2001 Fiscal Year Final Research Report Summary
Development of Ceramics Than Films Preparation Equipment by Electrostatic Spray Deposition Method and Composition and Morphology Control of Prepared Thin Films
| Project/Area Number |
11555206
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
反応・分離工学
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| Research Institution | Kanazawa University (2001)
Tokyo Institute of Technology (1999-2000) |
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Principal Investigator |
OTANI Yoshio Kanazawa University, Professor, 工学部, 教授 (10152175)
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| Co-Investigator(Kenkyū-buntansha) |
SUZUKI Masaaki Tokyo Institute of Technology, Professor, 大学院・理工学研究科, 教授 (70114874)
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| Project Period (FY) |
1999 – 2001
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| Keywords | LiC_oO_2 / Ceramics / Thin Films / Electrostatic Spray Deposition / Hydroxyapatite |
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| Research Abstract |
The deposition of thin LiCoO_2 and hydroxyapatite layers was studied using the electrostatic spray deposition (EDS) technique. Lithium and cobalt acetate were dissolved in a mixture of 50 mol% ethanol and 50 mol% butyl carbitol for the preparation of LiCoC_2 thin films. Also, Calcium nitrate and phosphoric acid were dissolved in a mixture of 10 vol% ethanol and 90vol% butyl carbitol for the preparation of hydroxyapatite thin films. The effect of process condition such as deposition temperature, concentration of feed solution and deposition time on the surface morphology and microstructure of thin films were examined with scanning electron microscopy (SEM). For the deposited LiCoO_2 layers, various surface structure, such as reticular, fractal or fold one, was fabricated at various process conditions, while all the samples have a fractal structure for the preparation of hydroxyapatite layers. The deposited thin-film LiCoC_2 and hydroxyapatite, were amorphous or nanocrystalline at the used deposition temperature(200℃). Subsequently, the samples were heated at 700℃ for 1h or 900℃ for 2h, respectively and were studied using X-ray diffractometry(XRD). The crystal structure of samples transformed to the desired phase.
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