1999 Fiscal Year Annual Research Report

原子間力顕微鏡の単原子観察機構に関する研究

Research Project

Project/Area Number	11450018
Research Category	Grant-in-Aid for Scientific Research (B)
Research Institution	Osaka University
Principal Investigator	菅原康弘大阪大学, 大学院・工学研究科, 助教授 (40206404)
Keywords	原子間力顕微鏡 / 原子間力 / 清浄表面 / 単原子観察 / 半導体探針 / 引力 / 化学結合 / 物理結合
Research Abstract	1) 清浄で先鋭な探針の現実探針先端と試料表面との間に働く力学的相互作用を調べるためには、原子レベルで先鋭で素性の明らかな探針を使用することが必要不可欠である。そこで、現有の超高真空原子間力顕微鏡に探針の清浄度と先鋭度を評価する装置を付加し、清浄で先鋭な探針を実現した。 )2 現有の原子間力顕微鏡の超高感度化探針先端と試料表面との間に働く力学相互作用を調べるためには、探針に働く非常に微弱な引力を高感度に測定することが重要になる。そこで、まず、特有の振動振幅安定化回路を改良した。また、現有の周波数復調回路を改良し、超高感度な周波数検出を実現した。 3) 異なる相互作用の分離・画像化方法の確立探針先端と試料表面との間に働く力学的相互作用として、原子間力や静電気力、化学結合力など種々の相互作用がある。そこで、探針・試料間に電圧を印加して接触電位差を原子レベルで補償することにより、化学結合力を静電気力から分離し、両者を画像化できるようにした。 4) シリコン探針・半導体表面間の力学的相互作用に関する実験的検討結晶構造や電子状態が明らかになっている半導体表面を取り上げ、探針・試料間距離を変えながら画像を取得する。画像のコントラストと表面の結晶構造や電子状態とを比較することにより、どのような力学的相互作用が画像化されているかを検討した。

Research Products

(25 results)

All Other

All Publications (25 results)

