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2000 Fiscal Year Final Research Report Summary

Mechanisim of Properties generation and Formation of Ceramic Thin Film with Varistor and PTCR Properties

Research Project

Project/Area Number 10355025
Research Category

Grant-in-Aid for Scientific Research (A).

Allocation TypeSingle-year Grants
Section展開研究
Research Field Inorganic materials/Physical properties
Research InstitutionTokyo Institution of Technology

Principal Investigator

MIZUTANI Nobuyasu  Tokyo Institute of Technology Graduate School of Science and Engineering Professor, 大学院・理工学研究科, 教授 (60016558)

Co-Investigator(Kenkyū-buntansha) WAKIYA Naoki  Tokyo Institute of Technology Graduate School of Science and Engineering Research Associate, 大学院・理工学研究科, 助手 (40251623)
SHINOZAKI Kazuo  Tokyo Institute of Technology Graduate School of Science and Engineering Associate Professor, 大学院・理工学研究科, 助教授 (00196388)
FUNAKUBO Hiroshi  Tokyo Institute of Technology Interdiciplinary School of Science and Engineering Associate Professor, 大学院・総合理工学研究科, 助教授 (90219080)
Project Period (FY) 1998 – 2000
Keywordsthin film / varistor / PTC / microstructure / MOCVD / growth mechanisim / SrTiO_3 / BaTiO_3
Research Abstract

The varistor and PTC ceramics is very importan electronic parts for electronic products. These ceramics have been used as the sintered materials. The origin for property generation is due to the interface of each grain boundary in the sintered body. However, the sintered elecrtronic parts have some limitation for decreasing these size.
The purpose of this study is to realize the thin film varistor and PTC parts using the some thin film formation method, mainly MOVCD and CSD (chemical solution deposition). The main materials for study are SrTiO_3, BaTiO_3 and these solid solution, and PbTiO_3, PZT having perovskite structure.
Through above studies, the following useful results were obtained. And we succeeded in preparation of varistor and PTC thin film.
(1) preparation of semiconductive, epitaxial thin film of Nb and La doped BaTiO_3 and SrTiO_3
(2) mechanism of doping process and the situation of dopant atom in the perovskite structure thin film
(3) preparation of Bi doped semiconductive SrTiO_3 thin film by MOCVD
(4) The origin of varistor property in Bi doped SrTiO_3 film in due to the interface of domains with different orientation
(5) Preparation of Bi doped semiconductive BaTiO_3 using chemical solution process suchi as MOD and CSD
(6) Varistor phenomena was appeared on I-V characteristics for thin film CSD process and the mechanism was discussed
(7) PTC phenomena was appeared around 125℃ for Bi doped BaTiO_3 thin film using CSD process

  • Research Products

    (26 results)

All Other

All Publications (26 results)

  • [Publications] Osamu SAKURAI: "Microstructure of Junction Interface of Semiconductive SrTiO_3 Single Crystals and Change of I-V Characteristics by Oxidation/Reduction"J.Ceram.Soc.Japan. 106. 308-311 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Mizutani: "MOCVD Preparation and Properties of BaTiO_3-SrTiO_3 Solid Solution Thin Film"Journal of the Korean Physical Society. 32. S1336-S1339 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Daisuke Nagano: "Electrical Properties of Semiconductive Nb-doped BaTiO_3 Thin Films Prepared by Metal-organic Chemical-vapor Deposition"Applied Physics Letters.. 72. 2017-2019 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] D.Nagano: "Electrical Properties and Crystal Structures of Semiconductive Nb-Doped BaTio_3 Thin Film Prepared by MOCVD"Key Engineering Materials.. 157-158. 167-174 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Sung-Yong Chun: "Investigation of the solidus boundaries and microstructure in the ZnO-PrO_<1.5>-CoO system"J.Mater.Res.. 13. 2110-2116 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Hiroshi Funakubo: "Deposition conditions of SrTiO_3 films on various substrates by CVD and their dielectric properties"Thin Solid Films.. 334. 71-76 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Hiroshi Funakubo: "Crystal structure and dielectric property of epitaxially grown(Ba,Sr)TiO_3 thin film prepared by molecular chemical vapor deposition."J.Mater.Res.. 13. 3512-3518 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Yi Xuan: "Growth Mechanisim and Effect of Deposition Rate on Crystal Orientation in PbTiO_3 Thin Film by Metallorganic Chemical Vapor Deposition"J.Ceram.Soc.Japan,. 107. 955-960

