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2000 Fiscal Year Final Research Report Summary

Trial Manufacture and Research of Micromanipulators for Multi Input-Output Optical Switches

Research Project

Project/Area Number 11555050
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section展開研究
Research Field 設計工学・機械要素・トライボロジー
Research InstitutionTokyo Institute of Technology

Principal Investigator

KAMIYA Daiki  Tokyo Institute of Technology, Precision and Intelligence Laboratory, Research Associate, 精密工学研究所, 助手 (60282860)

Co-Investigator(Kenkyū-buntansha) OHIRA Fumikazu  Kagawa University, Department of Intelligent Mechanical System Engineering, Professor, 工学部, 教授 (80325315)
HORIE Mikio  Tokyo Institute of Technology, Precision and Intelligence Laboratory, Professer, 精密工学研究所, 教授 (00126327)
Project Period (FY) 1999 – 2000
KeywordsMicromachine / Micromechanism / Electrostatic Suction Actuator / Micro Elastic hinge / Bending stiffness / Large Angular Displacement / Micromachining / Multi Inputs-Outputs Optical Switch
Research Abstract

Studies on optical switches have been researched and developed for optical information networks for a highly developed information technology society. In reality, however, a manipulator cannot apply for multi input and output due to a rather small output displacement at mirror parts inside the manipulator. Therefore, in order to reduce the output errors of micromechanisms, our study has suggested the use of new micro-hinges with a rigidity that has been made suitable enough to decrease the differences between the hinge end locus and the circular locus. Based on this, we have conducted theoretical analyses, while at the same time creating micro-hinge models using a semiconductor minute processing technique for our experiments. Afterwards, we will discuss and study the effectiveness of the use of the suggested microhinges, through comparisons with conventional shaped micro-hinges. The results clarified that the suggested hinge models could reduce errors with the circular locus. This ulti … More mately confirms the effectiveness of our newly reinforced micro-hinge. Next, in order to develop optical switches capable of switching multi input and output, we suggested an electrostatic driving-type 2-DOF micro-manipulator that was composed of many beams as well as a micro mirror that is capable of large angular output displacement. After having studied shapes and sizes of micro-manipulators capable of large angular displacement based on theoretical analysis, we also discovered that the suggested micro-manipulator can have a large angular displacement. Moreover, our study suggested the manufacturing process using a minute manufacturing process and then confirmed the adequacy of the suggested electrostatic driving-type micro-manipulator after having manufactured and studied a micro-manipulator model. In the results, we obtained an electrostatic driving-type micro-manipulator that is capable of large angular output displacement by low applied voltage. The manipulator is driven by the method of suction between the beam supporting a mirror and the fixed plate with a insulating membrane on it. From the theoretical analyses, the manipulator output the 32degrees angular displacement with an applied voltage of 95 volts. Less

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] 堀江三喜男,鳥居信之介,神谷大揮: "マイクロメカニズムのための剛性を変化させたマイクロヒンジの変位特性"日本機械学会論文集C編,. (投稿中).

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 鳥居信之介,神谷大揮,堀江三喜男: "マイクロメカニズムのための剛性を変化させたマイクロヒンジの変位特性"日本機械学会年2000年度次大会講演論文集. II[00-1]. 315-316 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 神津岳人,神谷大揮,堀江三喜男: "マルチ入出力光スイッチ用大角変位2自由度マイクロミラー"日本機械学会関東支部第7期総会講演会 講演論文集. No.010-1. 149-150 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 神谷大揮,神津岳人,堀江三喜男: "マルチ入出力光スイッチ用マイクロマニピュレータの変位解析"日本機械学会機素潤滑設計部門第1回講演会講演論文集. (発表予定). (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Mikio HORIE and Daiki KAMIYA: "A Pantograph Mechanism with Large-deflective Hinges for Miniature Surface Mount Systems"Book of Abstracts (Thirteenth CISM-IFToMM Symposium on the Theory and Practice of Robots and Manipulators). 10 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Mikio Horie,Daiki Kamiya,Masahiro Urata and Kozo Ikegam: "New Miniature Pantograph Mechanisms with Large-Deflective Hinges for Micro-Bonding by Adhesives"Proceedings of International Symposium on Electronic Materials and Packaging (EMAP 2000). 167-174 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Horie, S.Torii and D.Kamiya: "Displacemet Characteristics of Micro Hinges changed Flexural Rigidity for Micromechanisms [in Japanese]"JSME International Journal. under contribution.

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Torii, D.Kamiya and M.Horie: "Displacemet Characteristics of Micro Hinges changed Flexural Rigidity for Micromechanisms [in Japanese]"Proceeding of 2000 JSME Annual Meeting. Vol.II, No.00-1. 315-315 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Gozu, D.Kamiya and M.Horie: "Large Angular Displacement 2-DOF Mirror for Multi Optical Switches. [in Japanese]"Proceedings of the Japan Society of Mechanical Eingineers. No.010-1. 149-150 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.Kamiya, T.Gozu and M.Horie: "A Displacement Analysis of Micromanipulator for Multi Optical Switches [in Japanese]"Proceedings of the Japan Society of Mechanical Eingineers. to be published. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Mikio HORIE and Daiki KAMIYA: "A Pantograph Mechanism with Large-deflective Hinges for Miniature Surface Mount Systems"Book of Abstracts (Thirteenth CISMIFToMM Symposium on the Theory and Practice of Robots and Manipulators). 10 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Mikio Horie, Daiki Kamiya, Masahiro Urata and Kozo Ikegami: "New Miniature Pantograph Mechanisms with Large-Deflective Hinges for Micro-Bonding by Adhesives"Proceedings of International Symposium on Electronic Materials and Packaging (EMAP2000). 167-174 (2000)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2002-03-26  

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