2000 Fiscal Year Annual Research Report

レーザ・プラズマプロセス開発による先端材料・デバイスの創製

Research Project

Project/Area Number	10045046
Research Institution	Kumamoto University
Principal Investigator	蛯原健治熊本大学, 工学部, 教授 (50035060)
Co-Investigator(Kenkyū-buntansha)	山形幸彦熊本大学, 工学部, 助教授 (70239862) 池上知顯熊本大学, 大学院・自然科学研究科, 助教授 (20136518)
Keywords	レーザーアブレーション / プラズマ / ヘテロ構造薄膜 / 強誘電体 / ナノ構造物 / ダイヤモンド薄膜 / 不揮発性メモリー / 窒素酸化物
Research Abstract	KrFレーザやYAGレーザを用いるアブレーション法による材料プロセス装置開発、レーザ生成プラズマの動的振る舞い解明、及び薄膜とナノ微粒子堆積について研究した。レーザアブレーション法にプラズマイオンインプンテーション法を併用したプロセスの開発によりTiNやCNxの堆積でチッソ成分の含有率を増やすことができた。また、ナノ科学技術への新しいシステムとして放電を重畳したマイクロ放電支援レーザアブレーション法を試み、ナノ構造の直接堆積や新ナノプロセスとしての可能性を調べた。レーザ蛍光法や分光学的方法を高度に機能化することにより、カーボン・レーザアブレーション生成プラズマの分解種C,C_2,C_3の空間的振舞を解明し、ダイヤモンド状膜特性との関連性を明らかにし、ラジカル種の効果がかなりの程度明らかとなった。さらにレーザ蛍光法を用いて、チッ化物作製で生ずるNOラジカルの観測法も確立した。高品位薄膜、これらのへテロ構造、ナノ構造体作製としてはLSMO,SBT,ZnO,WO_3を詳しく研究し、従来のYBCO,PZT,DLC,CN_x,TiNなどとの多属化、複合化を行った。特に、磁気抵抗体LSMOは、LSMO/MgO構造で磁気抵抗率8%(0.4T時)を実現でき、非接触磁気センサとして十分に利用できる程高感度である。カーボン系薄膜として、DLCは2.0eVの広い光学ギャップを有する膜が常温で成膜でき、また、CN_x膜はNOガス利用、負バイアス印加などにより、N/C比1.0を到達した。更に、ZnO膜の堆積を行い、紫外線照射に伴うレーザ作用を確認した。2名の研究者がNorth Carolina州立大学に滞在して、共同研究を行い、得られた研究成果の詳細な検討、実用化デバイスへの展開、国際学会開催などの討議を行った。2001年度以降はレーザアブレーション法を「ナノ科学技術材料プロセス」を指向した最適システムとして開発し、光デバイス、環境センサ、DNA操作ツールとして研究展開することになっている。

Research Products

(30 results)

All Other

All Publications (30 results)

