1997 Fiscal Year Annual Research Report

先鋭化ファイバープローブヘッドの開発とナノサイズ磁気記録への応用

Research Project

Project/Area Number	09450140
Research Institution	Tokyo Institute of Technology
Principal Investigator	中川茂樹東京工業大学, 工学部, 助教授 (60180246)
Co-Investigator(Kenkyū-buntansha)	松下伸広東京工業大学, 工学部, 助手 (90229469) 金田久美子東京工業大学, 工学部, 助手 (10108227)
Keywords	ファイバプローブヘッド / 光ファイバー / 軟磁性層 / 垂直磁気記録 / 単磁極へッド / 有限要素磁場解析
Research Abstract	(1)光ファイバプローブの先鋭化条件の最適化本研究では先端径がナノメータオーダーの磁性針を垂直磁気記録用ヘッドとして使用するが、これを作製するために、光ファイバーをNH_4FとHFの混合液でエッチングすることにより、コアとクラッド部分のエッチング速度の違いを利用してコア部分を選択的に取り出し、これを先鋭化したものを用いる。光ファイバーは直径約125mm程度のクラッド領域の内部に内径2mm程度のコアが存在し、NH_4FとHFの混合液の混合比を変えることで、コア部の先鋭化度やブロープ長、クラッド部分の外径などを制御できる技術を開発した。 (2)先鋭化光ファイバープローブへの軟磁性層のスパッタ被覆上記で作製された先鋭化光ファイバープローブに、対向ターゲット式スパッタ法を用いてNi-FeやFe-Cu-Nb-Si-B等の軟磁性層を購入したスパッタ電源を用いてスパッタ被覆した。対向ターゲット式スパッタ装置は2枚のターゲットを有しているため、スパッタ粒子が主として2方向から飛来するため、ファイバープローブ上には、均一でしかも段差被覆性の良好な軟磁性層を得ることができた。 (3)先鋭化単磁極へッドの磁場解析シミュレーション磁性層を被覆した先鋭化プローブにコイルを巻き単磁極形状のヘッドとした場合の磁場解析を、二次元軸対称モデルによる有限要素磁場解析を行い、プローブ直下や媒体層中での磁場強度や磁界分布の急峻さなどに付いて評価した。この結果、十分な磁界強度と急峻な磁界分布が得られることを確認し、適当な磁束のリターンパスを設けることでさらに書き込み電流効率が向上することなどがわかった。次年度以降はさらにファイバープローブの作製条件の最適化を行い、ピエゾ駆動ステージにマウントすることで実際の書き込み動作を行い、記録磁化状態を解析して本研究の目的を達成する予定である。

Research Products
(27 results)

All Other

All Publications (27 results)

