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1998 Fiscal Year Final Research Report Summary

Study on growth condition of the large flattened diamond crystals with high quality

Research Project

Project/Area Number 09650769
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Structural/Functional materials
Research InstitutionTokai university

Principal Investigator

HIROSE Yoichi  Tokai University, School of Engineering, Professor, 工学部, 教授 (90049726)

Project Period (FY) 1997 – 1998
Keywordsdiamond / CVD diamond / flattened diamond / nucleation / combusion flame / Raman spectroscopy / high quality / diamond synthesis
Research Abstract

Flattened diamond crystals synthesized by CVD have very flat surfaces, good crystallinity and contain defects in low density. If large flattened diamond crystals (e.g.1 mm diameter) can be synthesized, many application, for example, semiconductor substrates and heat sinks, are expected. In this report, the author describes an investigation of the most suitable synthesis condition and growth mechanism of the flattened diamond crystals.
Growth experiment
The substrate temperature in the nucleation stage plays an important in the yield of the flattened diamond crystals. When the substrate temperature is kept at 500 during the nucleation stage, the yield of flattened diamond crystals is higher than when the substrate temperature is kept constant at 750 . The copper substrate is the most suitable material for the synthesis of the flattened diamond crystals. Based on SEM observations, it was determined that approximately 90% of the diamond crystals show flattened morphology under optimum conditions.
Growth mechanism
In the first stage of crystal growth, texture growth nucleation occurred with {111}-oriented surfaces, and twin boundaries parallel to {111} and thus to the substrate surface appear. Due to the presence of re-entrant corners along multiple twin-boundaries, the pre-ferential growth of side faces takes place in six directions, leading to the formation of flattened diamond crystals.

  • Research Products

    (10 results)

All Other

All Publications (10 results)

  • [Publications] 大島龍司: "偏光ラマン分光分析法による平板状ダイヤモンドの評価" 表面技術. 48巻. 567-568 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] R.Ohsima: "Characterization of Diamond Crystals by Polarized Raman Spectroscopy" Diamond Films and Technology. 7巻. 333-335 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 廣沢さくら: "陰極にダイヤモンドを用いた直流プラズマCVD法によるダイヤモンド薄膜の合成" 表面技術. 49巻. 94-95 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 阿部匡朗: "ダイヤモンド陰極を低温にした直流放電プラズマCVD法によるダイヤモンド薄膜の合成" 表面技術. 49巻. 655-656 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 広瀬洋一: "平板状ダイヤモンド結晶における生成条件の検討" 表面技術. 50巻. 印刷中5月号に掲載 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Ryuji OHSHIMA: "Characterization of Flattened Diamond by Polarized Raman Spectroscopy" The Journal of The Surface Finishing Society of Japan. vol48. 567-568 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Ryuji OHSHIMA: "Characterization of Diamond Crystals by Polarized Raman Spectroscopy" Diamond Films and Technology. vol7. 333-335 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Sakura HIROSAWA: "Diamond Films Synthesized by DC Plasma CVD with a Diamond Cathode" The Journal of The Surface Finishing Society of Japan. vol49. 94-95 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Masaaki ABE: "Diamond Films Synthesized by DC Plasma CVD with a Diamond Cathode at Low Temperature" The Journal of The Surface Finishing Society of Japan. vol49. 655-656 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Yoichi HIROSE: "Study on the growth condition of flattened diamond crystals" The Journal of The Surface Finishing Society of Japan. vol50, no5 (in press). (1999)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-12-08  

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