Multi-functional Active Catheter

2000 Fiscal Year Final Research Report Summary

• Project/Area Number: 10359001
• Research Category: Grant-in-Aid for Scientific Research (A).
• Allocation Type: Single-year Grants
• Section: 展開研究
• Research Field: 広領域
• Research Institution: Tohoku University
• Principal Investigator: ESASHI Masayoshi Tohoku University, New Industry Creation Hatchery Center, Professor, 未来科学技術共同研究センター, 教授 (20108468)
• Co-Investigator(Kenkyū-buntansha): NITTA Shinichi Tohoku University, Institute of Development, Aging and Cancer, Professor, 加齢医学研究所, 教授 (90101138) ; LIU Lng xun Tohoku University, Graduate School of Engineering, Research Associate, 大学院・工学研究科, 助手 (90312610) ; HAGA Yoichi Tohoku University, Graduate School of Engineering, Research Associate, 大学院・工学研究科, 助手 (00282096) ; FUSHIMI Masahiro Asahi Optical Co., Ltd., Researcher, 研究員(研究職) ; TAKAHASHI Akira Tohoku University, Graduate School of Medicine, Professor, 大学院・医学系研究科, 教授 (40301048)
• Project Period (FY): 1998 – 2000
• Keywords: Active catheter / Shape memory alloy actuator / Integrated circuit / Ultrasonic endoscope / 1-3 Composite / Piezoelectric ceramic / PZT / Fiber optic pressure sensor

Research Abstract

Active catheters which can move in a blood vessel and reach some part in a body(for example inside a brain) have been developed for the purpose of diagnosis and therapy in a blood vessel. Micromachining based on a semiconductor micro fabrication has been applied for their fabrication. Many actuators made of shape memory alloy(SMA) coil rare distributed in the active catheter and hence it can bend flexibly like a snake. Sensors for the catheters have been developed as well.
Active catheters(2.3 mm in outer diameter) having integrated circuits for communication and control and hence needs only three common lead wires have been developed. Multi-functional active catheters( 1.4 mm in outer diameter) which can not only bend but also extend and twist have been also developed. The Multi-functional active catheters have been fabricated in batch process using electroplating and other processes. Furthermore active guide wires(0.5 mm in outer diameter) have been fabricated using etched thin SMApla te. Thin outer tube having liner coil was fabricated for the active catheter.
Sensors for the active catheters have been developed. One is a forward looking ultrasound imager (3 mm in outer diameter)at the end of the active catheter to assist their navigation. Thermal micro relay as a multiplexer for the transmitting ultrasonic pulse has been developed. Micromachining of a piezoelectric material(PZT) has been studied. Silicon lost mold process for the PZT which uses micromachined silicon as a mold for sintering was developed and achieved piezoelectric characteristics successfully.
Fiber optic fine(125 μm in outer diameter) pressure sensor which has a thin diaphragm at the end of a optical fiber was fabricated by applying silicon deep reactive ion etching(RIE). Three axis magnetic field sensor was fabricated at the end of en active catheter was fabricated to know the position and the direction of the catheter tip in the body.
Laser assisted chemical vapor deposition(CVD) using ultraviolet CW laser was developed for micro assembly and selective metalization. These research results presented in a conference for the therapy inside brain blood vessel were highly evaluated by medical doctors.

