1999 Fiscal Year Final Research Report Summary
STUDY OF SHAPE MEASUREMENTS ON AN ULTRA PRESICION LATHE BY USING A LATERAL SHEARING INTERFEROMETER
| Project/Area Number |
10650119
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (C)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
機械工作・生産工学
|
|---|
| Research Institution | TOYAMA PREFECTURAL UNIVERSITY |
|---|
Principal Investigator |
NOMURA Takashi TOYAMA PREFECTURAL UNIVERSITY, MECHANICAL SYSTEMS ENGINERING, ASSOCIATE PROFESSOR, 工学部, 助教授 (00104977)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
KAMIYA Kazuhide TOYAMA PREFECTURAL UNIVERSITY, MECHANICAL SYSTEMS ENGINERING, ASSISTANT, 工学部, 助手 (00244509)
|
|---|
| Project Period (FY) |
1998 – 1999
|
| Keywords | LATERAL SHEARING INTERFEROMETER / ON-MACHEINE SHAPE MEASUREMENT / ULTRA PRESICION LATHE |
|---|
| Research Abstract |
1) A systematic error caused by changing of a shear amount was clarified in the integration method with respect to analysis of a lateral shearing interferogram. A analyzing method combined the integration method with the polynomial method was proposed to remove the error.
2) A program was developed to remove a systematic error in the optical system of the interferometer.
3) An error is caused, when a lateral shearing interferogram of a work piece with a periodic aberration is analyzed. The analyzing error was clarified.
4) A lateral shearing interferometer was deigned and manufactured. By the interferometer, shape measurements were performed on the lathe.
5) A compact lateral shearing interferometer was deigned and manufactured. The interferometer can be set on the lathe without remove the toll post of the lathe.
|