[Publications] S.Nakagawa: "Preparation of Soft Magnetic and Thermally stable Fe-Cu-Ta : N/Ti mulilayered films by sputter deposition" Journal of Applied Physics. 81[8]. 3782-3784 (1997)
[Publications] K.Noma: "Effects of composition control on crystallographic and magnetic characteristics of Ba ferrite films sputterd with the mixture of Xe,Kr,Ar and O_2 for recording media" Journal of Applied Physics. 81[8]. 4377-4379 (1997)
[Publications] Takayuki Ichihara: "Improvement of micromagnetism of Ni-Fe/Co67Cr33 multilayers for backlayers of perpendicular magnetic recording media" IEEE Trans.on Magn.33,[5]. 3004-3006 (1997)
[Publications] Shigeki, Nakagawa: "Distribution of Coercivity and Anisotropy through Thickness Direction in Sputtered Co-Cr Films and its Relationship to Noise Characteristics in Perpendicular Magnetic Recording" IEEE Trans.on Magn.33,[5]. 3091-3093 (1997)
[Publications] Yasuyoshi Miyamoto: "MR characteristics of Ni_<81>Fe_<19>/Cu multilayers deposited by Kr sputtering with Ar ion bombardment on interfaces" IEEE Trans.on Magn.33,[5]. 3523-3525 (1997)
[Publications] K.Noma: "Study on S-and R-block construction with additional sinel blocks in sputter deposited Ba ferrite films" IEEE Trans.on Magn.33,[5]. 3637-3639 (1997)
[Publications] 中川茂樹: "Co-Cr薄膜の保磁力と磁気異方性の膜厚方向分布と記録再生特性" 日本応用磁気学会誌. 21,[S1]. 29-33 (1997)
[Publications] 松下伸広: "酸化物磁性薄膜による等方性磁気ディスクの作製と記録再生特性" 日本応用磁気学会誌. 21,[S1]. 34-37 (1997)
[Publications] 市原貴幸: "磁界印加堆積法によるNi-Fe/Co_<67>Cr_<33>多層膜の透磁率向上" 日本応用磁気学会誌. 21,[4-2]. 485-488 (1997)
[Publications] 宮本泰敬: "Ni-Fe/Cu多層膜における界面へのイオン照射" 日本応用磁気学会誌. 21,[4-2]. 565-568 (1997)
[Publications] 中川茂樹: "垂直磁気記録媒体・ヘッド用軟磁性層の特性改善" 日本応用磁気学会誌. 21,[6]. 983-988 (1997)
[Publications] Tomoyosi Siosawa: "Crystallographic and Magnetic Characteristics of c-axis Oriented Ba Ferrite Layer Deposited on Pt (111) Underlayer" Journal of Magnetics Society of Japan. 21,[S2]. 73-76 (1997)
[Publications] Kentaro Watanabe: "Investigation of the Exchange Coupling Field between Ni_<31>Fe_<19>/Fe_<50>Mn_<50> Bilayers in Spin Valve Devices by Ion Bombardment to Interfaces" Journal of Magnetics Society of Japan. 21,[S2]. 379-382 (1997)
[Publications] Masaru Hatakeyama: "Effect of Paramagnetic Co_<67>Cr_<33> Intermediate Layer on Longitudinal Recording Media with Ferromagnetic Co_<83>Cr_<17>/Cr Bilayered Film" Journal of Magnetics Society of Japan. 21,[S2]. 537-540 (1997)
[Publications] Hiroaki Matsumiya: "Preparation of Soft Magnetic Films of Nenocrystalline Fe-Cu-Nb-Si-B Alloy for Low Noise Backlayers" Journal of Magnetics Society of Japan. 21,[S2]. 549-552 (1997)
[Publications] Shigeki,Nakagawa: "Improvement of Soft Magnetic Properties of Ferro Magnetic Fe-Co-Ta : N/M Films Multilayered with Paramagnetic Ti,Co_<67>Cr_<33> and Fe_<82>Co_9Ta_9 : N Interlayers." IEEE Trans.on Magn.33,[5]. 3805-3807 (1997)
[Publications] N.Matsushita: "Ferromagnetic Characteristics of a Perovskite Type of (La,Sr) MnO_3 Films Deposited by Kr Sputtering" Proc.of 7th International Conference on Ferrites (ICF7). 629-630 (1997)
[Publications] K.Noma: "Increase of Saturation Magnetization of Ba Ferrite Films Deposited by Adding Xe into Sputtering Gas Mixture" Proc.of 7th International Conference on Ferrites (ICF7). 487-488 (1997)
[Publications] M.Naoe: "Sputter Deposition of Ferrite Films and Application for High Density Rigid Disk Media in Contact Mode" Proc.of 7th International Conference on Ferrites (ICF7). 735-738 (1997)
[Publications] M.Naoe: ""Crystallographic and Magnetic Characteristics of Ba Ferrite Sputtered Films for High Density Magnetic Recording Disks" Proc.of 7th International Conference on Ferrites (ICF7). 749-750 (1997)
[Publications] T.Ichihara: "Preparation of Very Soft Magnetic Ni-Fe/Co_<67>Cr_<33> Multilayers by Facing Tragets Sputtering with External Magnetic Field" Proc.of 4^<th> Inter.Symp.on Sputtering and Plasma Processing (ISSP'97). 111-116 (1997)
[Publications] N.Matsushita: "Diagnosis of Mixture Gas Discharge in Damage-Free Sputtering Apparatus and Deposition of Ba Ferrite Films at Low Substrate Temperature" Proc.of 4^<th> Inter.Symp.on Sputtering and Plasma Processing (ISSP'97). 117-122 (1997)
[Publications] Y.Miyamoto: "Giant Magnetoresistance of Ni_<81>Fe_<19>/Cu Multilayers Deposited by Dual Ion Beam Sputtering" Proc.of 4^<th> Inter.Symp.on Sputtering and Plasma Processing (ISSP'97). 123-128 (1997)
[Publications] S.Nakagawa: "Control of Nano-Structure of the Initial Growth Layers of Co-Cr Thin Films Deposited by Facing Targets Sputtering" Proc.of 4^<th> Inter.Symp.on Sputtering and Plasma Processing (ISSP'97). 151-156 (1997)
[Publications] Y.Miyamoto: "Effects of Ion Bombardment to Interfaces on Residual Internal Stress and Crystalline Structures on Multilayered Films" Proc.of 4^<th> Inter.Symp.on Sputtering and Plasma Processing (ISSP'97). 245-250 (1997)
[Publications] T.Ichihara: "Analysis of Stray Magnetic Field at The Substrate and Effect of Applying External Magnetic Field in Facing Targets Sputtering" Proc.of 4^<th> Inter.Symp.on Sputtering and Plasma Processing (ISSP'97). 251-256 (1997)
[Publications] M.Naoe: "Ion Beam Deposition Method Using Facing Targets Sputtering Ion Source As a New Reactive Deposition Method" Proc.of 4^<th> Inter.Symp.on Sputtering and Plasma Processing (ISSP'97). 411-420 (1997)