Research Products

• [Publications] S.Wang,J.F.Li,X.Li and M.Esashi: "Processing of PZT Microstructures"Sensors and Materials. 10-6. 375-384 (1998)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 江刺正喜: "柔らかく動くアクチュエータ分布型マシン"バイオメカニズム学会誌. 22-4. 134-139 (1998)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 芳賀洋一,江刺正喜: "能動カテーテルとカテーテル搭載用センサ"人工臓器. 27-5. 662-670 (1998)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 芳賀洋一,江刺正喜: "超音波体腔内走査のためのマイクロマシン技術"先端医療. 5-1. 48-51 (1998)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 仁田新一,山家智之,江刺正喜: "医用マイクロマシン開発の現状"総合臨床. 47-11. 2883-2885 (1998)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 篠原英司,南和幸,江刺正喜: "ミミズのような蠕動運動システム"電気学会論文誌E. 119-E-6. 334-339 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] T.Mineta,Y.Watanabe,S.Kobayashi,Y.Haga and M.Esashi: "Active Catheter Using Multi-Link-Joint Structure Fabricated in Silicon Wafer"電気学会論文誌E. 119-E-12. 615-619 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] S.Wang,X.Li,K.Wakabayashi and M.Esashi: "Deep Reactive Ion Etching of Lead Zirconate Titanate Using Sulfur Hexafluoride Gas"J.American Ceramic Soc.. 82-5. 1339-1341 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] K.-T.Park and M.Esashi: "A Multilink Active Catheter with Polyimide-Based Integrated CMOS Interface Circuits"J.of Microelectromechanical Systems. 8-4. 349-357 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] S.Wang,J.F.Li,K.Wakabayashi,M.Esashi and R.Watanabe: "Lost Silicon Mold Process for PZT Microstructures"Advanced Materials. 11-10. 873-876 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] S.Wang,J.F.Li,R.Watanabe and M.Esashi: "Fabrication of Lead Zirconate Titanate Microrods for Piezocomposites Using Hot Isostatic Pressing with Silicon Molds"J.American Ceramic Soc.. 82-1. 213-215 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] K.Minami,H.Morishita and M.Esashi: "A Bellows-shape Electrostatic Microactuator"Sensors and Actuators. A72. 269-276 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 江刺正喜,芳賀洋一: "マイクロマシニングと低侵襲医療"電気学会誌. 119-11. 689-691 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 芳賀洋一,江刺正喜: "マイクロマシンの基礎技術1:医療機器開発のための基盤技術"Clinical Engineering. 10-1. 10-18 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 芳賀洋一,江刺正喜: "マイクロマシンの最新動向と医療への応用のこれから"新医療. 27-2. 64-67 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] K.T.Park and M.Esashi: "An Active Catheter with Integrated Circuit for Communication and Control"Technical Digest of MEMS'99. 12. 400-405 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] S.N.Wang,K.Wakabayashi,J.-F.Li and M.Esashi: "Batch Fabrication of Stacked Piezoelectric Microactuators by using Si Mold Process"Technical Digest of the Transducers'99. 10. 1762-1763 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] B.J.Pokines,J.Tani,M.Esashi,T.Hamano and K.Mizuno: "Active Material Microactuator Arrays Fabricated with SU-Resin"Abstracts of HARMST'99. 3. 94-95 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 芳賀洋一,江刺正喜: "能動カテーテル"第37回日本エム・イー学会大会. 37. 28 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 芳賀洋一,江刺正喜: "ねじれ回転機構を持つた能動カテーテル"第37回日本エム・イー学会大会. 37. 330 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 谷恵亮,西尾真博,芳賀洋一,江刺正喜: "能動カテーテルのための前方視リングアレイ超音波プローブの試作"第37回日本エム・イー学会大会. 37. 302 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 李敬鋒,王詩男,若林勝裕,江刺正喜,渡辺龍三: "HIPにより低温焼結したPZT圧電セラミックスの特性"粉体粉末冶金協会講演概要集平成11年度春季大会. 11. 170 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 吉田和弘,南和幸,江刺正喜: "室温での導電性物質のレーザ支援CVD"1999年度 精密工学会秋季大会 講演論文集. 462 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 芳賀洋一,江刺正喜: "電気めっきを用いた細径能動カテーテルの組み立て"電気学会センサ・マイクロマシン部門総合研究会資料. MM99-24. 13-18 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 鈴木学,江刺正喜: "溝加工と電解メッキによる積層型圧電アクチュエータの試作"電気学会センサ・マイクロマシン部門総合研究会資料. MM99-25. 19-24 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 芳賀洋一,江刺正喜細: "径能動カテーテルのための螺旋骨格薄肉チューブの開発"電気学会センサ・マイクロマシン部門総合研究会資料. MM99-31. 