1999 Fiscal Year Annual Research Report

素電荷を原子機能観察可能な静電気力顕微鏡の開発

Research Project

Project/Area Number	11554013
Research Category	Grant-in-Aid for Scientific Research (B)
Research Institution	Osaka University
Principal Investigator	菅原康弘大阪大学, 大学院・工学研究科, 助教授 (40206404)
Keywords	原子間力顕微鏡 / 原子間力 / 清浄表面 / 単原子観察 / 半導体探針 / 引力 / 化学結合 / 物理結合
Research Abstract	本研究では、『表面の電荷を素電荷レベルで安定に原子分解能観察できる静電気力顕微鏡を開発すること』を目的とした。特に、本年度は、現有の静電気力顕微鏡の超高感度化し、同時に、静電気力と原子間力とを完全分離する回路を設計・製作した。また、清浄で先鋭な導電性探針を実現した。具体的な成果は、下記のようになっている。 1)現有の静電気力顕微鏡の超高感度化微弱な静電気力を高感度に測定するためには、探針の振動振幅を安定に保持しながら、探針の共振周波数の変化を高感度に検出する必要がある。そこで、超安定な振動振幅と超高感度な周波数検出を実現した。 2)静電気力と原子間力の完全分離回路の設計・製作試料表面の結晶構造と帯電電荷の分布とを分離するため、現在は、交流変調法を用いて、表面に働く原子間力と帯電電荷による静電気力とを分離しているが、さらに時分割法を併用することにより、原子間力と静電気力とを完全分離できるようにした。 3)先鋭で清浄な探針の実現静電気力を原子分解能で安定に観察するためには、原子レベルで先鋭で清浄な探針を使用することが極めて重要である。そこで、現有の静電気力顕微鏡に探針の清浄度と先鋭度を評価する装置を用いて、清浄で先鋭な探針を実現した。

Research Products

(25 results)

All Other

All Publications (25 results)

