| Project/Area Number |
09650714
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Physical properties of metals
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| Research Institution | University of Tsukuba |
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Principal Investigator |
MIYAZAKI Shuichi University of Tsukuba, Institute of Materials Science, Professor, 物質工学系, 教授 (50133038)
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| Co-Investigator(Kenkyū-buntansha) |
ISHIDA Akira Ntional Research Institute for Metals, Senior Researcher, 主任研究官
NOMURA Kuniaki University of Tsukuba, Institute of Materials Science, Student, 大学院・工学研究科, 学振特別研究員
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| Project Period (FY) |
1997 – 1998
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| Keywords | Ti-Ni-Cu / Ti-Ni-Pd / shape memory alloy / thin film / sputter-deposition / microactuator / micromachine / martensitic transformation |
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| Research Abstract |
Ti-Ni shape memory alloy thin films have great advantages such as large deformation and recovery force for fabricating microactuators ; besides, even an intrinsic disadvantage of the shape memory alloy such as a slow response due to the limitation of cooling rate can be greatly improved in thin films. Therefore, the development of Ti-Ni shape memory alloy thin films has been keenly demanded. The present project has been successful in developing a perfect shape memory effect in sputter-deposited Ti-Ni-Cu and Ti-Ni-Pd ternary shape memory alloy thin films were also made by sputtering. They showed a small temperature hysteresis and high transfo, The transformation temperatures and shape memory characteristics were found to be strongly affected by heat-treatment and alloy composition. Ti-Ni-Cu and Ti-Ni-Pd ternary
shape memory alloy thin films showed a small temperature hysteresis and high transformation temperatures, respectively ; these characteristics are effective to achieve a high response actuator characteristic. The Ti-Ni-Pd thin film showed a single stage transformation upon cooling and heating similarly to a Ti-Ni binary alloy thin films. Corre- sponding, they showed a single stage deformation both upon cooling and heating. The Ti-Ni-Cu thin film showed a two-stage transformation and hence a two-stage deformation ; the first stage corresponds to the transformation between B2 and O(Orthorhombic)-phase and the second stage between the 0- and M-phases. The first stage transformation was accompanied by a small temperature hysteresis. All these thin films showed perfect shape memory effect.
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