1997 Fiscal Year Annual Research Report

先鋭化ファイバープローブヘッドの開発とナノサイズ磁気記録への応用

Principal Investigator

中川 茂樹 東京工業大学, 工学部, 助教授 (60180246)

Research Products

[Publications] S.Nakagawa: "Preparation of Soft Magnetic and Thermally stable Fe-Cu-Ta : N/Ti mulilayered films by sputter deposition" Journal of Applied Physics. 81[8]. 3782-3784 (1997)

[Publications] K.Noma: "Effects of composition control on crystallographic and magnetic characteristics of Ba ferrite films sputterd with the mixture of Xe,Kr,Ar and O_2 for recording media" Journal of Applied Physics. 81[8]. 4377-4379 (1997)

[Publications] Takayuki Ichihara: "Improvement of micromagnetism of Ni-Fe/Co67Cr33 multilayers for backlayers of perpendicular magnetic recording media" IEEE Trans.on Magn.33,[5]. 3004-3006 (1997)

[Publications] Shigeki, Nakagawa: "Distribution of Coercivity and Anisotropy through Thickness Direction in Sputtered Co-Cr Films and its Relationship to Noise Characteristics in Perpendicular Magnetic Recording" IEEE Trans.on Magn.33,[5]. 3091-3093 (1997)

[Publications] Yasuyoshi Miyamoto: "MR characteristics of Ni_<81>Fe_<19>/Cu multilayers deposited by Kr sputtering with Ar ion bombardment on interfaces" IEEE Trans.on Magn.33,[5]. 3523-3525 (1997)

[Publications] K.Noma: "Study on S-and R-block construction with additional sinel blocks in sputter deposited Ba ferrite films" IEEE Trans.on Magn.33,[5]. 3637-3639 (1997)

[Publications] 中川 茂樹: "Co-Cr薄膜の保磁力と磁気異方性の膜厚方向分布と記録再生特性" 日本応用磁気学会誌. 21,[S1]. 29-33 (1997)

[Publications] 松下 伸広: "酸化物磁性薄膜による等方性磁気ディスクの作製と記録再生特性" 日本応用磁気学会誌. 21,[S1]. 34-37 (1997)

[Publications] 市原 貴幸: "磁界印加堆積法によるNi-Fe/Co_<67>Cr_<33>多層膜の透磁率向上" 日本応用磁気学会誌. 21,[4-2]. 485-488 (1997)

[Publications] 宮本 泰敬: "Ni-Fe/Cu多層膜における界面へのイオン照射" 日本応用磁気学会誌. 21,[4-2]. 565-568 (1997)

[Publications] 中川 茂樹: "垂直磁気記録媒体・ヘッド用軟磁性層の特性改善" 日本応用磁気学会誌. 21,[6]. 983-988 (1997)

[Publications] Tomoyosi Siosawa: "Crystallographic and Magnetic Characteristics of c-axis Oriented Ba Ferrite Layer Deposited on Pt (111) Underlayer" Journal of Magnetics Society of Japan. 21,[S2]. 73-76 (1997)

[Publications] Kentaro Watanabe: "Investigation of the Exchange Coupling Field between Ni_<31>Fe_<19>/Fe_<50>Mn_<50> Bilayers in Spin Valve Devices by Ion Bombardment to Interfaces" Journal of Magnetics Society of Japan. 21,[S2]. 379-382 (1997)

[Publications] Masaru Hatakeyama: "Effect of Paramagnetic Co_<67>Cr_<33> Intermediate Layer on Longitudinal Recording Media with Ferromagnetic Co_<83>Cr_<17>/Cr Bilayered Film" Journal of Magnetics Society of Japan. 21,[S2]. 537-540 (1997)

[Publications] Hiroaki Matsumiya: "Preparation of Soft Magnetic Films of Nenocrystalline Fe-Cu-Nb-Si-B Alloy for Low Noise Backlayers" Journal of Magnetics Society of Japan. 21,[S2]. 549-552 (1997)