[Publications] Kenji Ebihara,Toshiyuki Nakamiya,Tomoaki Ikegami: "Influence of ambient gas on diamondlike carbon films prepared by KrF pulsed laser deposition"Diamond and Related materials. (印刷中). (2001)
[Publications] Toshiyuki Nakamiya,Shin-ichi Aoqui,and Kenji Ebihara: "Experimental and numerical study on pulsed-laser annealing process of diamond-like carbon thin films"Diamond and Related Materilas. (印刷中). (2001)
[Publications] F.Mitsugi,Y.Yamagata,T.Ikegami,K.Ebihara,J.Narayan and A.M.Grishin: "Ferroelectric and colossal magnetoresistive properties of a PbZr_<1-X>Ti_XO_3/La_<1-X>Sr_XMnO_3 heterostructure film"Jpn.J.Appl.Phys.. 39・9B. 5418-5420 (2000)
[Publications] F.Mitsugi,T.Ikegami,K.Ebihara,J.Narayan,A.M.Grishin: "The colossal magnetoresistive La-Sr-Mn-O film by Pulsed Laser Deposition"Transactions of the Materials Research Society of Japan. 25・1. 357-360 (2000)
[Publications] Y.Yamagata,A.Sharma,R.M.Mayo,J.W.Newman,J.Narayan,K.Ebihara: "Comparative study of laser ablated plasma plumes from single crystal graphite and amorphous carbon targets : I.Optical emission spectroscopy"J.Appl.Phys . 88・11. 6861-6867 (2000)
[Publications] R.M.Mayo,J.W.Newman,A.Sharma,Y.Yamagata,J.Narayan: "Comparative study of laser ablated plasma plumes from single crystal graphite and amorphous carbon targets : II. Electric probe measurements"J.Appl.Phys.. 88・11. 6868-6874 (2000)
[Publications] 光木文秋,池上知顯,蛯原健治,A.M.Grishin,J.Narayan: "PLD法による巨大磁気抵抗La-Sr-Mn-O薄膜の作製と強誘電体Pb-Zr-Ti-Oとのヘテロ構造への応用"電気学会論文誌. 120-A・11. 1032-1037 (2000)
[Publications] Q.Wei,J.Sankar,A.K.Sharma,Y.Yamagata,J.Narayan: "Effect of chamber pressure and atmosphere on the microstructure and nanomechanical properties of amorphous carbon films prepared by pulsed laser deposition"Journal of Vacuum Science & Technology A : Vacuum, Surfaces, and Films. 19・1. 311-316 (2001)
[Publications] T.Ikegami,T.Maezono,F.Nakanishi,Y.Yamagata,K.Ebihara: "Estimation of equivalent circuit parameters of PV module and its application to optimal operation of PV system"Solar Energy Materials & Solar Cells. 67. 389-395 (2001)
[Publications] K.Goto,S.Tazoe,T.Ikegami,Y.Yamagata,K.Ebihara: "Production characteristics of ozone and nitric oxide"Proceedings of the 17th Symposium on Plasma Processing . 439-442 (2000)
[Publications] Y.Yamagata,A.Sharma,J.Narayan,R.M.Mayo,J.W.Newman,K.Ebihara: "Plasma diagnostics during pulsed laser deposition of diamond-like carbon using single crystal graphite and amorphous carbon"Proceedings of the 1999 MRS Fall Meeting . 593. 255-260 (2000)
[Publications] R.M.Mayo,J.W.Newman,A.Sharma,J.Narayan,Y.Yamagata: "Electrostatic measurement of plasma plume dynamics in pulsed laser evaporated graphite "Proceedings of the 1999 MRS Fall Meeting . 593. 261-266 (2000)
[Publications] Y.Yamagata,F.Mitsugi,T.Ikegami,K.Ebihara,A.Sharma,J.Narayan: "Spectroscopic study of ablation plasma plume during KrF pulsed laser deposition of diamond-like carbon films"Proceedings of APS March Meeting 2000. F-36.24. (2000)
[Publications] R.M.Mayo,J.W.Newman,Y.Yamagata,A.Sharma,J.Narayan: "Plasma and DLC film character from pulsed laser ablation of single crystal graphite and amorphous carbon"Proceedings of APS March Meeting 2000. B-18.002. (2000)
[Publications] R.M.Mayo,J.W.Newman,Y.Yamagata,A.Sharma,J.Narayan: "Plasma and DLC film characteristics from pulsed laser ablation of single crystal graphite and amorphous carbon : A comparative study employing electrostatic probe measurements"Proceedings of the 2000 MRS Spring Meeting . J3.1. (2000)
