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2000 Fiscal Year Final Research Report Summary

Studies of high-temperature point defects and development of crystal growth method free of secondary defects in Si with the use of hydrogen

Research Project

Project/Area Number 11450001
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionTOHOKU UNIVERSITY

Principal Investigator

SUEZAWA Masashi  TOHOKU Univ., Insti. MATERIAS RESEARCH, Prof., 金属材料研究所, 教授 (00005919)

Co-Investigator(Kenkyū-buntansha) FUKATA Naoki  TOHOKU Univ., Insti.MATERIAS RESEARCH, Assis.Prof., 金属材料研究所, 助手 (90302207)
Project Period (FY) 1999 – 2000
Keywordssilicon / vacancy / self-interstitial / hydrogen / oxygen-vacancy pair / complex / optical absorption / electron-irradiation
Research Abstract

We measured optical absorption spectra after 3-MeV electron-irradiation of hydrogenated Czochralskigrown Si crystals (abbreviated Cz.Si hereafter) at Rt. We observed optical absorption peaks due to various complexes of point defects and impurities. We first describe the result of vacancy-oxygen (VO) pair. The concentration of VO pair was proportional to the 3/4 power of electron dose, contrary to our intuition, i.e., 1. We have not yet succeeded to explain it. The pair formation rate was proportional to the 1/5 power of oxygen concentration. This weak dependence is explained by long diffusion distance of vacancy before captured by oxygen, which is due to high diffusion rate of vacancy and weak interaction between oxygen and vacancy. Contrary to the case of floating-zone grown Si crystals (FZ.Si), vacancyhydrogen complexes were not generated. This is due to VO pair formation because of high concentration of oxygen (about two orders of magnitude larger than that of hydrogen) in Cz.Si. Concentrations of self-interstitial-hydrogen complexes were larger in Cz.Si than in FZ.Si. This is due to lower rate of pair annihilation of vacancy and self-interstitial because vacancies in Cz.Si quickly form pairs with oxygen. We identified defects responsible for peaks at 1870 and 2072 cm^<-1> to be I_2H_2 and V_2H_2, respectively, based on the dendences of peak intensities on dopants and irradiation dose.
We also studied the thermal stability of complexes. VO pairs decreased above 100℃ and, simultaneously, two new peaks at 2126 and 2152 cm^<-1> appeared. These two peaks are due to VOH_2 complex since 2122 and 2145 cm^<-1> peaks are due to VH_2 complex.

  • Research Products

    (9 results)

All Other

All Publications (9 results)

  • [Publications] M.Suezawa: "Formation of defect complexes by electron-irradiation of hydrogenated crystalline silicon"Physical Review B. 63. 035201-1-7 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Suezawa: "Hydrogen-related complexes formed by electron-irradiation of hydrogenated silicon"Physical Review B. 63. 035203-1-6 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Fukata and M.Suezawa: "Formation energy of vacancy determined via optical absorption due to vacancy-hydrogen complex in quenched silicon"Proc.3rd Intnl.Sympo.Advanced Sci.and Tech.Silicon Mater.. 130-135 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Suezawa: "Hydrogen-point defect complexes in electron-irradiated C-doped and high-purity Si"Jpn.J.Appl.Phys.. 38. L608-L610 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Suezawa: "The formation of H_2^* by electron-irradiation of hydrogenated Si"Jpn.J.Appl.Phys.. 38. L758-L760 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Suezawa: "Thermal properties of H-related complexes in electron-irradiated Si doped with H"J.Appl.Phys.. 86. 4865-4870 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Fukata and M.Suezawa: "Formation energy of vacancy determined via optical absorption due to vacancy-hydrogen complex in quenched Si"Proc.3rd Intnl.Sympo.Adv.Sci.Techno.Silicon Mater.(JSPS). 131-135 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Suezawa: "Formation of defect complexes by electron-irradiation of hydrogenated crystalline silicon"Phys.Rev.. B63. 035201-1-7 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Suezawa: "Hydrogen-related complexes formed by electron-irradiation of hydrogenated silicon"Phys.Rev.. B63. 035203-1-6 (2001)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2002-03-26  

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