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1999 Fiscal Year Final Research Report Summary

Metallization of polymer surfaces for downsizing of electronic devices

Research Project

Project/Area Number 09555201
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Composite materials/Physical properties
Research InstitutionShizuoka University

Principal Investigator

INAGAKI Norihiro  Shizuoka University Fac. Eng. Professor, 工学部, 教授 (30022015)

Co-Investigator(Kenkyū-buntansha) SUZUKI Takanori  Tomoegawa Paper Co. Senior Researcher, 技術研究所, 首席研究員
YAMASHITA Mitsuji  Shizuoka University Fac. Eng. Professor, 工学部, 教授 (60110748)
TASAKA Shigeru  Shizuoka University Fac. Eng. Professor, 工学部, 教授 (10134793)
Project Period (FY) 1997 – 1999
KeywordsCopper metallization / Teflon / Polyimide / Plasma treatment / Silane coupling / Electroless plating / Electro plating / Imidazole
Research Abstract

The concept of this project is based on the preliminary results, which have been published by the head investigator in the Journal (Macromolecules). These are (1) Improved Adhesion between Kapton Film and Copper Metal by Plasma Graftpolymerization of Vinylimidazole (Macromolecules, vol. 29, pp. 1642-1648 (1996)), and (2) Surface Modification of Poly(tetrafluoroethylene) by remote Hydrogen Plasma (Macromolecules, vol. 29, pp. 4331-4339 (1996)). Introduction of some residues which can strongly interact with metal surface are introduced into the polymer surfaces is an essential factor in order to metallize polymer surfaces. Following procedures were designed:
For copper metallization of polyimide which is superior to electrical resistance, mechanical and thermal properties, the imidazole group was used as a residue to interact strongly with copper metal surface. 3'(Trimethoxysilyl)propoxy-2-hydroxypropyl-1,3-diazole was coupled with Kapton film surfaces which had been treated with argon plasma (plasma treatment). For copper metallization of fluoropolymers which are excellent electrical resistance in the high frequency current, the carbonyl group which was formed by hydrogen plasma treatment was used as a residue to interact wit metal surface.
The copper metallization of these polymer surfaces succeeded. The adhesion between the copper metal and polymer surface was good for practice usage.

  • Research Products

    (14 results)

All Other

All Publications (14 results)

  • [Publications] 稲垣訓宏: "プラズマ、エキシマレーザーを利用した高分子表面改質"表面科学. 18. 543-548 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Inagaki, S.Tasaka, and Y.Goto: "Surface modification of poly(tetrafluoroethylene) film by plasma graftpolymerization of sodium vinylsulfonate"Journal of Applied Polymer Science. 66. 77-84 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 稲垣訓宏: "リモートプラズマ処理によるポリマーの表面改質"日本接着学会誌. 34. 73-77 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Inagaki, S.Tasaka, and Y.W.Park: "Effects of the surface modification by remote hydrogen plasma on adhesion in the electroless copper/tetrafluoroethylene-hexafluoropropylene copolymer system"Journal of Adhesion Science & Technology. 12. 1105-1119 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Inagaki, S.Tasaka, and A.Onodera: "Improved adhesion between Kapton film and copper metal by silane-coupling reactions"Journal of Applied Polymer Science. 73. 1645-1654 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Inagaki, S.Tasaka, K.Narushima, and K.Mochizuki: "Surface modification of tetrafluoroethylene-perfluoroalkyl vinylether copolymer by remote H2 plasma and surface metallization with electroless plating copper metal"Macromolecules. 32. 5866-5871 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Inagaki, S.Tasaka and t.Umehara: "Effects of surface modification by remote hydrogen plasma on adhesion in Poly(tetrafluoroethylene)/copper composite"Journal of Applied Polymer Science. 71. 2191-2200 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N. Inagaki: "Surface modification of polymers by plasma and eximer laser"Hyomen Kagaku. vol. 18. 543-548 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Inagaki, S. Tasaka, and Y. Goto: "Surface modification of poly(tetrafluoroethylene) film by graftpolymerization of sodium vinylsulfonate"Journal of Applied Polymer Science. vol. 66. 77-84 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Inagaki: "Surface modificatio of polymers by remote plasma"Journal of the Adhesion Science Society of Japan. vol. 34. 73-77 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Inagaki, S. Tasaka, and Y. W. Park: "Effects of the the surface modification by remote hydrogen plasma on adhesion in the electroless copper/tetrafluoroethylene-hexafluoropropylene copolymer system"Journal of Adhesion Science & Technology. vol. 12. 1105-1119 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Inagaki, S. Tasaka, and T. Umehara: "Effects of surface modification by remote hydrogen plasma on adhesion in poly(tetrafluoroethylene)/copper composite"Journal of Applied Polymer Science. vol. 71. 2191-2200 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Inagaki, S. Tasaka, and A. Onodera: "Improved adhesion between Kapton film and copper metal by silane-coupling reactions"Journal of Applied Polymer Science. vol. 73. 1645-1654 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Inagaki, S. Tasaka, K. Narushima, and K. Mochizuki: "Surface modification of tetrafluoroethylene-perfluoroalkyl vinylether copolymer by remote hydrogen plasma and surface metallization with electroless plating copper metal"Macromolecules. vol. 32. 5866-5871 (1999)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2001-10-23  

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