[Publications] Y.Yamagata,F.Mitsugi,T.Ikegami,K.Ebihara,A.Sharma,J.Narayan: "Laser induced fluorescence measurement of plasma plume during pulsed laser deposition of diamond-like carbon"Proceedings of the 2000 MRS Spring Meeting . J3.4. (2000)
[Publications] F.Mitsugi,T.Ikegami,K.Ebihara,J.Narayan,A.M.Grishin: "Properties of the magnetoresistive La_<0.8>Sr_<0.2>MnO_3 film and integration with PbZr_<0.52>Ti_<0.48>O_3 ferroelectrics"Proceedings of the 2000 MRS Spring Meeting . J.3.23. (2000)
[Publications] F.Nakanishi,T.Ikegami,K.Ebihara,S.Kuriyama,Y.Shiota: "Modeling and operation of a 10kW photovoltaic power generator using equivalent electric circuit method"Proceedings of the 28th IEEE Photovoltaic Specialists Conference . 6B. 51-57 (2000)
[Publications] T.Ikegami,S.Ishibashi,Y.Yamagata,K.Ebihara,R.K.Thareja,J.Narayan: "Spatial Distribution of Carbon Species in Laser Ablation of Graphite Target "AVS 47th International Symposium/NANO 6. 955. (2000)
[Publications] T.Ikegami,T.Ohshima,M.Nakao,S.Aoqui,K.Ebihara: "Impression of High Voltage Pulses on Substrate in Pulsed Laser Deposition "AVS 47th International Symposium/NANO 6. 956. (2000)
[Publications] F.Mitsugi,K.Ebihara: "Colossal Magnetresistivity of LSMO films prepared by KrF excimer laser"Extended summaries of the International workshop on Critical Currents and Applications of HTS. 81-82 (2000)
[Publications] Y.Yamagata,T.Ohshima,T.Ikegami,K.Ebihara,A.Sharma,J.Narayan: "Characteristics of laser-ablated plasma and properties of diamond-like carbon film in pulsed laser deposition"Proceedings of the 2000 MRS Fall Meeting. P6.55. (2000)
[Publications] K.Ebihara: "Advanced material preparation and device development using laser ablation process"Proceedings of Plasma Science Symposium 2001/The 18^<th> Symposium on Plasma Processing. 247-250 (2001)
[Publications] S.Ishibashi,K.Ichino,T.Ikegami,Y.Yamagata,K.Ebihara: "LIF measurement of C_2 and C_3 in carbon plasma plume"Proceedings of plasma Science Symposium 2001/The 18^<th> Symposium on Plasma Processing . 379-380 (2001)
[Publications] F.Mitsugi,T.Ikegami,K.Ebihara,J.Narayan,A.M.Grishin: "Dynamics of excimer laser induced plasmas for colossal Magnetoresistive and ferroelectric thin films"Proceedings of Plasma Science Symposium 2001/The 18^<th> Symposium on Plasma Processing. 609-610 (2001)
[Publications] T.Ohshima,R.K.Thareja,Y.Yamagata,T.Ikegami,K.Ebihara,J.Narayan: "Laser induced plasma for ZnO thin film and temporally resolved photoluminescence "Proceedings of Plasma Science Symposium 2001/The 18^<th> Symposium on Plasma Processing. 611-612 (2001)
[Publications] S.Aoqui,T.Ohshima,T.Ikegami,K.Ebihara: "Preparation of the CN_x thin films using NO ambient gas by pulsed laser process"Proceedings of Plasma Science Symppsium 2001/The 18^<th> Symposium on Plasma Processing. 623-624 (2001)
[Publications] Y.Yamagata,K.Murayama,T.Ikegami,K.Ebihara: "Nitric oxide formation for biomedical applications using high frequency silent discharge "Proceedings of Plasma Science Symposium 2001/The 18^<th> Symposium on Plasma Processing. 679-680 (2001)
[Publications] Y.Noma,M.Fujimoto,Y.Yamagata,T.Ikegami,K.Ebihara: "Ozone generation with high density and efficiency using screw electrode by high frequency silent discharge "Proceedings of Plasma Science Symposium 2001/The 18^<th> Symposium on Plasma Processing. 689-690 (2001)
[Publications] 赤崎正則,村岡克紀,渡辺征夫,蛯原健治: "プラズマ工学の基礎(改訂版)"産業図書. 291 (2001)

