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2000 Fiscal Year Final Research Report Summary

Synthesis of B-C-N Superhard Thin Films by Ion-Beam-Assisted Deposition

Research Project

Project/Area Number 11650124
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionNagoya University

Principal Investigator

MATSUMURO Akihito  Nagoya University, Engineering, Associate Professor, 工学研究科, 助教授 (80173889)

Co-Investigator(Kenkyū-buntansha) NAKAMOTO Takeshi  Nagoya University, Engineering, Associate Professor, 工学研究科, 助教授 (30198262)
MORI Toshihiko  Nagoya University, Engineering, Associate Professor, 工学研究科, 助教授 (90023340)
Project Period (FY) 1999 – 2000
KeywordsB-C-N Thin Films / Superhard Coating / Ion-Beam-Assited Method / Hardness / Microstructure / Cubic Phase
Research Abstract

B-C-N films have been synthesized by an ion-beam-assisted deposition technique, in which boron and carbon were evaporated by electron beam and a mixed nitrogen and argon ion beam was simultaneously irradiated onto silicon (100) substrates. The ratio of argon ions to nitrogen ions was varied by the flow rate ratio of Ar and N_2 gases fed into the ion source. In this experiment, the influence of the ratio on the mechanical properties and the microstructure were investigated.
(1) Nano-indentation studies show the maximum hardness up to 23 GPa at the gas ratio of 25-50 %.
(2) The films prepared under the appropriate conditions indicated low friction coefficients of 0.04-0.08 against a sapphire ball and excellent wear resistance.
(3) The existence of a cubic B-C-N like phase in the film, which has been predicted as one of new hard materials, was revealed by various micro-structural analyses.
(4) It was concluded that the excellent mechanical properties prepared at the optimum gas ratio could be attributed to the appearance of the new cubic like phase.

  • Research Products

    (6 results)

All Other

All Publications (6 results)

  • [Publications] 加藤芳正: "イオンビーム支援蒸着法によるB-C-N系薄膜の創成"日本金属学会講演概要(1999年秋期大会). 38. 276-276 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 松室昭仁: "イオンビーム支援蒸着法によるB-C-N系薄膜の創成と機械的性質の評価"2000年日本精密工学会秋季大会学術講演会講演論文集. 489-489 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Matsumuro: "Synthesis of B-C-N Thin Films by Ion-Beam-Assisted Deposition and Their Mechanical Properties"Proc.MRS 2000 Fall Meeting. (in press). (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Matsumuro, Y.Kato, H.Ohta and M.Uetani: "Formation of B-C-N Thin Films by Ion-Beam-Assisted Deposition."Abstracts Jpn.Inst.Met.. 276-276 (in Japanese). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Matsumuro, Y.Kato and H.Ohta: "Synthesis of Boron-Carbon-Nitride Thin Films by Ion-Beam-Assisted Deposition Technique and Estimation of Their Mechanical Properties"Proc. 2000 Fall Meeting Jpn.Soc.Prec.Eng.. 48-489 (in Japanese). (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Matsumuro, Y.Kato and H.Ohta: "Synthesis of B-C-N Thin Films by Ion-Beam-Assisted Deposition and Their Mechanical Properties"Proc. MRS 2000 Fall Meeting. (in press).

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2002-03-26  

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