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2000 Fiscal Year Final Research Report Summary

Development of Carbon Nitride (CN) Thin Film Preparation Process by Pulsed Laser Deposition

Research Project

Project/Area Number 10555108
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section展開研究
Research Field Electronic materials/Electric materials
Research InstitutionSASEBO NATIONAL COLLEGE OF TECHNOLOGY

Principal Investigator

SUDA Yoshiaki  SASEBO NATIONAL COLLEGE OF TECHNOLOGY, PROFESSOR, 電気工学科, 教授 (20124141)

Co-Investigator(Kenkyū-buntansha) BABA Koumei  TECHNOLOGY CENTER OF NAGASAKI, 専門研究員
KAWASAKI Hiroharu  SASEBO NATIONAL COLLEGE OF TECHNOLOGY, PROFESSOR, 電気工学科, 助教授 (10253494)
Project Period (FY) 1998 – 2000
KeywordsCarbon Nitride / Pulsed Laser Deposition / CN Thin Film / Carbon / Nd : YAG Laser / DC Bias / Auger Electron Spectroscopy / Optical Emission
Research Abstract

The hardest materials known are diamond and cubic boron nitride. Recent calcurations suggested that the hypothetical, β-C_3N_4, may be as hard as diamond. This produced a surge of activity in the synthesis of carbon nitride (hereafter referred to as CN) thin films. Various CN films have been prepared by different deposition techniques including chemical vapor deposition, ion beam assisted deposition and reactive magnetron sputtering. The synthesis of pure β-C_3N_4 remains an open challenge.
In this study, we develop a new pulsed laser deposition (PLD) method with a cross-magnetic field, ion-beam source and an DC bias to synthesize CN films. The laser beam was focused on the high purity (more than 99.999%) graphite targets. After 36000 laser pulses at a 10 Hz repetition rate, the deposition process was completed. All samples were analyzed by a field-emission scanning electron microscopy (FE-SEM), Auger electron spectroscopy (AES), atomic force microscope (AFM), an energy-dispersive X-ray analyzer (EDX), Fourier transform infrared spectroscopy (FT-IR) and micro-Raman spectrometer. An optical multichannel analyzer (OMA) with a 1034 photodiode array detected the optical emissions from the plasma plume generated by the pulsed Nd : YAG laser irradiation. The N/C composition ratio is affected by the substrate temperature and the substrate bias voltage. FT-IR measurement indicates the presence of a C≡N triple bond. FE-SEM observation shows that several spiral-structural particles exist in the droplets. We prepared CrC, WC, Sin, Tie, cBN, SiN, TaN films as a hard material and SnO_2, WO_3 films as a gas sensor material by PLD method. Our experiments show that the PLD process is simple and effective technique to fabricate ceramic thin films such as nitride, carbide and oxide films. It might be very important to study PLD process scientifically and industrially.

  • Research Products

    (34 results)

All Other

All Publications (34 results)

