1999 Fiscal Year Final Research Report Summary
Particle Changing using UV/Photoelectron Method at Low Pressures
| Project/Area Number |
09650849
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
反応・分離工学
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| Research Institution | Osaka Prefecture University |
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Principal Investigator |
ADACHI Motoaki Osaka Prefecture University, Research Institute for Advanced Science and Technology, Assistant Professor, 先端科学研究所, 講師 (40100177)
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| Co-Investigator(Kenkyū-buntansha) |
OKUYAMA Kikuo Hiroshima University Dept. of Chemical Engineering, Professor, 工学部, 教授 (00101197)
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| Project Period (FY) |
1997 – 1999
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| Keywords | Semiconductor / Nanometer-sized particle / Vacuum process / UV excitation / Photoelectron emission / Charging / Particle collection |
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| Research Abstract |
Two devices using UV/photoelectron method were developed. In one device, photoelectrons are released from the photoelectron emitter by UV irradiation (Photoelectron emission-diffusion charging device, PE-CD) and, in other, they are done directly from particles (Direct photoelectron charging device, DPC). Two devices were estimated theoretically and experimentally. In the experiments, SiOィイD22ィエD2 particles prepared by CVD method were used. For PE-DC device, the reduce of pressure decreased strongly the particle charge, but the UV intensity and particle size gave small effects on the charge. The experimental results agreed well with numerical simulation. For DPC device, particle charge increased with the increase of UV Intensity and particle size and the decrease of the pressure. The numerical results explained the tendency of charging but did not quantitatively.
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