2002 Fiscal Year Final Research Report Summary
Research on Three Dimensional Micro Structure Fabrication System by Moving X-ray Mask Lithography
| Project/Area Number |
12355008
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
機械工作・生産工学
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| Research Institution | Ritsumeikan University |
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Principal Investigator |
SUGIYAMA Susumu Ritsumeikan Univ., Fac. Science and Engineering, Professor, 理工学部, 教授 (20278493)
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| Co-Investigator(Kenkyū-buntansha) |
YAMAMOTO Kouji Minolta Co. Ltd., Dept. of Measuremen Deputy Director, 計測機器事業企画部, 次長
TABATA Osamu Ritsumeikan Univ., Fac. Science and Engineering, Professor, 理工学部, 教授 (20288624)
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| Project Period (FY) |
2000 – 2002
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| Keywords | X-Ray / Microfabrication / Three Dimensional / Moving Mask / Micro Lens / LIGA / PTFE |
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| Research Abstract |
The purpose of this research is the construction of a microfabrication system and processing technology that realizes the 3-dimensional microstructure with free shaped wall that was not able to realize with the conventional technology. The research project has two objectives ; (1) Construction of the new moving mask X-rays processing system which can produce the 3-dimensional microstructure, and (2) Establishment of the technology to processes the microstructure with submicron order accuracy which has free shaped wall.
The 3-dimensional micro structure processing system with the exposure area of 50 mm x 50 mm and substrate heating capability up to 200 ℃ under the vacuum of 10-^<-4> Pa were developed. Also the control device and program to realize the complicated stage movement by simultaneous control of the multi-stage was developed.
The validity of the system was confirmed by fabricating several microstructures such as a micro lens array with diameter of 100 μm and focal length of 200 μm and a PTFE plate with projection array of 50 μm height and 50 μm pitch.
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