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2001 Fiscal Year Final Research Report Summary

Quantum Interference Devices Controlled by Metals Buried in Semiconductors

Research Project

Project/Area Number 11694136
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 電子デバイス・機器工学
Research InstitutionTOKYO INSTITUTE OF TECHNOLOGY

Principal Investigator

FURUYA Kazuhito  Graduate School of Science and Engineering, Tokyo Institute of Technology, Professor, 大学院・理工学研究科, 教授 (40092572)

Co-Investigator(Kenkyū-buntansha) MACHIDA Nobuya  Graduate School of Science and Engineering, Tokyo Institute of Technology, Research Assistant, 大学院・理工学研究科, 助手 (70313335)
ISHIHARA Michihiko  Tokyo Metropolitan University, Graduate School of Engineering, Associate Professor, 工学研究科, 助教授 (80251635)
MIYAMOTO Yasuyuki  Graduate School of Science and Engineering, Tokyo Institute of Technology, Associate Professor, 大学院・理工学研究科, 助教授 (40209953)
Project Period (FY) 1999 – 2001
KeywordsTungsten Wire / Electron Wave / Biprism / Coherent Emitter / Lateral Coherence / OMVPE Embedding Tungsten / Attractive Potential / Double Barrier Resonant Emitter
Research Abstract

Analysis of Electron Wave Biprism Controlled by Buried Metal
Analysis of electron wave biprism proposed by a collaboration between Japan and Sweden has been proceeded. Especially, we have theoretically examined influences of coherence of electron source on contrast of interference pattern and it has been revealed that a highly coherent source emitting electron beam with a transverse energy spread of sub meV has been required to realize interference by the biprism. To realize such highly coherent electron beam, a coherent emitter, where a energy difference between a resonant level of a quantum well and a Fermi level of a source has been precisely controlled by a back gate, has been proposed and theoretically proved its operation principle.
Improvement of Isolation Technique on Formation of Periodic Fine Electrodes with Period of a Few Tens nm
For observations of electron wave phenomenon in the biprism by periodic fine electrodes with period of a few tens nm, it has been shown that isolatio … More n between electrode has been very important on small interference current measurement, and the required isolation has been achieved by conduction band discontinuity of heterojunction and dry etching.
Demonstration of Attractive Potential Formation by Buried Metal Hot Electron Transistor with Metal Wire Gate
We have proposed a novel transistor where hot electrons are generated and travel through undoped semiconductor region by adopting a combination of double-barrier resonant-tunneling structure and metal wire, and we has attempted to demonstrate attractive potential formation required in operation of the biprism by our proposed transistor. After fundamental studies of crystal growth for resonant-tunneling structure and burying metal in semiconductors, we have fabricated the device by re-growth to bury Tungsten in GaAs using OMVPE. By analysis of measured data, for the first time, a formation of attractive potential around the buried metal wife has been demonstrated. Furthermore, to reduce emitter-gate leakage current, we have fabricated transistors on InP semi-insulating substrate and wired by free-standing wire. From measured I-V characteristics, it has been shown that buried metal wire gate has enabled to produce attractive potential and leakage current has been reduced by examining value of peak current at negative differential resistance. Therefore,we have been able to show the potential of our device. Less

  • Research Products

    (60 results)

All Other

All Publications (60 results)

