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2003 Fiscal Year Final Research Report Summary

Surface electronic structure analysis of high current electron source materials and extreme operation analysis of FEAs

Research Project

Project/Area Number 12135201
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionMuroran Institute of Technology

Principal Investigator

ADACHI H.  Muroran Institute Technology, Dept. of Electrical, Electronic Eng., Professor, 工学部, 教授 (80005446)

Co-Investigator(Kenkyū-buntansha) NAKANE H.  Muroran Institute of Technology, Dept. of Electrical, Electronic Eng., Professor, 工学部, 助教授 (20237332)
Project Period (FY) 2000 – 2003
KeywordsFEA / Field electron emission / Field emission microscope / Micro emitter / Cathode / Electron beam / Current stability / Work function
Research Abstract

Electron emission from a field emitter array (FEA), especially Spindt type FEA was magnified by making use of an emission microscope, and uniformity and stability of the emission current were examined. Percentage of the active microtips was usually 40-50%, maximum value was 90%.
The stability of the emission current was less than 10%, and the emission current fluctuation should be caused by the ion bombarding. The emission current and its uniformity was improved with the introduction of low pressure gas. Hydrogen and nitrogen gas showed the cleaning effect. Methane and ethylene gas showed the increasing of the emission current. The n-type Si FEA was also observed by emission microscope. The Si FEA showed large fluctuation than the Spindt type FEA. W (100) needle was covered with Yttrium oxide to improve the emission current density. Such YO/W (100) emitter showed low work function value (2.1eV). Mo (100) needle covered with Zirconium oxide also showed low work function (2.0eV).

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] H.Nakane, H.Adachi: "Study on local stability of field emitter arrays by using an emission microscope"Journal of Vacuum Science and Technology. Vol.B18(2). 1003-1005 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Saitho, H.Nakane, H.Adachi: "Field electron emission from W covered with In"Journal of Vacuum Science and Technology. vol.B18(2). 1093-1096 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Nakane, H.Adachi: "Emission stability of FEA microtips"Journal of SID. Vol.8. 237-240 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kawata, H.Nakane, H.Adachi: "Study on the atomic configuration for low-energy electron diffraction analysis on ZrO/W(100)."Journal of Vacuum Science and Technology. Vol.B19(1). 55-56 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Miyamoto, H.Nakane, H.Adachi: "Emission Stability of a FEA Observed by an Emission Microscope"Journal of Vacuum Science and Technology. Vol.B21(1). 436-439 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Nakane, J.P.Dupin, Vu Thien Binh: "Emission Characteristics of Ultra-thin Layer Solid-state Emitters, Temperature and Thickness"Journal of Vacuum Science and Technology. Vol.B21・no.4. 1616-1617 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Nakane, H.Adachi: "Study on local stability of field emitter arrays by using an emission microscope"Journal of Vacuum Science and Technology. Vol.B18(2). 1003-1005 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Saitho, H.Nakane, H.Adachi: "Field electron emission from W covered with In"Journal of Vacuum Science and Technology. vol.B18(2). 1093-1096 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Nakane, H.Adachi: "Emission stability of FEA microtips"Journal of SID. Vol.8. 237-240 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Kawata, H.Nakane, H.Adachi: "Study on the atomic configuration for low-energy electron diffraction analysis on ZrO/W (100)"Journal of Vacuum Science and Technology. Vol.B19(1). 55-56 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Miyamoto, H.Nakane, H.Adachi: "Emission Stability of a FEA Observed by an Emission Microscope"Journal of Vacuum Science and Technology. Vol.B21 no.1. 536-439 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Nakane, J.P.Dupin, Vu Thien Binh: "Emission Characteristics of Ultra-thin Layer Solid-state Emitters, Temperature and Thickness"Journal of Vacuum Science and Technology. Vol.B21, no.4. 1616-1617 (2003)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2005-04-19  

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