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1999 Fiscal Year Final Research Report Summary

Studies on electrode thin film materials for thermo-electric generation system

Research Project

Project/Area Number 10650671
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Inorganic materials/Physical properties
Research InstitutionOsaka Prefecture University

Principal Investigator

MATSUI Tohiyuki  Osaka Prefecture University, College of Engineering, Research Associate, 工学部, 助手 (20219372)

Co-Investigator(Kenkyū-buntansha) MORII Kenji  Osaka Prefecture University, College of Engineering, Professor, 工学部, 教授 (10101198)
TSUDA Hiroshi  Osaka Prefecture University, College of Engineering, Research Associate, 工学部, 助手 (80217322)
Project Period (FY) 1998 – 1999
KeywordsTiBィイD22ィエD2 thin film / LaCoOィイD23ィエD2 thin film / Electrode materials / Ion-beam sputtering / Electric properties / Thermo-electric device / Microstructure / Metal-insulator transition
Research Abstract

Fabrication and electric properties of TiBィイD22ィエD2 thin films : A titanium diboride has been well known to heat-resistant ceramics with relatively high electric conductivity. In the present study, we have investigated the electric properties of TiBィイD22ィエD2 thin films as one of potential candidates for electrode materials used at ultra high temperature. TiBィイD22ィエD2 thin films were prepared by RF-sputtering on glass substrates by using stoichiometric and non-stoichiometric TiBィイD22ィエD2 sintered targets. The films were mainly composed of TiBィイD22ィエD2 small crystallites, with a small amount of B-rich amorphous as a second phase. The resistivity of the typical sample was revealed to be about 180 mΩ・cm at room temperature, which was higher than bulk value (33 mΩ・cm). The temperature dependence of the resisitivities seems to be carrier concentration dependent. However, the very high carrier densities (1.2〜6.1 x 10ィイD122ィエD1/cmィイD1-3ィエD1) and the relatively small mobilities (0.3〜2.3 cmィイD12ィエD1・VィイD1-1ィエD1・sィイD1-1ィエD1) were obtained, suggesting that the conduction carrier might behave like nearly free electrons.
Fabrication and electric properties of LaCoOィイD23ィエD2 thin films by ion-beam sputtering and subsequent heat treatment. The compacts consisting of LaィイD22ィエD2OィイD23ィエD2 and CoO powder were used for the targets. The films were composed of the almost single phase of LaCoOィイD23ィエD2 with a very small amount of the unidentified second phase. The resistivity at room temperature for the annealed La/Co=1/1 sample was determined to be 51 Ω・m. Whereas at the high temperature, the resistivity was found to be same order of the resistivity for bulk LaCoOィイD23ィエD2, that is, comparable to the resistivity for metals. The temperature dependence of the electric conduction of the samples also behaves like bulk LaCoOィイD23ィエD2, which means the metal-insulator transition is supposed to be realized in thin film samples.

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] H. Mabuchi: "In-situ Synthesis of Si_<>N_4SiC Composites by Reactive Hot-pressing"High Temperature-High Pressure. 31. 499-506 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H. Mabuchi: "Oxidation Resistant Coating for Gamma Titanium Aluminides by Pack Cementation"Scripta Materialia. 41-5. 511-516 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T. Miyoshi: "Magnetic and Electric properities of Mn_5Ge_3/Ge nanostructured films"Journal of Applied Physics. 85. 5372-5374 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A. Shutou: "Structure and electric properties of TiB_2 thin films by RF sputtering"Materials Letters. (発売予定). (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A. Shutou: "Fabrication and electric properties of RF-sputtered TiB_2 thin films"Proc. of the 2000 Powder Metallurgy World Congress. (発売予定). (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 山下 裕一: "イオンビームスパッタ法によるCoSb_3薄膜の作製と熱電特性"日本金属学会誌. (発売予定). (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Mabuchi, H.Tsuda, T.Ohtsuka, T.Matsui and K.Morii: "In situ Synthesis of SiィイD23ィエD2NィイD24ィエD2-SiC Composites by Reactive Hot-pressing."High Temperature - High Pressue. 31. 499-506 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Mabuchi, H.Tsuda, T.Kawakami, S.Nakamatsu, T.Matsui and K.Morii: "Oxidation-Resistant Coating for Gamma Titanium Aluminides by Pack Cementation."Scripta Materials. 41-5. 511-516 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Miyoshi, T.Matsui, H.Tsuda, H.Mabuchi and K.Morii: "Magnetic and Electric properties of MnィイD25ィエD2GeィイD23ィエD2/G3 nanostructured films"Journal of Applied Physics. 85. 5372-5374 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Shutou, T.Matsui, H.Tsuda, H.Mabudhi and K.Morii: "Structure and electric properties of TiBィイD22ィエD2 thin films by RF sputtering"Materials Letters. (to be published).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Shutou, T.Matsui, H.Tsuda, H.Mabuchi and K.Morii: "Fabrication and electric properties of RF-sputtered TiBィイD22ィエD2 thin films"Proc. of the 2000 Powder Metallurgy World Congress. (to be published).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Yamashita, T.Matsui and K.Morii: "Fabrication and thermo-electric properties of ion-beam sputtered CoSbィイD23ィエD2 thin films"Journal of the Japan Institute of Metals. (to be published).

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2001-10-23  

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