55-60 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 戸津健太郎,芳賀洋一,江刺正喜: "カテーテル先端の位置・姿勢を検出するMIセンサシステムの開発"電気学会センサ・マイクロマシン部門総合研究会資料. PS99-15. 77-82 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 李敬鋒,王詩男,若林勝裕,江刺正喜,渡辺龍三: "Siモールドを用いたHIPプロセスによるPZTミクロ構造体の作製"日本金属学会秋期大会講演概要. 125. 108 (1999)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] T.Katsumata,Y.Haga,K.Minami and M.Esashi: "Micromachined 125μm Diameter Ultra Miniature Fiber-Optic Pressure Sensor for Catheter"電気学会論文誌E. 120-E-2. 58-63 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 戸津健太郎,芳賀洋一,江刺正喜: "カテーテル先端の位置・姿勢を検出する磁気センサシステム"電気学会論文誌E. 120-E-5. 211-218 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 芳賀洋一,前田重雄,江刺正喜: "細径能動カテーテルのための螺旋骨格薄肉チューブ"電気学会論文誌E. 120-E8/9. 426-431 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 芳賀洋一,江刺正喜: "形状記憶合金コイルを用いた細径能動カテーテル"電気学会論文誌E. 120-E-11. 509-514 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 芳賀洋一,江刺正喜: "屈曲、ねじれ、伸長能動カテーテルの電気めっきによる組み立て"電気学会論文誌E. 120-E-11. 515-520 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 芳賀洋一,勝間田卓,南和幸,江刺正喜: "カテーテル搭載用光ファイバ圧力センサ"計測と制御. 39-4. 292-295 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] J.-F.Li,S.Wang,K.Wakabayashi,M.Esashi and R.Watanabe: "Properties of Modified Lead Zirconate Titanate Ceramics Prepared at Low Temperature (800℃) by Hot Isostatic Pressing"J.American.Ceramic Soc.. 83-4. 955-957 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] G.Suzuki and M.Esashi: "Planer Fabrication of Multilayer Piezoelectric Actuator by Groove Cutting and Electroplating"Proc.of the Micro Electro Mechanical Systems'2000. 13. 46-51 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] Y.Haga,M.Esashi and S.Maeda: "Bending, Torsional and Extending Active Catheter Assembled Using Electroplating"Proc.of the Micro Electro Mechanical Systems'2000. 13. 181-186 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] T.Mineta,T.Mitsui,Y.Watanabe,S.Kobayashi,T.Haga and M.Esashi: "Batch Fabricated Flat Winding Shape Memory Alloy Actuator for Active Catheter"Proc.of the Micro Electro Mechanical Systems'2000. 13. 375-380 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] L.X.Liu,M.Nishio and M.Esashi: "A Micromachined Thermomechanical Relay"Technical Digest of the 17th Sensor Symposium. 17. 33-38 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] M.Nishio,K.Tani,Y.Haga and M.Esashi: "Preliminary Study of Integrated Ultrasonic Probe for Forward-Looking in Blood Vessel"Technical Digest of the 17th Sensor Symposium. 17. 55-60 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] K.Yoshida,K.Minami and M.Esashi: "Low Temperature Deposition of Conductive Material by UV Laser CVD"Technical Digest of the 17th Sensor Symposium. 17. 289-292 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 芳賀洋一,江刺正喜: "多機能能動カテーテル(第2報)"第39回日本エム・イー学会大会. 39. 27 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 戸津健太郎,芳賀洋一,江刺正喜: "カテーテル先端位置・姿勢検出のための磁気ベクトルセンサシステム"第39回日本エム・イー学会大会. 39. 29 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 西尾真博,藤田匡佑,芳賀洋一,江刺正喜: "血管内前方視超音波イメージャのための集積化プローブの試作"第39回日本エム・イー学会大会. 39. 107 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] W.Makishi,K.Iwami,Y.Maruyama,Y.Haga and M.Esashi: "SMA Actuated Pin Display for Blind Aid"第17回「センサ・マイクロマシンと応用システム」シンポジウム講演概要集(和文速報). 17. 103 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 若林勝裕,安部隆,李興華,王詩男,江刺正喜: "反応性イオンエッチングを用いたバルク圧電セラミックスの加工と複合圧電体への応用"第17回強誘電体応用会議. 17. 189-190 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] 江刺正喜: "マイクロセンサーと能動カテーテル・ガイドワイヤーシステムの開発"第16回日本脳神経血管内治療学会 抄録集. 16. 109 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] Y.Liu,X.Li,T.Abe,Y.Haga and M.Esashi: "A Thermomechanical Relay with Microspring Contact Array"Proc.of the Micro Electro Mechanical Systems' 2001. 14. 220-223 (2001)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] T.Mineta,T.Mitsui,Y.Watanabe,S.Kobayashi,Y.Haga and M.Esashi: "An Active Guide Wire with Shape Memory Alloy Bending Actuator Fabricated by Low Temperature Process"Technical Digest of the Transducers' 01. 11(印刷中). (2001)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] W.Makishi,K.Iwami,Y.Haga and M.Esashi: "Pin Display Using SMA Actuator for Blind"Technical Digest of the 18th Sensor Symposium. 18(印刷中). (2001)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] Y.Haga,T.Mineta Ono and M.Esashi: "Sensors Update Vol.8"H.Baltes,W.Gopel and J.Hesse. 40 (2000)