[Publications] S.Morita and Y.Sugawara: "Guidelines for the achievement of true atomic resolution with noncontact atomic force microscopy"Appl.Surf.Sci.. 140・-4. 406-410 (1999)
[Publications] T.Minobe et al.: "Distance dependence of noncontact -AFM image contrast on Si(111)√<3>x√<3>-Ag structure"Appl.Surf.Sci.. 140・3-4. 298-303 (1999)
[Publications] S.Orisaka et al.: "The atomic resolution imaging of metallic Ag(111) surface by noncontact atomic force microscope"Appl.Surf.Sci.. 140・3-4. 243-246 (1999)
[Publications] Y.Uchihashi et al.: "Imaging of chemical reactivity and buckled dimers on Si(100)2x1 reconstructed surface with noncontact AFM"Apll.Sur.Sci.. 140・3-4. 304-308 (1999)
[Publications] Y.Sugawara et al.: "True atomic resolution imaging of surface structure and surface charge on the GaAs(110)"Appl.Sur.Sci.. 140・3-4. 371-375 (1999)
[Publications] M.Tomitori and T.Arai: "Tip cleaning and sharpening processes for noncontact atomic force microscope in ultrahigh vacuum"Appl.Sur.Sci.. 140・3-4. 432-438 (1999)
[Publications] Y.Sugawara et al.: "Non-contact AFM Images Measured on Si(111) √<3>x√<3>-Ag and Ag(111) Surfaces"Surface and Interface Analysis. 27・5-6. 456-461 (1999)
[Publications] T.Uchihashi et al.: "Self-Assembled Monolayer of Adenine Base on Graphite Studied by Noncontact Atomic Force Microscopy"Phys.Rev.B. 60・11. 8309-8313 (1999)
[Publications] S.Morita et al.: "Missing Ag Atom on Si(111) √<3>x√<3>-Ag Surface Observed Noncontact Atomic Force Microscopy"Jpn.J.Appl.Phys.. 38・11B. L1342-L1344 (1999)
[Publications] K.Yokoyama et al.: "Atomically Resolved Silver Imaging on Si(111) -(√<3>x√<3>)-Ag Surface Using a Noncontact Atomic Force Microscope"Phys.Rev.Lett.. 83・24. 5023-5026 (1999)
[Publications] K.Yokoyama et al.: "Optical beam deflection noncontact atomic force microscope with three-dimensional beam adjustment mechanism"REV.Sci.Instrum.. 71・1. 128-132 (2000)
[Publications] K.Yokoyama et al.: "Atomic Resolution Imaging on Si(100)2x1 and Si(100)2x1:H Surfaces with Noncontact Atomic Force Microscopy"Jpn.J.Appl.Phys.. 39・2A. L113-L115 (2000)
[Publications] T.Uchihashi et al.: "Identification of B-Form DNA in an Ultrahigh Vacuum by Noncontact-Mode Atomic Force Microscopy"Langmuir. 16・3. 1349-1353 (2000)
[Publications] S.Morita et al.: "Defects and Its Charge Imaging on Semiconductor Surfaces by Noncontact Atomic Force Microscopy and Spectroscopy"Journal of Crystal Growth. (In press). (2000)
[Publications] S.Morita et al.: "Correlation of frequency shift discontinuity to atomic position on a Si(111)7x7 surface by noncontact atomic force microscopy"Nanotechnology. Vol.11(In press). (2000)
[Publications] Y.Sugawara et al.: "Noncontact AFM imaging on AL-adsorbed Si(111) surface with an empty orbital"Appl.Surf.Sci.. (In press). (2000)
[Publications] T.Uchihashi et al.: "High-resolution imaging of organic monolayers using noncontact AFM"Appl.Surf.Sci.. (In press). (2000)
[Publications] N.Suehira et al.: "Development of low temperature ultrahigh vacuum noncontact atomic force microscopy with PZT cantilever"Appl.Surf.Sci.. (In press). (2000)
[Publications] R.Nishi et al.: "Phase change detection of attractive force gradient by using a quartz resonator in noncontact atomic force microscopy"Appl.Surf.Sci.. (In press). (2000)
[Publications] M.Ashino et al.: "Atomic-scale structure on a non-stoichiometric TiO_2(110) surface studied by noncontact AFM"Appl.Surf.Sci.. (In press). (2000)
[Publications] 森田清三、菅原康弘: "AFMの現状と展開"表面科学. 20・5. 352-357 (1999)
[Publications] 菅原康弘、森田清三: "非接触原子間力による単一分子解析"蛋白質核酸酵素. 44・14. 2119-2123 (1999)
[Publications] 森田清三、菅原康弘: "原子間力顕微鏡による原子レベルの物性評価と計測"電気学会論文誌C. 119-C・10. 1109-1112 (1999)
[Publications] 森田清三、菅原康弘: "ナノカ学に基づいた原子分子技術"生産と技術. 52・2(In press). (2000)
[Publications] 森田清三編著他: "走査型プローブ顕微鏡-基礎と未来予測-"丸善株式会社. 181 (2000)

1999 Fiscal Year Annual Research Report

素電荷を原子機能観察可能な静電気力顕微鏡の開発

Principal Investigator

菅原 康弘 大阪大学, 大学院・工学研究科, 助教授 (40206404)

Research Products

[Publications] S.Morita and Y.Sugawara: "Guidelines for the achievement of true atomic resolution with noncontact atomic force microscopy"Appl.Surf.Sci.. 140・-4. 406-410 (1999)

[Publications] T.Minobe et al.: "Distance dependence of noncontact -AFM image contrast on Si(111)√<3>x√<3>-Ag structure"Appl.Surf.Sci.. 140・3-4. 298-303 (1999)

[Publications] S.Orisaka et al.: "The atomic resolution imaging of metallic Ag(111) surface by noncontact atomic force microscope"Appl.Surf.Sci.. 140・3-4. 243-246 (1999)

[Publications] Y.Uchihashi et al.: "Imaging of chemical reactivity and buckled dimers on Si(100)2x1 reconstructed surface with noncontact AFM"Apll.Sur.Sci.. 140・3-4. 304-308 (1999)

[Publications] Y.Sugawara et al.: "True atomic resolution imaging of surface structure and surface charge on the GaAs(110)"Appl.Sur.Sci.. 140・3-4. 371-375 (1999)

