2000 Fiscal Year Final Research Report Summary
Development of a Microscopic 3-D Shape Measuring System Using Novel Liquid-Crystal Devices
| Project/Area Number |
11555012
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| Research Category |
Grant-in-Aid for Scientific Research (B).
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
Applied optics/Quantum optical engineering
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| Research Institution | The University of Electro-Communications |
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Principal Investigator |
TAKEDA Mitsuo The University of Electro-Communications, Faculty of Electro-Communications, Professor, 電気通信学部, 教授 (00114926)
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| Co-Investigator(Kenkyū-buntansha) |
KUROKAWA Takashi The Tokyo University of Agriculture and Technology, Faculty of Technology, Professor, 工学部, 教授 (40302913)
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| Project Period (FY) |
1999 – 2000
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| Keywords | Spectral Interferometry / Interferometric Microscope / 3-D Shape Measurement / Optical Metrology / Wavelength Scan / Liquid Crystal Device |
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| Research Abstract |
The purpose of this research project is to develop a new scheme of spectral interferometric microscopy that is free from mechanical moving components and can perform full-field 3-D shape measurement of microscopic objects with complex structures and height discontinuities exceeding the wavelength of light. The main accomplishments are summarized in the following :
1. Design and Numerical Evaluation of Liquid-Crystal Fabry-Perot Interferometers (LC-FPIs)
LC-FPIs with an extended tunable range of 40nm in the near IR region (which is suitable for spectral interferometry in combination with a SLD) were designed, and their improved performances were predicted by numerical simulations.
2. Fabrication of LC-FPIs and Proposal of Their Tandem Use
LC-FPIs were fabricated and their tandem use in spectral interferometry was proposed for effective improvement of the overall finesse value.
3. Design and Construction of Spectral Interferometric Microscope
A spectral interferometric microscope based on the combined use of an LC-FPI and a SLD (super luminescent diode) was designed and constructed.
4. Development of Softwares for System Control and Data Acquisition
Dedicated computer codes were developed for the wavelength tuning control of the LC-FPI that runs in synchronism to the fast image acquisition of the spectral interferograms.
5. Experimental Demonstration and Evaluation of the Performance of the Spectral Interference Microscope
Sub-micron height resolution of the developed spectral interference microscope was demonstrated using a 3-D micro structure with 1μm and 11μm height steps fabricated on a silicon wafer.
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Research Products
(14 results)
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[Publications] D.S.Mehta, M.Sugai, H.Hinosugi, S.Saito, M.Takeda, T.Kurokawa, H.Takahashi, M.Ando, M.Shishido, and Y.Yoshizawa: "Spectral interferometric technique for 3-D shape measurement of microscopic objects with improved resolution, speed of measurement and signal processing"CLEO Pacific Rim 2001, Technical Digest (Makuhari, Japan). Accepted for Publication. (2001)
Description
「研究成果報告書概要(欧文)」より
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[Publications] D.S.Mehta, M.Sugai, H.Hinosugi, S.Saito, M.Takefa, T.Kurokawa, H.Takahashi, M.Ando, M.Shishido, and Y.Yoshizawa: "Three-dimensional shape measurement and tomographic imaging of discontinuous objects using spectral interferometric technique with improved resolution"Fringe 2001, Proceedings of the 4th International Workshop on Automatic Processing of Fringe Patterns (Bremen, Germany). Accepted for Publication. (2001)
Description
「研究成果報告書概要(欧文)」より
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