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2000 Fiscal Year Final Research Report Summary

Fabrication of nano - structure using highly charged ions

Research Project

Project/Area Number 10554017
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section展開研究
Research Field 物理学一般
Research InstitutionKOBE UNIVERSITY (1999-2000)
Okazaki National Research Institutes (1998)

Principal Investigator

SAKURAI Makoto  Kobe University Faculty of sciences, Associate Professor, 理学部, 助教授 (90170646)

Project Period (FY) 1998 – 2000
KeywordsHighly charged ion / Electron beam ion source / nano-structure / Surface and interface / Coincidence measurement
Research Abstract

Highly charged ion produces structural modification in nm scale on the surface of various materials. Highly charged ions are expected to become a powerful tool for the fabrication of nano-structure and nano-devices. In the present research project, various technical development were performed for the possible production facility of nano-devices using highly charged ions.
The research subjects performed in the present project are as follows ;
1. Development of beam transport system which transfer highly charged ions produced at the electron beam ion trap (Tokyo EBIT) to an irradiation chamber connected to the beam transport.
2. Development of new feeding system of seed ions into the EBIT using wire probe technique.
3. Development of a measurement system of the number distribution of secondary electrons emitted from the surface irradiated by highly charged ions.

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] M.Sakurai: "Surface science station of the infrared beamline at SPring-8"Nuclear Instrum.Meth.. (発表予定). (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Kimura: "infrared beamline BL43IR at SPring-8 : design and commissioning"Nuclear Instrum.Meth.. (発表予定). (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hirayama: "Desorption of an excimer from the surface of solid Ne by low energy electron and photon impact"Phys.Rev.B. (発表予定). (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Arakawa: "Absolute measurement of total photo desorption yield of solid Ne in vacuum ultraviolet range"Surface Sci.. 451. 136-142 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Kuramoto: "High energy operation of the Tokyo-electron beam ion trap"Rev.Sci.Instrum.. 71. 687-689 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Shimizu: "Characteristics of the beam line at an electron beam ion trap"Rev.Sci.Instrum.. 71. 681-683 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Sakurai: "Surface science station of the infrared beamline at SPring-8"Nucl. Instrum. Meth.. (to be published). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Kimura: "Infrared beamline BL43IR at SPring-8 : design and commissioning"Nucl. Instrum. Meth.. (to be published). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hirayama: "Desorption of an excimer from the surface of solid Ne by low energy electron and photon impact"Phys. Rev. B. (to be published). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.Arakawa: "Absolute measurement of total photo desorption yield of solid Ne in vacuum ultraviolet range"Surface Sci.. 451. 136 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Kuramoto: "High energy operation of the Tokyo-electron beam ion trap"Rev. Sci. Instrum.. 71. 687-689 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Shimizu: "Characteristics of the beam line at an electron beam ion trap"Rev. Sci. Instrum.. 71. 681-683 (2000)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2002-03-26  

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