1998 Fiscal Year Final Research Report Summary
"Highly Preferred Carbon Thin Films Obtained by DC Magnetron Sputtering with a Hot Filament"
| Project/Area Number |
09650351
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (C)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Electronic materials/Electric materials
|
|---|
| Research Institution | SHINSHU UNIVERSITY |
|---|
Principal Investigator |
ONUMA Yoshiharu Shinshu University, Faculty of Engineering, Professor, 工学部, 教授 (40020979)
|
|---|
| Project Period (FY) |
1997 – 1998
|
| Keywords | Thin film / Polycrystalline film / sputtering / Carbon / Chaoite / Chaoite |
|---|
| Research Abstract |
The purpose of this work is to examine the crystal condition of carbon thin films and to find out the possibility of application to electronic devices as a functional materials.
In this work , highly oriented crystalline carbon thin films were obtained using a DC magnetron sputtering system with a tungsten hot filament. Differing from the chemical vapor deposition method using hydrogen as a carrier gas with a hot filament . only pure argon gas was employed. The crystal structure of the carbon thin films was investigated by XRD.XPS, TEM.TED and FE-SEX analysis.
Results obtained in this work are as follows :
(1) According to XRD analysis, it was confirmed that the crystallized carbon thin films were formed
(2) XPS profiles show the contents of the films which were formed by more than 90 % of carbon atoms.
(3) As the results of the observation by using TEM, TED and FE-SEX analysis, it was revealed that crystalline carbon films consisted of nano crystal grains and nano fibers.
(4) To determine the valence state of the carbon atoms of the films, Laser Raman Spectra was examined and was found to be that the films have three Raman bands at 1581 cm^<-1>,1387cm^<-1> and 1979 cm^<-1> The first two peaks belong to polycrystalline graphite and the last peak corresponds to carbyne, one of the allotropes of carbon.
Conclusions : Highly oriented polycrystalline carbon thin films consisting of nano scale fibrous crystallites without hollow inside like carbon nanotubes were grown by DC magnetron hot filament as thermal electron emission source. Carbon thin films thus obtained are considered to be a new type of nano-scale carbon fibrous crystallites and the detection of carbyne is very interesting as one dimensional carbon structure.
|
