1999 Fiscal Year Annual Research Report

エバネッセント場の力による高分解能検出に関する研究

Research Project

Project/Area Number	11122216
Research Institution	Osaka University
Principal Investigator	菅原康弘大阪大学, 大学院・工学研究科, 助教授 (40206404)
Keywords	近接場 / エバネッセント場 / 原子間力 / 力 / 半導体短針 / 光学顕微鏡 / 散乱光 / 表面ポテンシャル
Research Abstract	エバネッセント光を力として高分解に測定するため、まず、力の高感度検出と先鋭で清浄な顕微鏡探針の実現に重点を置き研究を推進した。次に、エバネッセント光を力として高感度・高分解能に測定のための指針を検討した。具体的な成果は以下のようになっている。 1)探針に働く力の高感度検出の実現高分解能なフォトン原子間力顕微鏡を実現するためには、探針に働く微弱な力を高感度に検出する必要がある。具体的には、探針の振動振幅を安定に保持しながら、探針の機械的共振周波数の変化を高感度に検出する必要がある。そこで、まず、現有の探針の変位検出回路にノイズ成分の極めて少ないホトダイオードを導入し、超高感度な力検出を実現した。 2)先鋭で清浄な顕微鏡探針を実現するための条件の検討エバネッセント場と相互作用する探針先端の寸法が、空間分解能を大きく左右する。そこで、現有の顕微鏡探針処理評価装置を用いて、先鋭で清浄な探針を実現するための条件を検討した。 3)ケルビン法の導入と空間分解能を向上させるための指針の取得試料表面の仕事関数の分布が、フォトン原子間力顕微鏡の空間分解能に強く影響することが判明している。そこで、試料表面の仕事関数の影響を除去しながら、エバネッセント光を力に変換する測定方法(具体的には、ケルビン法)を新たに導入し、その効果を実験的に確認した。 4)フォトン原子間力顕微鏡の性能評価試料表面としてプリズム表面に展開された金薄膜を取り上げ、フォトン原子間力顕微鏡の垂直方向および水平方向の分解能を評価した。

Research Products
(25 results)

All Other

All Publications (25 results)