  • [Publications] M.Suhara: "Gated Tunneling structure with buried tungsuten grating adjacent to semiconductor heterostructures"Jpn. J. Appl. Phys.. 38. 3466 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Machida: "Analysis of electron incoherent effects in solid-state biprism devices"Physica B. 272. 82 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Machida: "Analysis of Phase-Breaking Effects in Triple-Barrier Resonant-Tunneling Diodes"Jpn. J. Appl. Phys.. 38. 4017 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Miyamoto: "Barrier thickness dependence of peak current density in GaInAs/AlAs/InP resonant tunneling diodes by MOVPE"Solid State Electronics. 43. 1395 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] L.-E.Wernersson: "Lateral Confinement in a Resonant Tunneling Transistor with a Buried Metallic Gate"Appl. Phys. Lett.. 74. 311 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] B.Gustafson: "Lateral Current Confinement in Selectively Grown Resonant Tunneling Transistor with an Embedded Gate"Physica E. 7. 819 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Arai: "Toward nano-metal buried structure in InP-20 nm wire and InP buried growth of tungsten"Physica E. 7. 896 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] B.Hansson: "Simulation of Interference Patterns in Solid-State Biprism Devices"Solid-State Electron.. 44. 1275 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Nagase: "Peak Width Analysis of Current-Voltage Characteristics of Triple-Barrier Resonant Tunneling Diodes"Jpn. J. Appl. Phys.. 39. 3314 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Arai: "GaAs buried growth over tungsten stripe using TEG and TMG"J. Crystal Growth. 221. 212 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Miyamoto: "Fabrication and transport properties of 50-nm-wide Au/Cr/GaInAs electrode for electron wave interference device"Applied Surface Science. 159-160. 179 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Machida: "Numerical Simulation of Hot Electron Interference in a Solid State Biprism : Conditions for Interference Observation"J. Appl. Phys.. 88. 2885 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Machida: "Coherent hot-electron emitter"Jpn. J. Appl. Phys.. 40. 64 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Nagase: "Phase-braking effect appearing in the current-voltage characteristics of double-barrier resonant-tunneling diodes -Theoretical fitting over four orders of magnitude-"Jpn. J. Appl. Phys.. 40. 3018 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Machida: "Numerical simulation of hot electron interference in solid-state biprism"Springer Proceedings in Physics. 87. 1723 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Nagase: "Current peak charatcteristics of triple-barrier resonant-tunneling diodes with and without chase breaking"Jpn. J. Appl. Phys.. 40. 6753 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] B.Gustafson: "Lateral Quantum Confinement in Selectively Grown Resonant Tunneling Transistor with an Embedded Gate"The 9th International Conference on Modulated Semiconductor Structures (MSS9). G09. 128 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Arai: "Toward nano-metal buried in InP structure -20 nm wide tungsten wires and InP buried growth of Tungsten"The 9th International Conference on Modulated Semiconductor Structures (MSS9). D21. 69 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Miyamoto: "80 nm periodical ohmic contacts toward Young's double slit experiment using a semiconductor"1st International Workshop on Quantum Nonplaner Nanostructures & Nanoelectronics. Tu-P31. (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Nagase: "Phase Breaking Effect Appearing in I-V Characteristics of Double-Barrier Resonant-Tunneling Diodes -Theoretical Fitting Over Four Orders of Magnitude-"The 2000 International Conference on Solid State Devices and Materials (SSDM2000). D-6-5. 346 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Furuya: "Phase Breaking Effects Seen in I-V Curves of Resonant Tunneling Diodes"Progress in Electromagnetic Research Symposium (PIERS2001). 3P6b-4. 401 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Suhara: "半導体ヘテロ接合に隣接した埋め込み微細金属による共鳴トンネル電流の制御"電子情報通信学会技術研究報告. ED99-9. 53 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Machida: "電子波干渉観測のための固体パイプリズム設計"電子情報通信学会技術研究報告. ED99-301. 79 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Nagase: "二重障壁共鳴トンネルダイオードを用いた位相コヒーレンス長の評価"電子情報通信学会技術研究報告. ED2000-108. 