the space of the ditches ranges from 1 : 1 to 1 : 20. The size of each area was 1.0x2.Omm^2. The shape of the gratings were confiqried by atomic force microscopy, indicating that they have V shape. X-ray diffraction patterns were observed around the 111 Bragg point in the symmetrical setting. The effective surface area was limited by placing slits of 0.5mm wide and Ge channel cut crystal before the samples and the detector so that the X-ray diffraction patterns from the neighboring areas were measured separately. The periodic length of the gratings and the direction of the slopes were estimated from the diffraction patterns from the several areas. The intensity distributions calculated by Fourie transform were similar to those of the observations. Furthermore, the diffraction patterns were successfully observed from the thermally oxidized gratings. They were almost as same as those form the non-oxidized ones, while the intensity distributions showed slight asymmetry around the Bragg point. It is considered that the intensity distribution give us the information not only about the shape of the crystal, but also the crystal structure in the microstructure, such as lattice relaxation, because the asymmetry could not be interpreted only by the shape effect.
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