[Publications] S. Morita and Y. Sugawara: "Guidelines for the achievement of true atomic resolution with noncontact atomic force microscopy"Appl. Surf. Sci.. 140・3-4. 406-410 (1999)
[Publications] T. Minobe et. al.: "Distance dependence of noncontact -AFM image contrast on Si(111) √<3>x√<3>-Ag structure"Appl. Surf. Sci.. 140・3-4. 298-303 (1999)
[Publications] S. Orisaka et. al.: "The atomic resolution imaging of metallic Ag(111) surface by noncontact atomic force microscope"Appl. Surf. Sci.. 140・3-4. 243-246 (1999)
[Publications] T. Uchihashi et. al.: "Imaging of chemical reactivity and buckled dimers on Si(100) 2x1 reconstructed surface with noncontact AFM"Appl. Sur. Sci.. 140・3-4. 304-308 (1999)
[Publications] Y. Sugawara et. al.: "True atomic resolution imaging of surface structure and surface charge on the GaAs(110)"Appl. Sur. Sci.. 140・3-4. 371-375 (1999)
[Publications] M. Tomitori and T. Arai: "Tip cleaning and sharpening processes for noncontact atomic force microscope in ultrahigh vacuum"Appl. Sur. Sci.. 140・3-4. 432-438 (1999)
[Publications] Y. Sugawara et. al.: "Non-contact AFM Images Measured on Si(111) √<3>x√<3>-Ag and Ag(111) Surface"Surface and Interface Analysis. 27・5-6. 456-461 (1999)
[Publications] T. Uchihashi et. al.: "Self-Assembled Monolayer of Adenine Base on Graphite Studied by Noncontact Atomic Force Microscopy"Phys. Rev. B. 60・11. 8309-8313 (1999)
[Publications] S. Morita et. al.: "Missing Ag Atom on Si(111) √<3>x√<3>-Ag Surface Observed Noncontact Atomic Force Microscopy"Jpn. J. Appl. Phys.. 38・11B. L1342-L1344 (1999)
[Publications] K. Yokoyama et. al.: "Atomically resolved Silver Imaging on the Si(111) -(√<3>x_3)-Ag Surface Using a Noncontact Atomic Force Microscope"Phys. Rev. Lett.. 83・24. 5023-5026 (1999)
[Publications] K. Yokoyama et. al.: "Optical beam deflection noncontact atomic Force microscope with three-dimensional beam adjustment mechanism"Rev. Sci. Instrum.. 71・1. 128-132 (2000)
[Publications] K. Yokoyama et. al.: "Atomic Resolution Imaging on Si(100)2x1 and Si(100)2x1 : H Surfaces with Noncontact Atomic Force Microscopy"Jpn. J. Appl. Phys.. 39・2A. L113-L115 (2000)
[Publications] T. Uchihashi et. al.: "Identification of B-Form DNA in an Ultrahigh Vacuum by Noncontact-Mode Atomic Force Microscopy"Langmuir. 16・3. 1349-1353 (2000)
[Publications] S. Morita et. al.: "Defects and Its Charge Imaging on Semiconductor Surfaces by Noncontact Atomic Force Microscopy and Spectroscopy"Journal of Crystal Growth. (In press). (2000)
[Publications] S. Morita et. al.: "Correlation of frequency shift discontinuity to atomic positions on a Si(111)7x7 surface by noncontact atomic force microscopy"Nanotechnology. Vol. 11 (In press). (2000)
[Publications] Y. Sugawara et. al.: "Noncontact AFM imaging on Al-adsorbed Si(111) surface with an empty orbital"Appl. Surf. Sci.. (In press). (2000)
[Publications] T. Uchihashi et. al.: "High-resolution imaging of organic monolayers using noncontact AFM"Appl. Surf. Sci.. (In press). (2000)
[Publications] N. Suehira et. al.: "Development of low temperature ultrahigh vacuum noncontact atomic force microscope with PZT cantilever"Appl. Surf. Sci.. (In press). (2000)
[Publications] R. Nishi et. al.: "Phase change detection of attractive force gradient by using a quartz resonator in noncontact atomic force microscopy"Appl. Surf. Sci.. (In press). (2000)
[Publications] M. Ashino et. al.: "Atomic-scale structure on a non-stoichiometric TiO_2(110) surface studied by noncontact AFM"Appl. Surf. Sci.. (In press). (2000)
[Publications] 森田清三、菅原康弘: "AFMの現状と展開"表面科学. 20・5. 352-357 (1999)
[Publications] 菅原康弘、森田清三: "非接触原子間力顕微鏡による単一分子解析"蛋白質核酸酵素. 44・14. 2119-2123 (1999)
[Publications] 森田清三、菅原康弘: "原子間力顕微鏡による原子レベルの物性評価と計測"電気学会論文誌C. 119-C・10. 1109-1112 (1999)
[Publications] 森田清三、菅原康弘: "ナノ力学に基づいた原子分子技術"生産と技術. 52・2(In press). (2000)
[Publications] 森田清三編著他: "走査型プローブ顕微鏡-基礎と未来予測-"丸善株式会社. 181 (2000)

1999 Fiscal Year Annual Research Report

エバネッセント場の力による高分解能検出に関する研究

Principal Investigator

菅原 康弘 大阪大学, 大学院・工学研究科, 助教授 (40206404)

Research Products

[Publications] S. Morita and Y. Sugawara: "Guidelines for the achievement of true atomic resolution with noncontact atomic force microscopy"Appl. Surf. Sci.. 140・3-4. 406-410 (1999)

[Publications] T. Minobe et. al.: "Distance dependence of noncontact -AFM image contrast on Si(111) √<3>x√<3>-Ag structure"Appl. Surf. Sci.. 140・3-4. 298-303 (1999)

[Publications] S. Orisaka et. al.: "The atomic resolution imaging of metallic Ag(111) surface by noncontact atomic force microscope"Appl. Surf. Sci.. 140・3-4. 243-246 (1999)

[Publications] T. Uchihashi et. al.: "Imaging of chemical reactivity and buckled dimers on Si(100) 2x1 reconstructed surface with noncontact AFM"Appl. Sur. Sci.. 140・3-4. 304-308 (1999)

[Publications] Y. Sugawara et. al.: "True atomic resolution imaging of surface structure and surface charge on the GaAs(110)"Appl. Sur. Sci.. 140・3-4. 371-375 (1999)