55 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Suhara: "Study of the Regrown Semiconductor Interface Including Patterned Metal Using Resonant Tunneling Structures Fabricated in the Overgrowth Process"7th International Conference on the Formation of Semiconductor Interfaces (ICFSI7). OFr02. 179 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Arai: "GaAs buried growth over tungsten stripes using TEG and TMG"11th International Conference on Metalorganic Vapor Phase Epitaxy (ICMOVPE XI). Tu-A3. 40 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Machida: "Numerical simulation of hot electron interference in solid-state biprism"25th International Conference on the Physics of Semiconductors (ICPS25). M261. 964 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] L.-E.Wernersson: "Attractive Potential around a Buried Metallic Gate in a Schottky Collector Hot Electron Transistor"28th International Symposium on Compound Semiconductors 2001 (ISCS2001). MoP-33. 45 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Machida: "Analysis of electron coherence effects in solid-state biprism devices"The 11th International Conference on Nonequilibrium Carrier Dynamics in Semiconductors (HCIS-. MoP-21. 57 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Miyamoto: "Anomalous Current in 50 nm width Au/Cr/GaInAs Electrode for electron wave interference device"Third International Symposium on Control of Semiconductor Interface. A5-6. (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N. Machida and K. Furuya: "Analysis of Phase-Breaking Effects in Triple-Barrier Resonant-Tunneling Diodes"Jpn. J. Appl. Phys.. Vol.38, Part1, No.7A. 4017-4020 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Miyamoto, H.Tobita, K.Oshima, and K.Furuya: "Barrier thickness dependence of peak current density in GaInAs/AlAs/InP resonant tunneling diodes by MOVPE"Solid State Electronics. vol.43. 1395-1398 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Machida and K. Furuya: "Analysis of Electron Incoherence Effects in Solid-State Biprism Devices"Physica B. Vol. 272. 82-84 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] L. E. Wernersson, M. Suhara, N.Carlsson, K. Furuya, B. Gustafson, A. Litwin, L. Samuelson and W. Seifert: "Lateral Confinement in a Resonant Tunneling Transistor with a Buried Metallic Gate"Appl. Phys. Lett.. vol.74, no.2. 311-313 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Suhara, L, E. Wernersson, B. Gustafson, N.Carlsson, W. Seifert, A. Gustafson, J. O. Malm, A. Litwin, L. Samuelson and K. Furuya: "Gated Tunneling Structures with Buried Tungsten Grating Adjacent to Semiconductor Heterostructures"Jpn. J. Appl. Phys.. Vol.38, No.6A. 3466-3469 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] B. Gustafson, M. Sahara, K. Furuya, L. Samuelson and W. Seifert: "Lateral Current Confinement in Selectively Grown Resonant Tunneling Transistor with an Embedded Gate"Physica E. Vol.7, No.3-4. 819-822 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Arai, H. Tobita, Y. Harada, M. Suhara, Y. Miyamoto, and K. Furuya: "Toward nano-metal buried structure in InP - 20 nm wire and InP buried growth of tungsten"Physica E. Vol.7. No.3-4. 896-901 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] B. Hansson, N. Machida, K. Furuya, L.-E. Wernersson and L. Samuelson: "Simulation of Interference Patterns in Solid-State Biprism Devices"Solid-State Electron. Vol.44, No.7. 1275-1280 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Nagase, M. Suhara, Y. Miyamoto and K. Furuya: "Peak Width Analysis of Current-Voltage Characteristics of Triple-Barrier Resonant Tunneling Diodes"Jpn. J. Appl. Phys.. vol.39, no.6A. 3314-3318 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Arai, H. Tobita, Y. Miyamoto and K. Furuya: "GaAs buried growth over tungsten stripe using TEG and TMG"J. Crystal Growth. vol. 221. 212-219 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Miyamoto, A. Kokubo, H. Oguchi, M. Kurahashi, and K. Furuya: "Fabrication and transport properties of 50-nm-wide Au/Cr/GaInAs electrode for electron wave interference device"Applied Surface Science. vol.159-160, no.1-4. 179-185 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Machida and K. Furuya: "Numerical Simulation of Hot Electron Interference in a Solid State Biprism: Conditions for Interference Observation"J. Appl. Phys.. Vol. 88, No. 5. 2885-2891 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Machida and K. Furuya: "Coherent hot-electron emitter"Japanese Journal of Applied Physics. vol. 40. 