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2003 Fiscal Year Final Research Report Summary

Fabrication of noble nano-reaction field by synchrotron radiation etching and characterization by STM

Research Project

Project/Area Number 12440202
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 機能・物性・材料
Research InstitutionOkazaki National Research Institutes

Principal Investigator

URISU Tsuneo  Okazaki National Research Institutes, Institute for Molecular Science, Department of Vacuum UV Photo-science, Professor, 分子科学研究所, 教授 (50249950)

Co-Investigator(Kenkyū-buntansha) NONOGAKI Youichi  Okazaki National Research Institutes, Institute for Molecular Science, Department of Vacuum UV Photo-science, Research associate, 分子科学研究所, 助手 (40300719)
Project Period (FY) 2000 – 2003
KeywordsSynchrotron radiation etching / nano-reaction field / self-assembling reaction / bio-sensor / channel protein / undulator / STM / lipid bilayer
Research Abstract

The research was carried out considering the following items as the main targets; (a) measurements of the excitation energy dependence of the synchrotron radiation (SR) etching, (b) development of nano-structure fabrication techniques using SR-etching, and (c) development of the suitable application of these techniques. The following results have been obtained.
(1)Construction of undulator beam line as the special experimental station for in-situ STM observations.:
During the remodeling of IMS-UVSOR machine for improving to the higher generation, the STM-undulator beam line BL-7U and the ultra high vacuum STM apparatous were designed and constructed. The developments were completed at 2003 and opened to the experimental use. It was found that Si-H bonds are cut by the SR irradiation. This is interesting since the Si-H on Si(100) surface is known to be inert for the SR irradiations.
(2)Proposal of new idea of bio-nano-reaction field and new science and technology field of "molecular commun … More ication".
We proposed a new supported membrane bio-sensor, which are made by integrating the lipid bilayer containing channel proteins on the Si surface with nano-structure, and several elementary process techniques necessary to fabricate this device ; nano-structure fabrication technique of Si surface, area selective surface chemical modification techniques such as -CH_3 and -COOH modifications, deposition technique of lipid bilayer using vesicle fusion, etc. have been almost completely developed. This device is considered as the receiver of the signal-carrying molecules in the life information transmission system. Based on this idea, we proposed a new science and technology field "molecular communication".
(3)Development and application of the technique of infrared reflection absorption spectroscopy using a buried metal layer substrate (BML-IRRASS),
We applied the BML-IRRAS to the investigation of oxidation reactions of Si(100) surface using H atoms and H_2O, and found new vibration bands of 3 pairs of doublet, which are assigned to several SiH_2 species with different level of Si back bond oxidations. Based on these results, important unique characteristics of BML-IRRAS ; high sensitivity and high resolution in the wide frequency region including the finger print regions, and selection rule for the transition moment perpendicular to the surface, were clearly certified for the first time. We also found that the BML-IRRAS is especially useful for the observation of bio-materials immobilized on the solid surfaces. Less

  • Research Products

    (47 results)

All Other

All Publications (47 results)