  • Description: 「研究成果報告書概要(和文)」より
• [Publications] S.Wang, J.F.Li, X.Li and M.Esashi: "Processing of PZT Microstructures"Sensors and Materials.. 10-6. 375-384 (1998)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] M.Esashi: "Actuator Distributed Machines Which Move Flexibly (in Japanese)"J.of the Society of Biomechanisms. 22-4. 134-139 (1998)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Y.Haga and M.Esashi: "Active Catheter and Microsensors for Catheter(in Japanese)"The Japanese Journal of Artificial Organs.. 27-5. 662-670 (1998)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Y.Haga and M.Esashi: "Micromachine Technologies for Intra-Corporal Ultrasonic Imaging (in Japanese)"Advanced Medicine. 5-1. 48-51 (1998)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] S.Nitta, T.Yambe and M.Esashi: "Micromachine Science in tn the Medical Field (in Japanese)"Clinic All-round. 47-11. 2883-2885 (1998)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] E.Shinohara, K.Minami and M.Esashi: "Peristaltic Motion System Like Earthworm (in Japanese)"The Transaction of The IEE of Japan. 119E-6. 334-339 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] T.Mineta, Y.Watanabe, S.Kobayashi, Y.Haga and M.Esashi: "Active Catheter Using Multi-Link-Joint Structure Fabricated in Silicon Wafer"The Transaction of The IEE of Japan. 119E-12. 615-619 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] S.Wang, X.Li, K.Wakabayashi and M.Esashi: "Deep Reactive Ion Etching of Lead Zirconate Titanate Using Sulfur Hexafluoride Gas"J.American Ceramic Soc.. 82-5. 1339-1341 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] K.-T.Park and M.Esashi: "A Multilink Active Catheter, with Polyimide-Based Integrated CMOS Interface Circuits"J.of Microelectromechanical Systems. 8-4. 349-357 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] S.Wang, J.F.Li, A.Wakabayashi, M.Esashi and R.Watanabe: "Lost silicon Mold Process for PZT Microstructures"Advanced Materials. 11-10. 873-876 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] S.Wang, J.F.Li, R.Watanabe and M.Esashi: "Fabrication of Lead Zirconate Titanate Microrods for Piezocomposites Using Hot Isostatic Pressing with Silicon Molds."J.American Ceramic Soc.. 82-1. 213-215 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] K.Yoshida, K.Minami and M.Esashi: "Laser Assisted CVD of Conductive Materials at Room Temperature (in Japanese)"Abstracts of Autumn Conf.on Precision Eng.. 462 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Y.Haga and M.Esashi: "Small Diameter Active Catheter Assembled Using Electroplating (in Japanese)"Micromachine Technical Report of IEEJ Sensor & Micromachine Society.. MM-99-24. 13-18 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] G.Suzuki and M.Esashi: "Fabrication of Multilayer Piezoelectric Actuator by Groove Cutting and Electroplating (in Japanese)"Micromachine Technical Report of IEEJ Sensor & Micromachine Society. MM-99-25. 19-24 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Y.Haga, M.Esashi and S.Maeda: "Fabrication of Thin-walled Tube Supported by Herical Coil for Small Diameter Active Catheter (in Japanese)"Micromachine Technical Report of IEEJ Sensor & Micromachine Society. MM-99-31. 55-60 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] K.Totsu, Y.Haga and A.Esashi: "Magnetic Sensor System for Detecting Position and Orientation of a Catheter Tip(in Japanese)"Physical Sensor Technical Report of lEEJ Sensor & Micromachine Society. PS-99-15. 