2000 Fiscal Year Annual Research Report

レーザ・プラズマプロセス開発による先端材料・デバイスの創製

Principal Investigator

蛯原 健治 熊本大学, 工学部, 教授 (50035060)

Research Products

[Publications] Kenji Ebihara,Toshiyuki Nakamiya,Tomoaki Ikegami: "Influence of ambient gas on diamondlike carbon films prepared by KrF pulsed laser deposition"Diamond and Related materials. (印刷中). (2001)

[Publications] Toshiyuki Nakamiya,Shin-ichi Aoqui,and Kenji Ebihara: "Experimental and numerical study on pulsed-laser annealing process of diamond-like carbon thin films"Diamond and Related Materilas. (印刷中). (2001)

[Publications] F.Mitsugi,Y.Yamagata,T.Ikegami,K.Ebihara,J.Narayan and A.M.Grishin: "Ferroelectric and colossal magnetoresistive properties of a PbZr_<1-X>Ti_XO_3/La_<1-X>Sr_XMnO_3 heterostructure film"Jpn.J.Appl.Phys.. 39・9B. 5418-5420 (2000)

[Publications] F.Mitsugi,T.Ikegami,K.Ebihara,J.Narayan,A.M.Grishin: "The colossal magnetoresistive La-Sr-Mn-O film by Pulsed Laser Deposition"Transactions of the Materials Research Society of Japan. 25・1. 357-360 (2000)

[Publications] Y.Yamagata,A.Sharma,R.M.Mayo,J.W.Newman,J.Narayan,K.Ebihara: "Comparative study of laser ablated plasma plumes from single crystal graphite and amorphous carbon targets : I.Optical emission spectroscopy"J.Appl.Phys . 88・11. 6861-6867 (2000)

[Publications] R.M.Mayo,J.W.Newman,A.Sharma,Y.Yamagata,J.Narayan: "Comparative study of laser ablated plasma plumes from single crystal graphite and amorphous carbon targets : II. Electric probe measurements"J.Appl.Phys.. 88・11. 6868-6874 (2000)

[Publications] 光木文秋,池上知顯,蛯原健治,A.M.Grishin,J.Narayan: "PLD法による巨大磁気抵抗La-Sr-Mn-O薄膜の作製と強誘電体Pb-Zr-Ti-Oとのヘテロ構造への応用"電気学会論文誌. 120-A・11. 1032-1037 (2000)

[Publications] T.Ikegami,T.Maezono,F.Nakanishi,Y.Yamagata,K.Ebihara: "Estimation of equivalent circuit parameters of PV module and its application to optimal operation of PV system"Solar Energy Materials & Solar Cells. 67. 389-395 (2001)

[Publications] K.Goto,S.Tazoe,T.Ikegami,Y.Yamagata,K.Ebihara: "Production characteristics of ozone and nitric oxide"Proceedings of the 17th Symposium on Plasma Processing . 439-442 (2000)

[Publications] Y.Yamagata,A.Sharma,J.Narayan,R.M.Mayo,J.W.Newman,K.Ebihara: "Plasma diagnostics during pulsed laser deposition of diamond-like carbon using single crystal graphite and amorphous carbon"Proceedings of the 1999 MRS Fall Meeting . 593. 255-260 (2000)

[Publications] R.M.Mayo,J.W.Newman,A.Sharma,J.Narayan,Y.Yamagata: "Electrostatic measurement of plasma plume dynamics in pulsed laser evaporated graphite "Proceedings of the 1999 MRS Fall Meeting . 593. 261-266 (2000)

[Publications] Y.Yamagata,F.Mitsugi,T.Ikegami,K.Ebihara,A.Sharma,J.Narayan: "Spectroscopic study of ablation plasma plume during KrF pulsed laser deposition of diamond-like carbon films"Proceedings of APS March Meeting 2000. F-36.24. (2000)

[Publications] R.M.Mayo,J.W.Newman,Y.Yamagata,A.Sharma,J.Narayan: "Plasma and DLC film character from pulsed laser ablation of single crystal graphite and amorphous carbon"Proceedings of APS March Meeting 2000. B-18.002. (2000)

[Publications] Y.Yamagata,F.Mitsugi,T.Ikegami,K.Ebihara,A.Sharma,J.Narayan: "Laser induced fluorescence measurement of plasma plume during pulsed laser deposition of diamond-like carbon"Proceedings of the 2000 MRS Spring Meeting . J3.4. (2000)