[Publications] S. Morita and Y. Sugawara: "Guidelines for the achievement of true atomic resolution with noncontact atomic force microscopy"Appl. Surf. Sci.. 140・3-4. 406-410 (1999)
[Publications] T. Minobe et al.: "Distance dependence of noncontact -AFM image contrast on Si(111)√<3>x√<3 >-Ag structure"Appl. Surf. Sci.. 140・3-4. 298-303 (1999)
[Publications] S. Orisaka et al.: "The atomic resolution imaging of metallic Ag(111) surface by noncontact atomic force microscope"Appl. Surf. Sci.. 140・3-4. 243-246 (1999)
[Publications] T. Uchihashi et al.: "Imaging of chemical reactivity and buckled dimers on Si(100)2x1 reconstructed surface with noncontact AFM"Appl. Sur. Sci.. 140・3-4. 304-308 (1999)
[Publications] Y. Sugawara et al.: "True atomic resolution imaging of surface structure and surface change on the GaAs(110)"Appl. Sur. Sci.. 140・3-4. 371-375 (1999)
[Publications] M. Tomitori and T. Arai: "Tip cleaning and sharpening processes for noncontact atomic force microscope in ultrahigh vacuum"Appl. Sur. Sci.. 140・3. 432-438 (1999)
[Publications] Y. Sugawara et al.: "Non-contact AFM Images Measured on Si(111)√<3 >x√<3 >-Ag and Ag(111) Surface"Surface and Interface Analysis. 27・5-6. 456-461 (1999)
[Publications] T. Uchihashi et al.: "Self-Assembled Monolayer of Adenine Base on Graphite Studied by Noncontact Atomic Force Microscopy"Phys. Rev. B. 60・11. 8309-8313 (1999)
[Publications] S. Morita et al.: "Missing Ag Atom on Si(111)√<3 >x√<3>-Ag Surface Observed Noncontact Atomic Force Microscopy"Jpn. J. Appl. Phys.. 38・11B. L1342-L1344 (1999)
[Publications] K. Yokoyama et al.: "Atomically Resolved Silver Imaging on the Si(111) -(√<3 >x√<3>)-Ag Surface Using a Noncontact Atomic Force Microscope"Phys. Rev. Lett.. 83・24. 5023-5026 (1999)
[Publications] K. Yokoyama et al.: "Optical beam deflection noncontact atomic force microscope with three- dimensional beam adjustment mechanism"Rev. Sci. Instrum.. 71・1. 128-132 (2000)
[Publications] K. Yokoyama et al.: "Atomic Resolution Imaging on Si(100)2x1 and Si(100)2x1:H Surface with Noncontact Atomic Force Microscopy"Jpn. J. Appl. Phys.. 39・2A. L113-L115 (2000)
[Publications] T. Uchihashi et al.: "Identification of B-Form DNA in an Ultrahigh Vacuum by Noncontact -Mode Atomic Force Microscopy"Langmur. 16・3. 1349-1353 (2000)
[Publications] S. Morita et al.: "Defects and Its Change Imaging on Semiconductor Surfaces by Noncontact Atomic Force Microscopy and Spectroscopy"Journal of Crystal Growth. (In press).
[Publications] S. Morita et al.: "Correlation of frequency shift discontinuity to atomic positions on a Si(111)7x7 surface by noncontact atomic force microscopy"Nanotechnology. Vol.11 (In press). (2000)
[Publications] Y. Sugawara et al.: "Noncontact AFM imaging on Al-absorbed Si(111) surface with an empty orbital"Appl. Surf. Sci.. (In press). (2000)
[Publications] T. Uchihashi et al.: "High-resolution imaging of organic monolayers using noncontact AFM"Appl. Surf. Sci.. (In press). (2000)
[Publications] N. Suehira et al.: "Development of low temperature ultrahigh vacuum noncontact atomic force microscope with PZT cantilever"Appl. Surf. Sci.. (In press). (2000)
[Publications] R. Nishi et al.: "Phase change detection of attractive force gradient by using a quartz resonator in noncontact atomic force microscopy"Appl. Surf. Sci.. (In press). (2000)
[Publications] M. Ashino et al.: "Atomic-scale structure on a non-stoichimetric TiO_< 2> (110)surface studied by noncontact AFM"Appl. Surf. Sci.. (In press). (2000)
[Publications] 森田清三、菅原康弘: "AFMの現状と展開"表面科学. 20・5. 352-357 (1999)
[Publications] 菅原康弘、森田清三: "非接触原子間力顕微鏡による単一分子解析"蛋白質核酸酵素. 44・14. 2119-2123 (1999)
[Publications] 森田清三、菅原康弘: "原子間力顕微鏡による原子レベルの物性評価と計測"電気学会論文誌C. 119-C・10. 1109-1112 (1999)
[Publications] 森田清三、菅原康弘: "ナノ力学に基づいた原子分子技術(In press)"生産と技術. 52・2. (2000)
[Publications] 森田清三編著他: "走査型プローブ顕微鏡-基礎と未来予測-"丸善株式会社. 181 (2000)

1999 Fiscal Year Annual Research Report

原子間力顕微鏡の単原子観察機構に関する研究

Principal Investigator

菅原 康弘 大阪大学, 大学院・工学研究科, 助教授 (40206404)

Research Products

[Publications] S. Morita and Y. Sugawara: "Guidelines for the achievement of true atomic resolution with noncontact atomic force microscopy"Appl. Surf. Sci.. 140・3-4. 406-410 (1999)

[Publications] T. Minobe et al.: "Distance dependence of noncontact -AFM image contrast on Si(111)√<3>x√<3 >-Ag structure"Appl. Surf. Sci.. 140・3-4. 298-303 (1999)

[Publications] S. Orisaka et al.: "The atomic resolution imaging of metallic Ag(111) surface by noncontact atomic force microscope"Appl. Surf. Sci.. 140・3-4. 243-246 (1999)

[Publications] T. Uchihashi et al.: "Imaging of chemical reactivity and buckled dimers on Si(100)2x1 reconstructed surface with noncontact AFM"Appl. Sur. Sci.. 140・3-4. 304-308 (1999)

[Publications] Y. Sugawara et al.: "True atomic resolution imaging of surface structure and surface change on the GaAs(110)"Appl. Sur. Sci.. 140・3-4. 371-375 (1999)