77-82 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] J.F.Li, S.N.Wang, K.Wakabayashi, M.Esashi and R.Watanabe: "Fabrication of PZT Microstructure by Silicon Mold HIP Process (in Japanese)"Abstracts of the Japan Institute of Metals. 125. 108 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] T.Katsumata, Y.Haga, K.Minami and M.Esashi: "Micromachined 125 μm Diameter Ultra Miniature Floer- Optic Pressure Sensor for Catheter"The Transaction of The IEE of Japan. 120E-2. 58-63 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] K.Totsu, Y.Haga and a Esashi: "Magnetic Sensor System for Detecting Position and Orientation of a Catheter Tip (in Japanese)"The Transaction of The IEE of Japan. 120E-5. 211-218 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Y.Haga, M.Esashi and S.Maeda: "Thin-walled Tube Supported by Coil Spring for small Diameter Active Catheters.(in Japanese)"The Transaction of The IEE of Japan. 120E-8/9. 426-431 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Y.Haga, M.Esashi and S.Maeda: "Small Diameter Active Catheters Using Shape Memory Alloy coils (in Japanese)"The Transaction of The IEE of Japan. 120E-11. 509-514 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Y.Haga, M.Esashi and S.Maeda: "Assembly of Bending, Torsional and Extending Active Catheter Using Electroplating. (in Japanese)"The Transaction of The IEE of Japan. 120E-11. 515-520 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] K.Minami, H.Morishita and M.Esashi: "A Bellows-shape Electrostatic Microactuator"Sensors and Actuators. A72. 269-276 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] M.Esashi and Y.Haga: "Micromachining and Minimal Invasive Medicine (in Japanese)"Journal of IEE of Japan. 119-11. 689-691 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Y.Haga and M.Esashi: "Basic Technologies for the Development of Medical Equipments (in Japanese)"Clinical Engineering. 10-1. 10-18 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Y.Haga and M.Esashi: "Recent Progress of Micromachines and Its Applications to Medicine (in Japanese)"This is Medicine in Japan. 27-2. 64-67 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] K.T.Park and M.Esashi: "An Active Catheter with Integrated Circuit for Communication and Control"Technical Digest of the MEMS'99. 12. 400-405 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] S.N.Wang, K.Wakabayashi, J.F.Li and M.Esashi: "Batch Fabrication of Stacked Piezoelectric Microactuators by using Si Mold Process"Technical Digest of the Transducers'99. 10. 1762-1763 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] B.J.Pokines, J.Tani, M.Esashi, T.Hamano and a K.Mizuno: "Active Material Microactuator Arrays Fabricated with SU-8 Resin"Abstracts of HARMST'99. 3. 94-95 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Y.Haga and M.Esashi: "Active Catheter (in Japanese)"Proc.of the 37th Conf. The Japan Soc.of Medical Electronics and Biological Eng.. 37. 28 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Y.Haga and M.Esashi: "Tortional Active Catheter Using Shape Memory Alloy (in Japanese)"Proc.of the 37th Conf.The Japgn Soc.of Medical Electronics and Biological Eng.. 37. 330 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] K.Tani, M.Nishio, Y.Haga and M.Esashi: "A Fabrication of Forward-Looking Ring Array Ultrasonic Probe for Active Catheter (in Japanese)"Proc.of the 37th Conf.The Japqn Soc.of Medical Electronics and Biological Eng.. 37. 302 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] J.F.Li, S.N.Wang, K.Wakabayashi, M.Esashi and R.Watanabe: "Characteristics of PZT Piezoelectric Ceramics Sintered in HIP Process at Low Temperature (in Japanese)"Abstracts of 11th Conf. on Powder Process. 11. 170 (1999)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Y.Haga, T.Katstmata, K.Minami and M.Esashi: "Fiber-Optic Pressure Sensor for Catheter(in Japanese)"Journal of the Soc.of Instrument and Control Engineers. 