1999 Fiscal Year Annual Research Report

超高分解能原子間力プローブ法による原子の力学的分光と制御

Research Project

Project/Area Number	11226204
Research Category	Grant-in-Aid for Scientific Research on Priority Areas (B)
Research Institution	Osaka University
Principal Investigator	森田清三大阪大学, 大学院・工学研究科, 教授 (50091757)
Co-Investigator(Kenkyū-buntansha)	西竜治大阪大学, 大学院・工学研究科, 助手 (40243183) 菅原康弘大阪大学, 大学院・工学研究科, 助教授 (40206404) 冨取正彦北陸先端科学技術大学院大学, 材料科学研究科, 助教授 (10188790)
Keywords	原子間力顕微鏡 / 原子間力 / 非接触 / 原子間力分光 / フォース・マッピング / 原子分解能 / 探針先鋭化 / 探針清浄化
Research Abstract	1)次世代の超高分解能非接触原子間力顕微鏡システムの構築超高感度・超高分解能の非接触原子間力顕微鏡ユニット設計に基づく、安定で再現性良く原子間力分光や制御の研究が出来る次世代非接触原子間力顕微鏡機構を構築した。また、光干渉計と測定回路の超高感度化と超低雑音化を実現することにより、空間分解能の更なる向上を実現するために、テコの変位の検出系を改良した。 2)非接触原子間力顕微鏡を用いた原子間力分光(フォース・マッピング) 非接触原子間力顕微鏡を用いて、個々の原子周辺の原子間力の空間分布を三次元測定するには、二つの方法が考えられる。一つは、力に関係した量である原子間力顕微鏡テコの機械的共振周波数の変化の探針-試料間距離Z依存性(周波数シフトカーブ)を様々な(X、Y)位置で測定する方法である。もう一つの方法は、様々な探針-試料間距離Zで非接触原子間力顕微鏡(XY像)を測定する方法である。今回、それぞれの方法の(予備)実験に成功した。 3)探針の先鋭化・清浄化原子間力顕微鏡を利用して相互作用を中心とした原子・分子サイズの物性を明らかにするための要素技術の一つは、探針の先鋭化・清浄化技術である。この技術の確立を目指し、自己変位検出型ピエゾ抵抗型Siカンチレバー先端の処理に熱電界印加処理法を適用し、Si(111)7x7を試料として非接触原子間力顕微鏡像を原子分解能で観察することができた。また、探針と試料間の印加電圧を変えながら像を観察したところ、非接触原子間力顕微鏡像が印加電圧によって表面の電子状態を反映するように変化すること、探針-試料間電圧を高くすると探針の最接近位置が試料に近づき、探針の最先端原子が感じる力の斥力成分が強くなることなどを明らかにした。

Research Products

(27 results)

All Other

All Publications (27 results)