64 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Nagase, K. Furuya, and N. Machida: "Phase-braking effect appearing in the current-voltage characteristics of double-barrier resonant-tunneling diodes Theoretical fitting over four orders of magnitude"Jpn. J. Appl. Phys.. vol. 40. 3018 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Machida, H. Tamura, and K. Furuya: "Numerical simulation of hot electron interference in solid-state biprism"Springer Proceedings in Physics. vol. 87. 1723 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Nagase, K. Furuya, N. Machida, and M. Kurahashi: "Current peak characteristics of triple-barrier resonant-tunneling diodes with and without phase breaking"Jpn. J. Appl. Phys.. vol. 40. 6753 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] B. Gustafson, M. Suhara, K. Furuya, L. Samuelson, W. Seifert, and L. E. Wernersson: "Lateral Quantum Confinement in Selectively Grown Resonant Tunneling Transistor with an Embedded Gate"The 9th International Conference on Modulated Semiconductor Structures. D-21. (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Suhara, L. -E. Wernersson, B. Gustafson, W. Seifert, L. Samuelson, and K. Furuya: "Study of the Regrown Semiconductor Interface Including Patterned Metal Using Resonant Tunneling Structures Fabricated in the Overgrowth Process"7th International Conference on the Formation of Semiconductor Interfaces (ICFSI7). 0Fr02. (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Suhara, L. E. Wernersson, B. Gustafson, W. Seifert, L. Samuelson and K. Furuya: "Control of resonant tunneling current due to buried fine metal adjacent to semiconductor heterostructures"Technical Report of IEICE. ED99-9. 53-58 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Machida and K. Furuya: "Device Design of Solid-State Biprism for Observation of Electron Interference"Technical Report of IEICE. ED99-301, SDM99-194. 79-86 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Arai, H. Tobita, Y. Miyamoto and K. Furuya: "GaAs buried growth over tungsten stripes using TEG and TMG"11th International Conference on Metalorganic Vapor Phase Epitaxy (ICMOVPE XI). Tu-A3. (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Machida, H. Tamura and K. Furuya: "Numerical Simulation of Hot Electron Interference in Solid-State Biprism"25th International Conference on the Physics of Semiconductors (ICPS25). M261. 964 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] L.-E. Wernersson, R. Yamamoto, E. Lind, I. Pietzonka, W. Seifert, Y. Miyamoto, K. Furuya, and L. Samuelson: "Attractive Potential around a Buried Metallic Gate in a Schottky Collector Hot Electron Transistor"28th International Symposium on Compound Semiconductors 200 1 (ISCS2001). MoP-33. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Nagase, K. Furuya and N. Machida: "Evaluation of Phase Coherent Length Using Double-Barrier Resonant Tunneling Diodes"Technical Report of IEICE. ED2000-108. 55-59 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Machida and K. Furuya: "Analysis of electron coherence effects in solid-state biprism devices"The 11th International Conference on Nonequilibrium Carrier Dynamics in Semiconductors (HCIS-11). MoP-21. 57 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Miyamoto, A. Kokubo, H. Oguchi, M. Kurahashi, and K. Furuya: "Anomalous Current in 50 nm width Au/Cr/GaInAs Electrode for electron wave interference device"Third International Symposium on Control of Semiconductor Interface. A5-6. (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Miyamoto, H. Oguchi, H. Nakamura, Y. Ninomiya, and K. Furuya: "80 nm periodical ohmic contacts toward Young's double slit experiment using a semiconductor"1st International Workshop on Quantum Nonplaner Nanostructures & Nanoelectronics. Tu-P31. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Miyamoto, R. Yamamoto, H. Tobita and K. Furuya: "Very shallow n-GaAs ohmic contact with 10nm thick GaInAs layer"19th Electronic Materials Symposium. B2. (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Nagase, K. Furuya and N. Machida: "Phase Breaking Effect Appearing in I-V Characteristics of Double-Barrier Resonant-Tunneling Diodes Theoretical Fitting Over Four Orders of Magnitude"The 2000 International Conference on Solid State Devices and Materials (SSDM2000). D-6-5. 346-347 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Furuya, M. Nagase and N. Machida: "Phase Breaking Effects Seen in I-V Curves of Resonant Tunneling Diodes"Progress in Electromagnetic Research Symposium (PIERS2001). 3P6b-4. 401 (2001)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2003-09-17  

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