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1998 Fiscal Year Final Research Report Summary

Biologically-Inspired Machines Composed of Many Integrated Micromachines

Research Project

Project/Area Number 09450104
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionThe University of Tokyo

Principal Investigator

FUJITA Hiroyuki  Institute of Industrial Science, Univ.of Tokyo, Professor, 生産技術研究所, 教授 (90134642)

Co-Investigator(Kenkyū-buntansha) TOSHIYOSHI Hiroshi  Institute of Industrial Science, Univ.of Tokyo, Lecturer, 生産技術研究所, 講師 (50282603)
Project Period (FY) 1997 – 1998
Keywordsmicromachine / integrated circuit / micromachining / cellar automaton / decentralized control / evolutionary algorithmn / micro actuator
Research Abstract

Biological systems and organs, which are composed of many simple elements, perform complicated functions by coordinating the behavior of elements. Cilia and the immune system composed of limphocites are such examples. Inspired by biological systems, we have investigated the distributed architecture of mechanical systems composed of many micromachines. The investigation focused in fabrication and decentralized control of such machines. The micromachine element has sensors, actuators and electronic circuits, all integrated together. We selected an intelligent cellular conveyor as the research target. Micro actuators arrayed on a planar substrate convey objects on them. Based on the information from sensors of its own and surrounding micromachines, the control circuit in a micromachine determines the motion of each actuator. We obtained the following resuts :
(l)We studied the control logic of the micromachine for the positioning and orientating task. The task should be completed by the gr … More oup work of microactuators that are controlled individually by the control logic. We extended two-dimensional cellular automata to handle sensor input and information obtained from neighboring micromachines and adapted them as the controller. The control rules were optimized by evolutionary algorithm ; selection of better rules depended on the simulated performance of each rule. The simulation model included dynamics of object motion and friction. Rules that were capable of positioning and orientating an object evolved in less than 100 generations.
(2)We also designed the control circuits for a sorting task. The system recognizes objects with different shapes and conveys them in different directions according to their shapes. Its subsystems, such as arrayed actuators, a distributed logic for shape recognition and a high-voltage driver for actuators were fabricated and operated. The system integration of those subsystems is underway.
(3)We developed hybrid integration technologies of chips with electronic circuits and chips with micromachined sensors and actuators. The technologies allow us to fabricate both chips separately and to increase the yield One method is called a silicon motherboard technology. The one edge of each chip is machined into micro connectors by deep dry etching. Chips are inserted into receptors that are machined in a bigger chip, the motherboard. Another technology is a stacking integration using micro holes through the chip. We confirmed adequate electrical and mechanical interconnection between the electric chip and the micromachine chip through the holes. Less

  • Research Products

    (16 results)

All Other

All Publications (16 results)

  • [Publications] G.Bourbon,P.Minotti,P.Helin,T.Masuzawa and H.Fujia: "Motive Surfaces using Active Polysilicon Microstructures Coated on Tool Machined Macroscopic, Component" Proc.of The Forth International Conference on Intelligent Materials(ICIM'98). 306-307 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Hiroshi Toshiyoshi,Yoshio Mita, Minoru Ogawa,Hiroyuki Fujita: "SILICON MICRO MOTHERBOARDS FOR THREE-DIMENSIONAL ASSEMBLING OF MICRO SYSTEMS" The Transactions of The Institute of Electrical Enginners of Japan. 118-E, No.10. 444-448 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Konishi,K,Matsushita, T.Goto,H.Fujita: "Three Dimensional Wire Array for Connection between Multi Layers" The Transactions of The Institute of Electrical Enginners of Japan. 117-E, No.3. 160-164 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 藤田博之: "マイクロアクチュエータと分布型機械" 電気学会論文誌. 117-E、12. 824-827 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Fujita: "MEMS Technology:MEMS Development in a Past Decade and its Future Prospects" The Transactions of The Institute of Electrical Enginners of Japan. 117-E、8. 401-406 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.KOHLBECKER,H.FUJITA,R.ZURAWSKI:"Evolutionary Optimization of Distributed Part Handling Control" Proc.IEEE First Int'I.Conference on Intelligent Processing Systems(ICIPS'97). 1. 558-562 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 藤田博之、他: "生物に学ぶマシン--柔らかく優しく動く機械" 第12回「大学と科学」公開シンポジウム組織委員会、(株)クバプロ, 175 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 藤田博之、他: "免疫型システムとその応用--免疫系に学んだ知能システム" コロナ社, 167 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] "Motive Surfaces using Active Polysilicon Microstructures Coated on Tool Machined Macroscopic, Component" Proc.of The Forth International Conference on Intelligent Materials (ICIM'98). 306-307 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hiroshi Toshiyoshi, Yoshio Mita, Minoru Ogawa, Hiroyuki Fujita: "SILICON MICRO MOTHERBOARDS FOR THREE-DIMENSIONAL ASSEMBLING OF MICRO SYSTEMS" The Transactions of The Institute of Electrical Engineers of Japan. 118-E,No.10. 444-448 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Konishi, K.Matsushita, T.Goto, H.Fujita: "Three Dimensional Wire Array for Connection between Multi Layers" The Transactions of The Institute of Electrical Engineers of Japan. 117-E,No.3. 160-164 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Fujita: "Microactuators and Distributed Mechanical Systems" The Transactions of The Institute of Electrical Engineers of Japan. Vol.117-E,No.12. 824-827 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Fujita: "MEMS Technology : MEMS Development in a Past Decade and its Future Prospects" The Transactions of The Institute of Electrical Engineers of Japan. 117-E,8. 401-406 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.KOHLBECKER,H.FUJITA,R.ZURAWSKI: "Evolutionary Optimization of Distributed Part Handling Control" Proc.IEEE First Int'l.Conference on Intelligent Processing Systems (ICIPS'97). 1. 558-562 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Fujita, et al.: ed.12th Symposium on Science and University Organizing Committee, Machines Insipired by Living Creatures -- Human Friendly Flexible Machines. Kuba Pro Publ.Tokyo, Japan, (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Ishida, H.Hirayama, H.Fujita, A.Ishiguro and K.Mori: Immunity-Based Systems and Its Applications : Intelligent Systems by Artificial Immune Systems. Corona Publ., Tokyo.Japan, (1998)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-12-08  

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