[Publications] S. Morita and Y. Sugawara: "Guidelines for the achievement of true atomic resolution with noncontact atomic force microscopy"Appl. Surf. Sci.. 140・3-4. 406-410 (1999)
[Publications] T. Minobe et. al.: "Distance dependence of noncontact -AFM image contrast on Si(111) √<3>x√<3>-Ag structure"Appl. Surf. Sci.. 140・3-4. 298-303 (1999)
[Publications] S. Orisaka et. al.: "The atomic resolution imaging of metallic Ag(111) surface by noncontact atomic force microscope"Appl. Surf. Sci.. 140・3-4. 243-246 (1999)
[Publications] T. Uchihashi et. al.: "Imaging of chemical reactivity and buckled dimers on Si(100) 2x1 reconstructed surface with noncontact AFM"Appl. Sur. Sci.. 140・3-4. 304-308 (1999)
[Publications] Y. Sugawara et. al.: "True atomic resolution imaging of surface structure and surface charge on the GaAs(110)"Appl. Sur. Sci.. 140・3-4. 371-375 (1999)
[Publications] M. Tomitori and T. Arai: "Tip cleaning and sharpening processes for noncontact atomic force microscope in ultrahigh vacuum"Appl. Sur. Sci.. 140・3-4. 432-438 (1999)
[Publications] Y. Sugawara et. al.: "Non-contact AFM Images Measured on Si(111) √<3>x√<3>-Ag and Ag(111) Surfaces"Surface and Interface Analysis. 27・5-6. 456-461 (1999)
[Publications] T. Uchihashi et al.: "Self-Assembled Monolayer of Adenine Base on Graphite Studied by Noncontact Atomic Force Microscopy"Phys. Rev. B. 60・11. 8309-8313 (1999)
[Publications] S. Morita et. al.: "Missing Ag Atom on Si(111) √<3>x√<3>-Ag Surface Observed Noncontact Atomic Force Microscopy"Jpn. J. Appl. Phys.. 38・11B. L1342-L1344 (1999)
[Publications] K. Yokoyama et. al.: "Atomically Resolved Silver Imaging on the Si(111) -(√<3>x√<3>)-Ag Surface Using a Noncontact Atomic Force Microscope"Phys. Rev. Lett.. 83・24. 5023-5026 (1999)
[Publications] K. Yokoyama et. al.: "Optical beam deflection noncontact atomic force microscope with three -dimensional beam adjustment mechanism"Rev. Sci. Instrum.. 71・1. 128-132 (2000)
[Publications] K. Yokoyama et. al.: "Atomic Resolution Imaging on Si(100)2x1 and Si(100)2x1 : H Surfaces with Noncontact Atomic Force microscopy"Jpn. J. Appl. Phys.. 39・2A. L113-L115 (2000)
[Publications] T. Uchihashi et. al.: "Identification of B-Form DNA in an Ultrahigh Vacuum by Noncontact -Mode Atomic Force Microscopy"Langmuir. 16・3. 1349-1353 (2000)
[Publications] S. Morita et. al.: "Defects and Its Charge Imaging on Semiconductor Surfaces by Noncontact Atomic Force Microscopy and Spectroscopy"Journal of Crystal Growth. (In press). (2000)
[Publications] S. Morita et. al.: "Correlation of frequency shift discontinuity to atomic positions on a Si(111) 7x7 surface by noncontact atomic force microscopy"Nanotechnology. Vol. 11 (In press). (2000)
[Publications] T. Arai and M. Tomitori: "AFM tip sharpening and evaluation by electric field confinement using a metal grid approached to the tip"J. Vac. Sci. Technol. A. (In press). (2000)
[Publications] Y. Sugawara et. al.: "Noncontact AFM imaging on A1-adsorbed Si(111) surface with an empty orbital"Appl. Surf. Sci.. (In press). (2000)
[Publications] T. Uchihashi et. al.: "High-resolution imaging of organic monolayers using noncontact AFM"Appl. Surf. Sci.. (In press). (2000)
[Publications] N. Suehira et. al.: "Development of low temperature ultrahigh vacuum noncontact atomic force microscope with PZT cantilever"Appl. Surf. Sci.. (In press). (2000)
[Publications] R. Nishi et. al.: "Phase change detection of attractive force gradient by using a quartz resonator in noncontact atomic force microscopy"Appl. Surf. Sci.. (In press). (2000)
[Publications] M. Ashino et. al.: "Atomic-scale structure on a non-stoichiometric TiO_2(110) surface studied by noncontact AFM"Appl. Ashino et. al.. (In press). (2000)
[Publications] T. Arai and M. Tomitori: "Bias dependence of Si(111) 7x7 images observed by noncontact atomic force microscopy"Appl. Surf. Sci.. (In press). (2000)
[Publications] 森田清三、菅原康弘: "AFMの現状と展開"表面科学. 20・5. 352-357 (1999)
[Publications] 菅原康弘、森田清三: "非接触原子間力顕微鏡による単一分子解析"蛋白質核酸酵素. 44・14. 2119-2123 (1999)
[Publications] 森田清三、菅原康弘: "原子間力顕微鏡による原子レベルの物性評価と計測"電気学会論文誌C. 119-C・10. 1109-1112 (1999)
[Publications] 森田清三、菅原康弘: "ナノカ学に基づいた原子分子技術"生産と技術. 52・2(In press). (2000)
[Publications] 森田清三編著他: "走査型プローブ顕微鏡-基礎と未来予測-"丸善株式会社. 181 (2000)

1999 Fiscal Year Annual Research Report

超高分解能原子間力プローブ法による原子の力学的分光と制御

Principal Investigator

森田 清三 大阪大学, 大学院・工学研究科, 教授 (50091757)

Research Products

[Publications] S. Morita and Y. Sugawara: "Guidelines for the achievement of true atomic resolution with noncontact atomic force microscopy"Appl. Surf. Sci.. 140・3-4. 406-410 (1999)

[Publications] T. Minobe et. al.: "Distance dependence of noncontact -AFM image contrast on Si(111) √<3>x√<3>-Ag structure"Appl. Surf. Sci.. 140・3-4. 298-303 (1999)

[Publications] S. Orisaka et. al.: "The atomic resolution imaging of metallic Ag(111) surface by noncontact atomic force microscope"Appl. Surf. Sci.. 140・3-4. 243-246 (1999)

[Publications] T. Uchihashi et. al.: "Imaging of chemical reactivity and buckled dimers on Si(100) 2x1 reconstructed surface with noncontact AFM"Appl. Sur. Sci.. 140・3-4. 304-308 (1999)

[Publications] Y. Sugawara et. al.: "True atomic resolution imaging of surface structure and surface charge on the GaAs(110)"Appl. Sur. Sci.. 140・3-4. 371-375 (1999)