[Publications] F.Mitsugi,T.Ikegami,K.Ebihara,J.Narayan,A.M.Grishin: "Properties of the magnetoresistive La_<0.8>Sr_<0.2>MnO_3 film and integration with PbZr_<0.52>Ti_<0.48>O_3 ferroelectrics"Proceedings of the 2000 MRS Spring Meeting . J.3.23. (2000)

[Publications] F.Nakanishi,T.Ikegami,K.Ebihara,S.Kuriyama,Y.Shiota: "Modeling and operation of a 10kW photovoltaic power generator using equivalent electric circuit method"Proceedings of the 28th IEEE Photovoltaic Specialists Conference . 6B. 51-57 (2000)

[Publications] T.Ikegami,S.Ishibashi,Y.Yamagata,K.Ebihara,R.K.Thareja,J.Narayan: "Spatial Distribution of Carbon Species in Laser Ablation of Graphite Target "AVS 47th International Symposium/NANO 6. 955. (2000)

[Publications] T.Ikegami,T.Ohshima,M.Nakao,S.Aoqui,K.Ebihara: "Impression of High Voltage Pulses on Substrate in Pulsed Laser Deposition "AVS 47th International Symposium/NANO 6. 956. (2000)

[Publications] F.Mitsugi,K.Ebihara: "Colossal Magnetresistivity of LSMO films prepared by KrF excimer laser"Extended summaries of the International workshop on Critical Currents and Applications of HTS. 81-82 (2000)

[Publications] Y.Yamagata,T.Ohshima,T.Ikegami,K.Ebihara,A.Sharma,J.Narayan: "Characteristics of laser-ablated plasma and properties of diamond-like carbon film in pulsed laser deposition"Proceedings of the 2000 MRS Fall Meeting. P6.55. (2000)

[Publications] K.Ebihara: "Advanced material preparation and device development using laser ablation process"Proceedings of Plasma Science Symposium 2001/The 18^<th> Symposium on Plasma Processing. 247-250 (2001)

[Publications] S.Ishibashi,K.Ichino,T.Ikegami,Y.Yamagata,K.Ebihara: "LIF measurement of C_2 and C_3 in carbon plasma plume"Proceedings of plasma Science Symposium 2001/The 18^<th> Symposium on Plasma Processing . 379-380 (2001)

[Publications] F.Mitsugi,T.Ikegami,K.Ebihara,J.Narayan,A.M.Grishin: "Dynamics of excimer laser induced plasmas for colossal Magnetoresistive and ferroelectric thin films"Proceedings of Plasma Science Symposium 2001/The 18^<th> Symposium on Plasma Processing. 609-610 (2001)

[Publications] T.Ohshima,R.K.Thareja,Y.Yamagata,T.Ikegami,K.Ebihara,J.Narayan: "Laser induced plasma for ZnO thin film and temporally resolved photoluminescence "Proceedings of Plasma Science Symposium 2001/The 18^<th> Symposium on Plasma Processing. 611-612 (2001)

[Publications] S.Aoqui,T.Ohshima,T.Ikegami,K.Ebihara: "Preparation of the CN_x thin films using NO ambient gas by pulsed laser process"Proceedings of Plasma Science Symppsium 2001/The 18^<th> Symposium on Plasma Processing. 623-624 (2001)

[Publications] Y.Yamagata,K.Murayama,T.Ikegami,K.Ebihara: "Nitric oxide formation for biomedical applications using high frequency silent discharge "Proceedings of Plasma Science Symposium 2001/The 18^<th> Symposium on Plasma Processing. 679-680 (2001)

[Publications] Y.Noma,M.Fujimoto,Y.Yamagata,T.Ikegami,K.Ebihara: "Ozone generation with high density and efficiency using screw electrode by high frequency silent discharge "Proceedings of Plasma Science Symposium 2001/The 18^<th> Symposium on Plasma Processing. 689-690 (2001)

[Publications] 赤崎正則,村岡克紀,渡辺征夫,蛯原健治: "プラズマ工学の基礎(改訂版)"産業図書. 291 (2001)

蛯原健治熊本大学, 工学部, 教授 (50035060)