[Publications] M. Tomitori and T. Arai: "Tip cleaning and sharpening processes for noncontact atomic force microscope in ultrahigh vacuum"Appl. Sur. Sci.. 140・3. 432-438 (1999)

[Publications] Y. Sugawara et al.: "Non-contact AFM Images Measured on Si(111)√<3 >x√<3 >-Ag and Ag(111) Surface"Surface and Interface Analysis. 27・5-6. 456-461 (1999)

[Publications] T. Uchihashi et al.: "Self-Assembled Monolayer of Adenine Base on Graphite Studied by Noncontact Atomic Force Microscopy"Phys. Rev. B. 60・11. 8309-8313 (1999)

[Publications] S. Morita et al.: "Missing Ag Atom on Si(111)√<3 >x√<3>-Ag Surface Observed Noncontact Atomic Force Microscopy"Jpn. J. Appl. Phys.. 38・11B. L1342-L1344 (1999)

[Publications] K. Yokoyama et al.: "Atomically Resolved Silver Imaging on the Si(111) -(√<3 >x√<3>)-Ag Surface Using a Noncontact Atomic Force Microscope"Phys. Rev. Lett.. 83・24. 5023-5026 (1999)

[Publications] K. Yokoyama et al.: "Optical beam deflection noncontact atomic force microscope with three- dimensional beam adjustment mechanism"Rev. Sci. Instrum.. 71・1. 128-132 (2000)

[Publications] K. Yokoyama et al.: "Atomic Resolution Imaging on Si(100)2x1 and Si(100)2x1:H Surface with Noncontact Atomic Force Microscopy"Jpn. J. Appl. Phys.. 39・2A. L113-L115 (2000)

[Publications] T. Uchihashi et al.: "Identification of B-Form DNA in an Ultrahigh Vacuum by Noncontact -Mode Atomic Force Microscopy"Langmur. 16・3. 1349-1353 (2000)

[Publications] S. Morita et al.: "Defects and Its Change Imaging on Semiconductor Surfaces by Noncontact Atomic Force Microscopy and Spectroscopy"Journal of Crystal Growth. (In press).

[Publications] S. Morita et al.: "Correlation of frequency shift discontinuity to atomic positions on a Si(111)7x7 surface by noncontact atomic force microscopy"Nanotechnology. Vol.11 (In press). (2000)

[Publications] Y. Sugawara et al.: "Noncontact AFM imaging on Al-absorbed Si(111) surface with an empty orbital"Appl. Surf. Sci.. (In press). (2000)

[Publications] T. Uchihashi et al.: "High-resolution imaging of organic monolayers using noncontact AFM"Appl. Surf. Sci.. (In press). (2000)

[Publications] N. Suehira et al.: "Development of low temperature ultrahigh vacuum noncontact atomic force microscope with PZT cantilever"Appl. Surf. Sci.. (In press). (2000)

[Publications] R. Nishi et al.: "Phase change detection of attractive force gradient by using a quartz resonator in noncontact atomic force microscopy"Appl. Surf. Sci.. (In press). (2000)

[Publications] M. Ashino et al.: "Atomic-scale structure on a non-stoichimetric TiO_< 2> (110)surface studied by noncontact AFM"Appl. Surf. Sci.. (In press). (2000)

[Publications] 森田清三、菅原康弘: "AFMの現状と展開"表面科学. 20・5. 352-357 (1999)

[Publications] 菅原康弘、森田清三: "非接触原子間力顕微鏡による単一分子解析"蛋白質 核酸 酵素. 44・14. 2119-2123 (1999)

[Publications] 森田清三、菅原康弘: "原子間力顕微鏡による原子レベルの物性評価と計測"電気学会論文誌C. 119-C・10. 1109-1112 (1999)

[Publications] 森田清三、菅原康弘: "ナノ力学に基づいた原子分子技術(In press)"生産と技術. 52・2. (2000)

[Publications] 森田清三編著他: "走査型プローブ顕微鏡-基礎と未来予測-"丸善株式会社. 181 (2000)

菅原康弘大阪大学, 大学院・工学研究科, 助教授 (40206404)

[Publications] 菅原康弘、森田清三: "非接触原子間力顕微鏡による単一分子解析"蛋白質核酸酵素. 44・14. 2119-2123 (1999)