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2001 Fiscal Year Final Research Report Summary

Development of Head Flying Height Measuring Apparatus Using Image Processing

Research Project

Project/Area Number 11555052
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 設計工学・機械要素・トライボロジー
Research InstitutionNagoya University

Principal Investigator

MITSUYA Yasunaga  Nagoya University, Micro System Engineering, Professor, 工学研究科, 教授 (10200065)

Co-Investigator(Kenkyū-buntansha) YANAGISAWA Masahiro  NEC Corporation Functional Device Research Laboratories, Senior Principal Researcher, 主管研究員
NOMURA Yoshihiko  Mie University, Engineering, Professor, 工学部, 教授 (00228371)
OHSHIMA Yasuji  Nagoya University, Micro System Engineering, Assistant Professor, 工学研究科, 助手 (60293651)
Project Period (FY) 1999 – 2000
KeywordsMagnetic disk / Flying head / Flying height / Laser interferometry / Interference fringe / Image measurement / Michelson Interferometry / PSD
Research Abstract

A novel head-disk spacing measurement system based on Michelson laser interferometry has been developed. This system was comprised of four kinds of sub-systems: interference optical instrument, high-vision (200 million pixels) image capturing device, fringe following mechanism/circuits and disk rotation mechanism. Image processing for high-vision image operable on the Window system and a multiple fringe following technique permitted high reproducibility and high accuracy. The fringe following is the way in which interference light beam is divided into two beams: one is for CCD and the other is for PSD (Position Sensitive Detector). The output of PSD is applied to a PZT actuator to derive a reference mirror such that the fringe on CCD maintains a fixed position. Using this system, dynamic behavior of a contact-type head slider while starting was successfully clarified. Next, the fringe following technique was dualized in order to fix two fringe parameters, the position and inclination of the fringe, or the position and interval between the fringes. In this technique, the reference mirror and PZT actuator were separated into two sets, one is for parallel displacement and the other is for pitching inclination. This enabled us to fix the fringe image more accurately and thus followed to accurate ridgeline extraction after multiple image processings. Finally, the multiple fringe following technique were extended to an online measurement of two-dimensional attitudes of the target plane utilizing the fact that the output signals from PSDs were reflection of the motion of the target plane.

  • Research Products

    (6 results)

All Other

All Publications (6 results)

  • [Publications] Y.Mitsuya, K.Nakayama, S.Okugawa, E.Nakai: "Head-to-Disk Spacing Measurements in Contact Regime Using Michelson Laser Interferometry Enhanced by Active Sensing and Image Processing"Proc. of the Symposium on Interface Technology Towards 100 Gbit/in2 ASME 1999. TRIB-Vol.9. 67-73 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 三矢 保永, 岡 宏幸, 大島 康司: "ガラス透過型マイケルソン顕微干渉法を用いたヘッドディスク浮上すきまの較正不要な測定法"日本機械学会2001年度全国大会講演論文集. Vol.IV. 249-250 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 三矢 保永, 岡 宏幸, 大島 康司: "透過形マイケルソン干渉を利用したヘッド浮上すきまの較正不要な測定法"日本機械学会論文集. 67-662 C. 3182-3190 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y. Mitsuya, K. Nakayama, S. Okugawa, E. Nakai: "Head-to-Disk Spacing Measurements in Contact Regime Using Michelson Laser Interferometry Enhanced by Active Sensing and Image Processing"Proc. of the Symposium on Interface Technology Towards 100 Gbit/in2 ASME 1999. TRIB-Vol.9. 67-73 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Mitsuya, H. Oka, Y. Ohshima: "A Novel Head-Disk Spacing Measurement Without Necessity of Calibration By Using Michelson Laser Interferometry Through Glass Disk"Proc. of Jpn. Soc. Mech. Eng.(2001-8). Vol.IV. 249-250 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Mitsuya, H. Oka, Y. Ohshima: "A Novel Head-Disk Spacing Measurement without Necessity of Calibration by Using Michelson Laser Interferometry through Glass Disk"Transaction of the Japan Society of Mechanical Engineers. 67-662C. 3182-3190 (2001)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2003-09-17  

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