[Publications] M. Tomitori and T. Arai: "Tip cleaning and sharpening processes for noncontact atomic force microscope in ultrahigh vacuum"Appl. Sur. Sci.. 140・3-4. 432-438 (1999)

[Publications] Y. Sugawara et. al.: "Non-contact AFM Images Measured on Si(111) √<3>x√<3>-Ag and Ag(111) Surfaces"Surface and Interface Analysis. 27・5-6. 456-461 (1999)

[Publications] T. Uchihashi et al.: "Self-Assembled Monolayer of Adenine Base on Graphite Studied by Noncontact Atomic Force Microscopy"Phys. Rev. B. 60・11. 8309-8313 (1999)

[Publications] S. Morita et. al.: "Missing Ag Atom on Si(111) √<3>x√<3>-Ag Surface Observed Noncontact Atomic Force Microscopy"Jpn. J. Appl. Phys.. 38・11B. L1342-L1344 (1999)

[Publications] K. Yokoyama et. al.: "Atomically Resolved Silver Imaging on the Si(111) -(√<3>x√<3>)-Ag Surface Using a Noncontact Atomic Force Microscope"Phys. Rev. Lett.. 83・24. 5023-5026 (1999)

[Publications] K. Yokoyama et. al.: "Optical beam deflection noncontact atomic force microscope with three -dimensional beam adjustment mechanism"Rev. Sci. Instrum.. 71・1. 128-132 (2000)

[Publications] K. Yokoyama et. al.: "Atomic Resolution Imaging on Si(100)2x1 and Si(100)2x1 : H Surfaces with Noncontact Atomic Force microscopy"Jpn. J. Appl. Phys.. 39・2A. L113-L115 (2000)

[Publications] T. Uchihashi et. al.: "Identification of B-Form DNA in an Ultrahigh Vacuum by Noncontact -Mode Atomic Force Microscopy"Langmuir. 16・3. 1349-1353 (2000)

[Publications] S. Morita et. al.: "Defects and Its Charge Imaging on Semiconductor Surfaces by Noncontact Atomic Force Microscopy and Spectroscopy"Journal of Crystal Growth. (In press). (2000)

[Publications] S. Morita et. al.: "Correlation of frequency shift discontinuity to atomic positions on a Si(111) 7x7 surface by noncontact atomic force microscopy"Nanotechnology. Vol. 11 (In press). (2000)

[Publications] T. Arai and M. Tomitori: "AFM tip sharpening and evaluation by electric field confinement using a metal grid approached to the tip"J. Vac. Sci. Technol. A. (In press). (2000)

[Publications] Y. Sugawara et. al.: "Noncontact AFM imaging on A1-adsorbed Si(111) surface with an empty orbital"Appl. Surf. Sci.. (In press). (2000)

[Publications] T. Uchihashi et. al.: "High-resolution imaging of organic monolayers using noncontact AFM"Appl. Surf. Sci.. (In press). (2000)

[Publications] N. Suehira et. al.: "Development of low temperature ultrahigh vacuum noncontact atomic force microscope with PZT cantilever"Appl. Surf. Sci.. (In press). (2000)

[Publications] R. Nishi et. al.: "Phase change detection of attractive force gradient by using a quartz resonator in noncontact atomic force microscopy"Appl. Surf. Sci.. (In press). (2000)

[Publications] M. Ashino et. al.: "Atomic-scale structure on a non-stoichiometric TiO_2(110) surface studied by noncontact AFM"Appl. Ashino et. al.. (In press). (2000)

[Publications] T. Arai and M. Tomitori: "Bias dependence of Si(111) 7x7 images observed by noncontact atomic force microscopy"Appl. Surf. Sci.. (In press). (2000)

[Publications] 森田清三、菅原康弘: "AFMの現状と展開"表面科学. 20・5. 352-357 (1999)

[Publications] 菅原康弘、森田清三: "非接触原子間力顕微鏡による単一分子解析"蛋白質 核酸 酵素. 44・14. 2119-2123 (1999)

[Publications] 森田清三、菅原康弘: "原子間力顕微鏡による原子レベルの物性評価と計測"電気学会論文誌C. 119-C・10. 1109-1112 (1999)

[Publications] 森田清三、菅原康弘: "ナノカ学に基づいた原子分子技術"生産と技術. 52・2(In press). (2000)

[Publications] 森田清三編著他: "走査型プローブ顕微鏡-基礎と未来予測-"丸善株式会社. 181 (2000)

森田清三大阪大学, 大学院・工学研究科, 教授 (50091757)

[Publications] 菅原康弘、森田清三: "非接触原子間力顕微鏡による単一分子解析"蛋白質核酸酵素. 44・14. 2119-2123 (1999)