[Publications] M. Tomitori and T. Arai: "Tip cleaning and sharpening processes for noncontact atomic force microscope in ultrahigh vacuum"Appl. Sur. Sci.. 140・3-4. 432-438 (1999)

[Publications] Y. Sugawara et. al.: "Non-contact AFM Images Measured on Si(111) √<3>x√<3>-Ag and Ag(111) Surface"Surface and Interface Analysis. 27・5-6. 456-461 (1999)

[Publications] T. Uchihashi et. al.: "Self-Assembled Monolayer of Adenine Base on Graphite Studied by Noncontact Atomic Force Microscopy"Phys. Rev. B. 60・11. 8309-8313 (1999)

[Publications] S. Morita et. al.: "Missing Ag Atom on Si(111) √<3>x√<3>-Ag Surface Observed Noncontact Atomic Force Microscopy"Jpn. J. Appl. Phys.. 38・11B. L1342-L1344 (1999)

[Publications] K. Yokoyama et. al.: "Atomically resolved Silver Imaging on the Si(111) -(√<3>x_3)-Ag Surface Using a Noncontact Atomic Force Microscope"Phys. Rev. Lett.. 83・24. 5023-5026 (1999)

[Publications] K. Yokoyama et. al.: "Optical beam deflection noncontact atomic Force microscope with three-dimensional beam adjustment mechanism"Rev. Sci. Instrum.. 71・1. 128-132 (2000)

[Publications] K. Yokoyama et. al.: "Atomic Resolution Imaging on Si(100)2x1 and Si(100)2x1 : H Surfaces with Noncontact Atomic Force Microscopy"Jpn. J. Appl. Phys.. 39・2A. L113-L115 (2000)

[Publications] T. Uchihashi et. al.: "Identification of B-Form DNA in an Ultrahigh Vacuum by Noncontact-Mode Atomic Force Microscopy"Langmuir. 16・3. 1349-1353 (2000)

[Publications] S. Morita et. al.: "Defects and Its Charge Imaging on Semiconductor Surfaces by Noncontact Atomic Force Microscopy and Spectroscopy"Journal of Crystal Growth. (In press). (2000)

[Publications] S. Morita et. al.: "Correlation of frequency shift discontinuity to atomic positions on a Si(111)7x7 surface by noncontact atomic force microscopy"Nanotechnology. Vol. 11 (In press). (2000)

[Publications] Y. Sugawara et. al.: "Noncontact AFM imaging on Al-adsorbed Si(111) surface with an empty orbital"Appl. Surf. Sci.. (In press). (2000)

[Publications] T. Uchihashi et. al.: "High-resolution imaging of organic monolayers using noncontact AFM"Appl. Surf. Sci.. (In press). (2000)

[Publications] N. Suehira et. al.: "Development of low temperature ultrahigh vacuum noncontact atomic force microscope with PZT cantilever"Appl. Surf. Sci.. (In press). (2000)

[Publications] R. Nishi et. al.: "Phase change detection of attractive force gradient by using a quartz resonator in noncontact atomic force microscopy"Appl. Surf. Sci.. (In press). (2000)

[Publications] M. Ashino et. al.: "Atomic-scale structure on a non-stoichiometric TiO_2(110) surface studied by noncontact AFM"Appl. Surf. Sci.. (In press). (2000)

[Publications] 森田清三、菅原康弘: "AFMの現状と展開"表面科学. 20・5. 352-357 (1999)

[Publications] 菅原康弘、森田清三: "非接触原子間力顕微鏡による単一分子解析"蛋白質 核酸 酵素. 44・14. 2119-2123 (1999)

[Publications] 森田清三、菅原康弘: "原子間力顕微鏡による原子レベルの物性評価と計測"電気学会論文誌C. 119-C・10. 1109-1112 (1999)

[Publications] 森田清三、菅原康弘: "ナノ力学に基づいた原子分子技術"生産と技術. 52・2(In press). (2000)

[Publications] 森田清三編著他: "走査型プローブ顕微鏡-基礎と未来予測-"丸善株式会社. 181 (2000)

菅原康弘大阪大学, 大学院・工学研究科, 助教授 (40206404)

[Publications] 菅原康弘、森田清三: "非接触原子間力顕微鏡による単一分子解析"蛋白質核酸酵素. 44・14. 2119-2123 (1999)