  • [Publications] Y.Suda: "Pulsed Laser Deposition of Carbon Nitride Thin Films from Graphite Targets"Carbon. Vol.36. 771-774 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Suda: "Properties of WC Films Synthesized by Pulsed YAG Laser Deposition"Mater.Chem.and Phys.. Vol.54. 177-180 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Suda: "Chromium Carbide Thin Films Synthesized by Pulsed Nd:YAG Laser Deposition"Jpn.J.Appl.Phys.. Vol.38. 3619-3621 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Suda: "Silicon Carbide Thin Films Synthesized by Using Pulsed YAG Laser Deposition"J.of the Korean Phys.Society. Vol.35. S88-S91 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Suda: "Crystalline Silicon Nitride Thin Films Grown by Pulsed YAG Laser Deposition"Nano Structured Materials. Vol.12. 391-394 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Kawasaki: "Effects of Ion Beam Energy on the Formation of Cubic Boron Nitride Thin Films by Pulsed Nd:YAG Laser Deposition"Jpn.J.Appl.Phys.. Vol.39. 4525-4527 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Suda: "Characterization of Crystalline TiC Films Grown by Pulsed Nd:YAG Laser Deposition"Jpn.J.Appl.Phys.. Vol.39. 4575-4576 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Kawasaki: "Effects of Cross Magnetic Field on Thin Film Preparation by Using Nd:YAG Laser Deposition"Thin Solid Films. Vol.374. 278-281 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Suda: "Formation and Properties of TiC Thin Films by pulsed Nd:YAG Laser Deposition"Thin Solid Films. Vol.374. 282-286 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Suda: "Characterization of Silicon Carbide Thin Films Prepared by Using Pulsed Nd:YAG Laser Deposition Method"Grain Boundary Engineering in Ceramics. Vol.118. 535-542 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Kawasaki: "Tantalum Nitride Thin Films Synthesized by Pulsed Nd:YAG Laser Deposition Method"Mat.Res.Soc.Symp.Proc.. Vol.617. J3.22.1-J.3.22.5 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Doi: "Preparation of Crystalline Chromium Carbide Thin Films Synthesized by pulsed Nd:YAG Laser Deposition"Mat.Res.Soc.Symp.Proc.. Vol.617. J.7.8.1-J.7.8.5 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 川崎 仁晴: "パルスレーザデポジション法による炭化シリコン薄膜の作製"長崎県技術開発研究委託事業(学・官枠) 地域研究開発拠点支援事業(RSP)可能性試験研究報告書. 337-357 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Suda: "Formation and Properties of Carbon Nitride Thin Films by Pulsed Nd:YAG Laser Deposition"Jpn.J.Appl.Phys.. Vol.40. 1061-1063 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Kawasaki: "Characterization of Tantalum Nitride Thin Films Fabricated by Pulsed Nd:YAG Laser Deposition Method"Jpn.J.Appl.Phys.. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Suda: "Preparation of Crystalline TiC Thin Films by Pulsed Nd:YAG Laser Deposition Using Ti Target in Methane Gas"Materials Characterization. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Suda: "Cubic Boron Nitride Thin Films by Ion Beam Assisted Pulsed Nd:YAG Laser Deposition"IEEE Transaction. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Suda: "Pulsed Laser Deposition of Carbon Nitride Thin Films from Graphite Targets"Carbon. Vol.36. 771-774 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda: "Properties of WC Films Synthesized by Pulsed YAG Laser Deposition"Mater.Chem. and Phys.. Vol.54. 177-180 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda: "Chromium Carbide Thin Films Synthesized by Pulsed Nd : YAG Laser Deposition"Jpn.J.Appl.Phys.. Vol.38. 3619-3621 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda: "Silicon Carbide Thin Films Synthesized by Pulsed Laser Deposition"J.of the Korean Phys.Society. Vol.35. S88-S91 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda: "Crystalline Silcon Nitride Thin Films Grown by Pulsed YAG Laser Deposition"Nano Structured Materials. Vol.12. 391-394 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Kawasaki: "Effects of Ion Beam Energy on the Formation of Cubic Boron Nitride Thin Films by Pulsed Nd : YAG Laser Deposition"Jpn.J.Appl.Phys.. Vol.39. 4525-4527 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda: "Characterization of Crystalline TiC Films Grown by Pulsed Nd : YAG Laser Deposition"Jpn.J.Appl.Phys.. Vol.39. 4575-4576 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Kawasaki: "Effects of Cross Magnetic Field on Thin Film Preparation by Using Nd : YAG Laser Deposition"Thin Solid Films. Vol.374. 278-281 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda: "Formation and Properties of TiC Thin Films by pulsed Nd : YAG Laser Deposition"Thin Solid Films. Vol.374. 282-286 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda: "Characterization of Silicon Carbide Thin Films Prepared by Using Pulsed Nd : YAG Laser Deposition Method"Grain Boundary Engineering in Ceramics. Vol.118. 535-542 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Kawasaki: "Tantalum Nitride Thin Films Synthesized by Pulsed Nd : YAG Laser Deposition Method"Mater.Res, Soc.Symp.Proc.. Vol.617. J3.22.1-J3.22.5 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Doi: "Preparation of Crystalline Chromium Carbide Thin Films Synthesized by Pulsed Nd : YAG Laser Deposition"Mater.Res, Soc.Symp.Proc.. Vol.617. J7.8.1-J7.8.5 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Kawasaki: "Preparation of Silicon Carbide Thin Films by Pulsed Laser Deposition Method"Research Reports of the Regional Science Promotor Program (RSP). 337-357 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda: "Formation and Propeties of Carbon Nitride Thin Films by Pulsed Nd : YAG Laser Deposition"Jpn.J.Appl.Phys.. Vol.40. 1061-1063 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Kawaski: "Characterization of Tantalum Nitride Thin Films Fabricated by Pulsed Nd : YAG Laser Deposition Method"Jpn.J.Appl.Phys.. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda: "Preparation of Crystalline TiC Thin Films by Pulsed Nd : YAG Laser Deposition Using Ti Target in Methane Gas"Materials Characterization. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda: "Cubic Boron Nitride Thin Films by Ion Beam Assisted Pulsed Nd : YAG Laser Deposition"IEEE Transaction. (in press).

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2002-03-26  

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