1998 Fiscal Year Final Research Report Summary
Fine Striae Forming by Laser Beam Irradiation
| Project/Area Number |
09555039
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
機械工作・生産工学
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
TOKURA Hitoshi Tokyo Institute of Technology, Faculty of Engineering, Professor, 工学部, 教授 (10016628)
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| Co-Investigator(Kenkyū-buntansha) |
HIRATA Atsushi Tokyo Institute of Technology, Faculty of Engineering, Associate Professor, 工学部, 助教授 (50242277)
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| Project Period (FY) |
1997 – 1998
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| Keywords | laser processing / ArF excimer laser / fine striae / periodic surface structure / polyimide / quartz glass / liquid crystal orientation / polaried light |
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| Research Abstract |
The aim of this research is the geometrical surface modification of glass and polyimide. First varying the incident angle, the fluence and the number of pulses, ArF excimer laser beam was irradiated on to a synthetic silica glass. As the incident angle increased, striae parallel to the radiation direction appeared. Particularly when the angle was larger than 80 , the striae lined up in the direction of radiation. However when the angle larger than 83 , no striae could be found on the surface.
As the results, incident angle extremely effects the lining up. Threshold fluence to form striae was 4J/cm2. From the observation by AFM, the length, the depth and the width of a stria were 15mm ; l30nm, 1.5mm, respectively. Moreover to examine the formation mechanism soda-lime glass, quartz, corundum and calcium fluoride were chosen from the viewpoint of crystal structure or low absorption ratio of 193nm light, and they were irradiated on the same way. Only on the quartz similar striae appeared. These results draw the conclusion that the low absorption ratio and Si02 composition easily form fine striae.
Secondly thin polyimide was irradiated on the same way. 4 typical geometrical surfaces similar to those on glass were produced. To estimate the applicability of these surfaces to the liquid crystal orientation of LG display, a cell unit was prepared. As the result, liquid cry-stal was confirmed to be oriented. Then the surface obtained in this research will be applied to electrical equipment.
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