2000 Fiscal Year Final Research Report Summary
Joint Research on Micro Fluid Control System
| Project/Area Number |
10044112
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| Research Category |
Grant-in-Aid for Scientific Research (B).
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Applied physics, general
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| Research Institution | Tohoku University |
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Principal Investigator |
ESASHI Masayoshi Tohoku University, New Industry Creation Hatchery Center, Professor, 未来科学技術共同研究センター, 教授 (20108468)
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| Co-Investigator(Kenkyū-buntansha) |
TANAKA Shuji Tohoku University, Graduate School of Engineering, Research Associate, 大学院・工学研究科, 助手 (00312611)
HAGA Yoichi Tohoku University, Graduate School of Engineering, Research Associate, 大学院・工学研究科, 助手 (00282096)
ONO Takahito Tohoku University, Graduate School of Engineering, Lecturer, 大学院・工学研究科, 講師 (90282095)
MINAMI Kazuyuki Tohoku University, Graduate School of Engineering, Lecturer, 大学院・工学研究科, 講師 (00229759)
LIU Lyong xun Tohoku University, Graduate School of Engineering, Research Associate, 大学院・工学研究科, 助手 (90312610)
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| Project Period (FY) |
1998 – 2000
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| Keywords | Micro fluid control / Micromachine / Micromachining / Biochemical analysis / Flow sensor / Valve / Pump / Molding |
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| Research Abstract |
Micro fluid control systems which have integrated flow sensors, valves, pumps and flow channels are needed for different applications. Silicon micromachining which can integrate sensors and signal processing circuits and micro molding for mass production of disposable plastic microstructures can be used to fabricate micro modules for micro fluid control systems.
Sampling module which uses surface tension for controlling the mixing of sample solution and reagent chemicals have been developed for chemical analyzing systems. Surface tension plays important roles in this system. To control hydrophobic properties of the surface, pulse co-electroplating of Teflon and nickel was successfully developed.
Micro molding technology has been studied for the mass-production of disposable plastic module for analyzing small volume blood sample. Micro molds were fabricated by deep reactive ion etching (RIE) of silicon or using numerically controlled high speed milling machine in Tohoku University and the molding by hot embossing was carried out in Friburg University in Germany which is the collaborator in this project. In addition, micro molding using UV curable resin and UV transparent silicone rubber mold were developed. Immuno-reaction chip which has micro colume has been also fabricated.
DNA chips which can be used for low cost parallel DNA diagnosis were developed by synthesizing different DNA probe photrolithographycally on a silicon chip. DNA chip for detecting SNP of cancer promoter is being developed based on the DNA chip. Spotting head for DNA chip was also fabricated.
Integrated mass flow controller for corrosive gases was developed for fine gas control in sophisticated semiconductor processes. Stainless steel and aluminum nitride are used as the materials because of their inertness to halogen gasses as fluoride and chloride.
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