[Publications] M.Tomitori and T.Arai: "Tip cleaning and sharpening processes for noncontact atomic force microscope in ultrahigh vacuum"Appl.Sur.Sci.. 140・3-4. 432-438 (1999)

[Publications] Y.Sugawara et al.: "Non-contact AFM Images Measured on Si(111) √<3>x√<3>-Ag and Ag(111) Surfaces"Surface and Interface Analysis. 27・5-6. 456-461 (1999)

[Publications] T.Uchihashi et al.: "Self-Assembled Monolayer of Adenine Base on Graphite Studied by Noncontact Atomic Force Microscopy"Phys.Rev.B. 60・11. 8309-8313 (1999)

[Publications] S.Morita et al.: "Missing Ag Atom on Si(111) √<3>x√<3>-Ag Surface Observed Noncontact Atomic Force Microscopy"Jpn.J.Appl.Phys.. 38・11B. L1342-L1344 (1999)

[Publications] K.Yokoyama et al.: "Atomically Resolved Silver Imaging on Si(111) -(√<3>x√<3>)-Ag Surface Using a Noncontact Atomic Force Microscope"Phys.Rev.Lett.. 83・24. 5023-5026 (1999)

[Publications] K.Yokoyama et al.: "Optical beam deflection noncontact atomic force microscope with three-dimensional beam adjustment mechanism"REV.Sci.Instrum.. 71・1. 128-132 (2000)

[Publications] K.Yokoyama et al.: "Atomic Resolution Imaging on Si(100)2x1 and Si(100)2x1:H Surfaces with Noncontact Atomic Force Microscopy"Jpn.J.Appl.Phys.. 39・2A. L113-L115 (2000)

[Publications] T.Uchihashi et al.: "Identification of B-Form DNA in an Ultrahigh Vacuum by Noncontact-Mode Atomic Force Microscopy"Langmuir. 16・3. 1349-1353 (2000)

[Publications] S.Morita et al.: "Defects and Its Charge Imaging on Semiconductor Surfaces by Noncontact Atomic Force Microscopy and Spectroscopy"Journal of Crystal Growth. (In press). (2000)

[Publications] S.Morita et al.: "Correlation of frequency shift discontinuity to atomic position on a Si(111)7x7 surface by noncontact atomic force microscopy"Nanotechnology. Vol.11(In press). (2000)

[Publications] Y.Sugawara et al.: "Noncontact AFM imaging on AL-adsorbed Si(111) surface with an empty orbital"Appl.Surf.Sci.. (In press). (2000)

[Publications] T.Uchihashi et al.: "High-resolution imaging of organic monolayers using noncontact AFM"Appl.Surf.Sci.. (In press). (2000)

[Publications] N.Suehira et al.: "Development of low temperature ultrahigh vacuum noncontact atomic force microscopy with PZT cantilever"Appl.Surf.Sci.. (In press). (2000)

[Publications] R.Nishi et al.: "Phase change detection of attractive force gradient by using a quartz resonator in noncontact atomic force microscopy"Appl.Surf.Sci.. (In press). (2000)

[Publications] M.Ashino et al.: "Atomic-scale structure on a non-stoichiometric TiO_2(110) surface studied by noncontact AFM"Appl.Surf.Sci.. (In press). (2000)

[Publications] 森田清三、菅原康弘: "AFMの現状と展開"表面科学. 20・5. 352-357 (1999)

[Publications] 菅原康弘、森田清三: "非接触原子間力による単一分子解析"蛋白質 核酸 酵素. 44・14. 2119-2123 (1999)

[Publications] 森田清三、菅原康弘: "原子間力顕微鏡による原子レベルの物性評価と計測"電気学会論文誌C. 119-C・10. 1109-1112 (1999)

[Publications] 森田清三、菅原康弘: "ナノカ学に基づいた原子分子技術"生産と技術. 52・2(In press). (2000)

[Publications] 森田清三編著他: "走査型プローブ顕微鏡-基礎と未来予測-"丸善株式会社. 181 (2000)

菅原康弘大阪大学, 大学院・工学研究科, 助教授 (40206404)

[Publications] 菅原康弘、森田清三: "非接触原子間力による単一分子解析"蛋白質核酸酵素. 44・14. 2119-2123 (1999)