[Publications] Shigeki,Nakagawa: "Improvement of Soft Magnetic Properties of Ferro Magnetic Fe-Co-Ta : N/M Films Multilayered with Paramagnetic Ti,Co_<67>Cr_<33> and Fe_<82>Co_9Ta_9 : N Interlayers." IEEE Trans.on Magn.33,[5]. 3805-3807 (1997)

[Publications] N.Matsushita: "Ferromagnetic Characteristics of a Perovskite Type of (La,Sr) MnO_3 Films Deposited by Kr Sputtering" Proc.of 7th International Conference on Ferrites (ICF7). 629-630 (1997)

[Publications] K.Noma: "Increase of Saturation Magnetization of Ba Ferrite Films Deposited by Adding Xe into Sputtering Gas Mixture" Proc.of 7th International Conference on Ferrites (ICF7). 487-488 (1997)

[Publications] M.Naoe: "Sputter Deposition of Ferrite Films and Application for High Density Rigid Disk Media in Contact Mode" Proc.of 7th International Conference on Ferrites (ICF7). 735-738 (1997)

[Publications] M.Naoe: ""Crystallographic and Magnetic Characteristics of Ba Ferrite Sputtered Films for High Density Magnetic Recording Disks" Proc.of 7th International Conference on Ferrites (ICF7). 749-750 (1997)

[Publications] T.Ichihara: "Preparation of Very Soft Magnetic Ni-Fe/Co_<67>Cr_<33> Multilayers by Facing Tragets Sputtering with External Magnetic Field" Proc.of 4^<th> Inter.Symp.on Sputtering and Plasma Processing (ISSP'97). 111-116 (1997)

[Publications] N.Matsushita: "Diagnosis of Mixture Gas Discharge in Damage-Free Sputtering Apparatus and Deposition of Ba Ferrite Films at Low Substrate Temperature" Proc.of 4^<th> Inter.Symp.on Sputtering and Plasma Processing (ISSP'97). 117-122 (1997)

[Publications] Y.Miyamoto: "Giant Magnetoresistance of Ni_<81>Fe_<19>/Cu Multilayers Deposited by Dual Ion Beam Sputtering" Proc.of 4^<th> Inter.Symp.on Sputtering and Plasma Processing (ISSP'97). 123-128 (1997)

[Publications] S.Nakagawa: "Control of Nano-Structure of the Initial Growth Layers of Co-Cr Thin Films Deposited by Facing Targets Sputtering" Proc.of 4^<th> Inter.Symp.on Sputtering and Plasma Processing (ISSP'97). 151-156 (1997)

[Publications] Y.Miyamoto: "Effects of Ion Bombardment to Interfaces on Residual Internal Stress and Crystalline Structures on Multilayered Films" Proc.of 4^<th> Inter.Symp.on Sputtering and Plasma Processing (ISSP'97). 245-250 (1997)

[Publications] T.Ichihara: "Analysis of Stray Magnetic Field at The Substrate and Effect of Applying External Magnetic Field in Facing Targets Sputtering" Proc.of 4^<th> Inter.Symp.on Sputtering and Plasma Processing (ISSP'97). 251-256 (1997)

[Publications] M.Naoe: "Ion Beam Deposition Method Using Facing Targets Sputtering Ion Source As a New Reactive Deposition Method" Proc.of 4^<th> Inter.Symp.on Sputtering and Plasma Processing (ISSP'97). 411-420 (1997)

中川茂樹東京工業大学, 工学部, 助教授 (60180246)

[Publications] 中川茂樹: "Co-Cr薄膜の保磁力と磁気異方性の膜厚方向分布と記録再生特性" 日本応用磁気学会誌. 21,[S1]. 29-33 (1997)

[Publications] 松下伸広: "酸化物磁性薄膜による等方性磁気ディスクの作製と記録再生特性" 日本応用磁気学会誌. 21,[S1]. 34-37 (1997)

[Publications] 市原貴幸: "磁界印加堆積法によるNi-Fe/Co_<67>Cr_<33>多層膜の透磁率向上" 日本応用磁気学会誌. 21,[4-2]. 485-488 (1997)

[Publications] 宮本泰敬: "Ni-Fe/Cu多層膜における界面へのイオン照射" 日本応用磁気学会誌. 21,[4-2]. 565-568 (1997)

[Publications] 中川茂樹: "垂直磁気記録媒体・ヘッド用軟磁性層の特性改善" 日本応用磁気学会誌. 21,[6]. 983-988 (1997)