39-4. 292-295 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] J.F.Li, S.Wang, K.Wakabayashi, M.Esashi and R.Watanabe: "Properties of Modified Lead Zirconate Titanate Ceramics Prepared at Low Temperature (800°C) by Hot Isostatic Pressing"J.American Ceramic Soc.. 83-4. 955-957 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] G.Suzuki and M.Esashi: "Planer Fabrication of Multilayer Piezoelectric Actuator by Groove Cutting and Electroplating"Proc.of the MEMS' 2000. 13. 46-51 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Y.Haga, M.Esashi and S.Maeda: "Bending, Torsional and Extending Active Catheter Assembled Using Electroplating"Proc.of the MEMS' 2000. 13. 181-186 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] T.Mineta, T.Mitsui, Y.Watarnbe, S.Kobayashi, T.Haga and M.Esashi: "Batch Fabricated Flat Winding Shape Memory Alloy Actuator for Active Catheter"Proc.of the MEMS' 2000. 13. 375-380 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] L.X.Liu, M.Nishio and M.Esashi: "A Micromachined Thermomechenical Relay"Technical Digest of the 17th Sensor Symposium. 17. 33-38 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] M.Nishio, K.Tani, Y.Haga and M.Esashi: "Preliminary Study of Integrated Ultrasonic Probe for Forward-Looking in Blood Vessel"Technical Digest of the 17th Sensor Symposium. 17. 55-60 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] K.Yoshida, K.Minami and M.Esashi: "Low Temperature Deposition of Conductive Material by UV Laser. CVD"Technical Digest of the 17th Sensor Symposium. 17. 289-292 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Y.Haga and M.Esashi: "Multifunction Active Catheter (2)(in Japanese)"Proc.of the 39th Conf.The Japan Soc.of Medical Electronics and Biological Eng.. 39. 27 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] K.Totsu, Y.Haga and M.Esashi: "Magnetic Vector Sensor System for Detecting Position and Orientation of a Catheter Tip (in Japanese)"Proc.of the 38th Conf.The Japan Soc.of Medical Electronics and Biological Eng.. 39. 29 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] M.Nishio, M.Fujita, Y.Haga and M.Esashi: "A Fabrication of Integrated Ultrasonic Probe for Forward-Looking in Blood Vessel(in Japanese)"Proc.of the 37th Conf.The Japan Soc.of Medical Electronics and Biological Eng.. 39. 107 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] W.Makishi, K.Iwami, Y.Maruyama, Y.Haga and M.Esashi: "SMA Actuated Pin Display for Blind Aid"Late News in 17th Sensor Symposium. 17. 103 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] K.Wakabayashi, T.Abe, X.Li, S.Wang and M.Esashi: "Processing of Bulk-Piezoelectric Ceramics Using Reactive Ion Etching and its Application to Piezocomposites (in Japanese)"Abstracts of 17th Conf.on Application of Ferroelectric Materials. 17. 189-190 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] M.Esashi and Y.Haga: "Development of Microsensors, Active Cathers and Guide Wire Systems (in Japanese)"The 16th Annual Meeting of the Japanese Soc.for Intravascular Neurosurgery. 16. 109 (2000)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Y.Liu, X.Li, T.Abe, Y.Haga and M.Esashi: "A Thermomechanical Relay with Microspring Contact Array"Proc.of the MEMS'2001. 14. 220-223 (2001)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] T.Mineta, T.Mitsui, Y.Watanabe, S.Kobayashi, Y.Haga and M.Esashi: "An Active Guide Wire with Shape Memory Alloy Bending Actuator Fabricated by Low Temperature Process"Technical Digest of the Transducers'01. 11(in press). (2001)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] W.Makishi, K.Iwami, Y.Haga and M.Esashi: "Pin Display using SMA Actuator for Blind"Technical Digest of the 18th Sensor Symposium. 18(in Press). (2001)
  • Description: 「研究成果報告書概要(欧文)」より
• [Publications] Y.Hage, T.Mineta Ono and M.Esashi: "Sensors Update 8(H.Baltes, W.Gopel and J.Hesse ed)"Wiley-VCH. 40 (2000)
  • Description: 「研究成果報告書概要(欧文)」より