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1998 Fiscal Year Final Research Report Summary

Development of Carbon Nitride Biomaterial Hard Coating by Ion Beam Mixing Method

Research Project

Project/Area Number 09650136
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionNagoya University

Principal Investigator

MATSUMURO Akihito  Nagoya University, Engineering, Associate Professor, 工学研究科, 助教授 (80173889)

Co-Investigator(Kenkyū-buntansha) NAKAMOTO Takeshi  Nagoya University, Engineering, Associate Professor, 工学研究科, 助教授 (30198262)
MORI Toshihiko  Nagoya University, Engineering, Associate Professor, 工学研究科, 助教授 (90023340)
Project Period (FY) 1997 – 1998
KeywordsIon Beam Mixing Method / Carbon Nitride Film / Synthesis Condition / Mechanical Properties / Tribological Properties / Biomaterial / Hard Coating
Research Abstract

In order to develop carbon nitride biomaterial hard coating by ion beam mixing method, We investigated the subject under the following three heads : (l)synthesis of carbon nitride films on by ion beam mixing method ; (2)microstructure and tribological properties of carbon nitride films ; and (3) possibility of application for biomaterial hard coatings.
The following results were obtained :
1. We clarified that the formation condition of C-N thin film on silicon and titanium substrate by ion beam mixing method, in which carbon was evaporated by electron beam and nitrogen ions were simultaneously bombarded.
2. We clarified that C-N films were consisted of C-N network like the disordered turbostratic structure.
3. We clarified that the hardness was up to 20 GPa and the frictional coefficient was 0.2.
4. We concluded that the mechanical properties and the tribological properties of C-N film were suitable for biomaterial.

  • Research Products

    (16 results)

All Other

All Publications (16 results)

  • [Publications] M.Kohzaki: "Preparation of carbon nitride thin films by ion beam assisted deposition and their mechanical properties" Thin Solid Films. 308-309. 239-244 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Kohzaki: "Influence of deposition temperature on bonding state and microstructure of carbon nitride thin films prepared by ion-beam-assisted deposition" Jpn.J.Appl.Phys.36-14A. 2313-2318 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 神崎昌郎: "イオンビーム支援蒸着法による窒化炭素膜形成におけるArイオン添加の効果" 精密工学会誌. 64-1. 152-156 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 松室昭仁: "ダイナミックイオンミキシング法によりTi-N系薄膜の形成とその機械的性質" 日本機械学会論文集. A64-618. 402-408 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Matsumuro: "Formation of TiN films with the preferred orientation by ion-beam-assisted deposition and their mechanical properties by nano-indentation method" Proc.CIMTEC'98. in print. (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hayashi: "Tribological properties of carbon nitride thin films prepared on titanium-nitride substrates by ion-beam-assisted deposition" Proc.CIMTEC'98. in print. (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Kohzaki, A.Matsumuro, T.Hayashi, M.Muramatsu, K.Yamaguchi: "Influence of deposition temperature on bonding state and microstructure of carbon nitride thin films prepared by ion-beam-assisted deposition." Jpn.J.Appl.Phys.36-14A. 2313-2318 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Kohzaki, A.Matsumuro, T.Hayashi, M.Muramatsu, K.Yamaguchi: "Preparation of carbon nitride thin films by ion beam assisted deposition and their mechnical properties." Thin Solid Films. 308-309. 239-244 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hayashi, A.Matsumuro, M.Muramatsu, K.Yamaguchi, Y.Takahashi: "Formation of Ti-N thin films prepared by dynamic ion mixing technique and their mechanical properties." Proc.IMMM'97. 591-598 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Kohzaki, A.Matsumuro, T.Hayashi, M.Muramatsu, K.Yamaguchi: "Nano-indentation hardness and frictional characteristics of carbon nitride films produced by ion-beam-assisted deposition." Proc.Tribology in Manufacturing Processes'97. 310-315 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Kohzaki, A.Matsumuro, T.Hayashi, M.Muramatsu, K.Yamaguchi: "Preparation of carbon nitride thin films by ion beam assisted deposition and their mechnical properties." Proc.ICMCTF'97. 203-203 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hayashi, A.Matsumuro, M.Muramatsu, Y.Takahashi, M.Kohzaki, K.Yamaguchi: "Variation in the preferred-orientations and their mechanical properties of TiN thin films prepared by ion-beam-assisted deposition" Proc.SSAM-4. 279-282 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hayashi, H.Yoshida, A.Matsumuro: "Visualization of atom-surface interaction using a molecular dynamics method." Proc.SSAM-4. 283-286 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Kohzaki, A.Matsumuro, T.Hayashi, K.Yamaguchi: "Preparation of hard carbon nitride films and their microstructure" Proc.SSAM-4. 256-259 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hayashi、A.Matsumuro、M.Muramatsu、K.Yamaguchi: "Tribological properties of carbon-nitride thin films prepared on titanium-nitride substrates by ion-beam-assisted deposition." Proc.CIMTEC'98. (in print). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Matsumuro、T.Watanabe、T.Hayashi、M.Muramatsu、Y.Takahashi、K.Yamaguchi: "Formation of TiN films with the preferred orientation by ion-beam-assisted deposition and their mechanical properties by nano-indentation method." Proc.CIMTEC'98. (in print). (1998)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-12-08  

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