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Naoki Wakiya: "Nucleation and growth behavior of epitaxial Pb(Zr,Ti)O_3/MgO(100) observed by atomic force microscopy"Thin Solid Films. 357. 166-172 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Sung-Yong Chun: "Formation of Varistor Characteristics by the Grain-Boundary Penetration of ZnO-PrO_x Liquid into ZnO Ceramics."J.A.Ceram.Soc.,. 82. 3065-68 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Sung-Yong Chun: "Electrically active grain boundaries in ZnO varistors by liquid-infiltration method"J.of Materials Science : Materials in Electronics II. 11. 73-80 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Hiroshi Funakubo: "Orientation Control of ZnO Thin Film Prepared by CVD"J.of Electroceramics. 4:S1. 25-32 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 水谷惟恭: "21世紀型セラミックス電子部品の開発-性質を越えて機能を求める-"セラミックス. 35. 315-318 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 水谷惟恭(分担): "フロンティアセラミックスが拓く新世紀"薄膜系フロンティアセラミックスプロセシング. 23 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Osamu Sakurai, Masaru Soeda, Atsushi Saiki, Kazuo Shinozaki and Nobuyasu Mizutani: "Microstructure of Junction Interface of Semiconducitive SrTiO_3 Single Crystals and Change of I-V Characteristics by Oxidation/Recudtion"J.Ceram. Soc. Japan. 106[3]. 308-311 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Mizutani, D.Nagano, H.Funakubu, N.Wakiya and K.Shinozaki: "MOCVD Preparation and Properties of BaTiO_3-SrTiO_3 Solid Solution Thin Film"Journal of the Korean Physical Society. 32[2]. S1336-S1339 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Daisuke Nagano, Hiroshi Funakubo, Kazuo Shinozaki and Nobuyasu Mizutani: "Electrical Properties of Semiconductive Nb-doped BatiO_3 Thin Films Prepared by Metal-organic Chemical-vapor Deposition"Applied Physics Letters. 72[16]. 2017-2019 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.Nagao, H.Funakubo, O.Sakurai, A.Saiki, K.Shinozaki and N.Mizutani: "Electrical Properties and Crystal Structures of Semiconductive Nb-Doped BatiO_3 Thin Film Prepared by MOCVD"Key Engineering Materials. 157-158. 167-174 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Sung-Yong Chun, Naoki Wakiya, Kazuo Shinozaki and Nobuyasu Mizutani: "Investigation of the solution boundaries and microstrucure in the ZnO-PrO_<1.5>-CoO System"J.Mater. Res.. 13[8]. 2110-2116 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hiroshi Funakubo, Yutaka Takeshima, Daisuke Nagano, Atsushi Saiki, Kazuo Shinozaki and Nobuyasu Mizutani: "Deposition conditions of SrTiO_3 films on various substrates by CVD and their dielectric properties"Thin Solid Films. 334. 71-76 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hiroshi Funakubo, Yutaka Takeshima, Daisuke Nagano, Kazuo Shinozaki and Nobuyasu Mizutani: "Crystal Structure and dielectric property of epitaxially grown(Ba, Sr)TiO_3 thin film prepared by molecular chemical vapor deposition"J.Mater. Res.. 13[12]. 3512-3518 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Yi Xuan, Kazumasa Kuroyanagi, Naoki Wakiya, Kazuo Shinozaki and Nobuyasu Mizutani: "Growth Mechanisim and Effect of Deposiiton Rate on Crystal Orientation in PbTiO_3 Thin Film by Metallorganic Chemical Vapor Deposition"J.Ceram. Soc. Japan. 107[10]. 955-960 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Naoki Wakiya, Kazumasa Kuroyanagi, Yi Xuan, Kazuo Shinozaki and Nobuyasu Mizutani: "Nucleation and growth behavior of epitaxial Pb (Zr, Ti) O_3/MgO (100) observed by atomic force microscopy"Thin Solid Films. 357. 166-172 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Sung-Yong Chun, Kazuo Shinozaki and Nobuyasu Mizutani: "Formation of varistor Characteristics by the Grain-Boundary Penetration of ZnO-PrO_3 Liquid into ZnO Ceramics"J.A.Ceram. Soc.. 82[11]. 3065-3068 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Sung-Yong Chun, Kazuo Shinozaki and Nobuyasu Mizutani: "Electrically active grain boundaries in ZnO Varistors by liquid-infiltration method"J.of Materials science : Materials in Electronics II. 11. 73-80 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hiroshi Funakubo, Nobuyasu Mizutani, Maki Yonetsu, Atsushi Saiki and Kazuo Shinozaki: "Orientation Control of ZnO Thin Film Prepared by CVD"J.of Electroceramics. 4 : S1. 25-32 (1999)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2002-03-26  

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