  • [Publications] Hideyuki Noda: "Initial statge of hydrogen etching of Si surfaces investigated by infrared reflection absorption spectroscopy"Jpn.J.Appl.Phys.. 39. 6985-6989 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Noritaka Takezoe: "Design and construction of UVSOR-BL4A2 beam line for nano-structure processing"Nucl.Instrum.Methods. A467. 1279-1281 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Yoichi Nonogaki: "STM observation of surface nanostructures on Si(111) formed after synchrotron radiation stimulated cleaning"Transactions MRS Japan. 26. 751-754 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Yoichi Nonogaki: "Nanostructure formation on Si(111) surface assisted by synchrotron radiation illumination -Characterization by scanning tunneling microscopy-"J.Electron Spectroscopy. 119. 241-246 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Tsuneo Urisu: "Device and material processes using synchrotron radiation - from micron to nanometers-"J.Jpn.Soci.Synchrotorn Rad.Res. 14. 112-115 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Zhi-Hong Wang: "IR linewidth broadening at nearly ideal H-termination region on Si(100) surfaces"Surf.Sci.. 502-503. 86-90 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Sam Dylan More: "Influence of substrate roughness on the formation of aliphatic self-assembled monolayers(SAMs) on silicon(100)"Jpn.J.Appl.Phys.. 41. 4390-4394 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Zhi-Hong Wang: "Hydrogen diffusion and chemical reactivity with water on nearly ideally H-terminated Si(100) surface"Jpn.J.Appl.Phys.. 41. 4390-4394 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Sam Dylan More: "Hydrophobic/hydrophilic interactions of cytochrome C with functionalized self-assembled monolayers on silicon"Surf.Sci.. 532-535. 993-998 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Zhi-Hong Wang: "Three pairs of doublet bands assigned to SiH_2 scissoring modes observed in H_2O-induced oxidation of Si(100) surfaces"Phys.Rev.. B69. 045309-045315 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Changshun Wang: "Patterning SiO_2 thin films using synchrotron radiation stimulated etching with a Co contact mask"J.Vac.Sci.Technol.. B21. 818-822 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Shusaku Yamamura: "Fabrication of CoSi_2-Buried-Metal-Layer Si Substrates for Infrared Reflection Absorption Spectroscopy by Wafer-Bonding"Jpn.J.Appl.Phys.. 42. 3942-3945 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Changshun Wang: "Synchrotron radiation stimulated etching SiO_2 thin films with a Co contact mask for the area-selective deposition of self-assenbled monolayer"Jpn.J.Appl.Phys.. 42. 4016-4019 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Kanbara: "N-channel field effect transistors with fullerene thin films and their application to a logic gate circuit"Chem.Phys.Lett. 379. 223-229 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Morio Takizawa: "Deposition of DPPC monolayers by Langmuir-Blodget method on SiO_2 surfaces covered by octadecyltrichlorosilane self-assembled monolayer islands"Chem.Phys.Lett.. 385. 220-224 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Hidekazu Watanabe: "Theoretical analysis of the oxygen insertion process in the oxidation reactions of H_2O+H/Si(100) and 2H+H_2O/Si(110) : a molecular orbital calculation and an analysis of tunneling reaction"Chem.Phys.Lett.. 383. 523-527 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Satoshi Fujiki: "Scanning tunneling microscopy of Dy@C82 and Dy@C60 adsorbed on Si(111)-(7x7) surfaces"Phys.Rev.. B69. 045415-1-045415-5 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Yan-Jun Li: "Deposition of 10-undecenoic acid self-assembled layers on H-Si(111) surfaces studied with AFM and FT-IR"Appl.Surf.Sci.. (in printing). (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Ryugo Tero: "Deposition of phospholipid layers on SiO_2 surface modified by hydrophobic SAM islands"Appl.Surf.Sci.. (in printing). (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Yong-Hoon Kim: "Characterization of dipalmitoylphosphatidylcholine (DPPC)/cholesterol Langmuir-Blodgett monolayers by AFM and FT-IR"Jpn.J.Appl.Phys.. (in printing). (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Md.Mashiur Rahman: "Shrinking of spin-on-glass films induced by synchrotron radiation and its application to three-dimensional microfabrications"Jpn.J.Appl.Phys.. (in printing). (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Yan Jun Li: "Structure and Deposition Mechanism of 10-Undecenoic Acid Self-assembled Layers on H-Si(111) Surfaces Studied by AFM and FT-IR"Jpn.J.Appl.Phys.. 43(in printing). (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Tsuneo Urisu: "Photochemical and Photoetching Process, Chemical Application of Synchrotron Radiation"Wood Scientific. (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Tsuneo Urisu: "Synchrotron Radiation Etching and Application to Nanostructure Fabrications, Encyclopedia of Nanoscience and Nanotechnology"American Scientific Publishes. (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 宇理須 恒雄: "4・4ナノエッチングプロセス、ナノテクノロジーハンドブック"(株)オーム社. 929(6) (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Hideyuki Noda: "Initial statge of hydrogen etching of Si surfaces investigated by infrared reflection absorption spectroscopy"Jpn.J.Appl.Phys.. 39. 6985-6989 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Noritaka Takezoe: "Design and construction of UVSOR-BL4A2 beam line for nano-structure processing"Nucl.Instrum.Methods.. A467 Part2. 1279-1281 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Yoichi Nonogaki: "STM observation of surface nanostructures on Si(111) formed after synchrotron radiation stimulated cleaning"Transactions MRS Japan. 26. 751-754 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Yoichi Nonogaki: "Nanostructure formation on Si(111) surface assisted by synchrotron radiation illumination -Characterization by scanning tunneling microscopy-"J.Electron Spectroscopy. 119. 241-246 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Tsuneo Urisu: "Device and material processes using synchrotron radiation -from micron to nanometers-"J.Jpn.Soci.Synchrotorn Rad.Res.. 14. 112-115 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Zhi-Hong Wang: "IR linewidth broadening at nearly ideal H-termination region on Si(100) surfaces"Surf.Sci.. 502-503. 86-90 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Sam Dylan More: "Influence of substrate roughness on the formation of aliphatic self assembled monolayers(SAMs) on silicon (100)"Jpn.J.Appl.Phys.. 41. 4390-4394 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Zhi-Hong Wang: "Hydrogen diffusion and chemical reactivity with water on nearly ideally H-terminated Si(100) surface"Jpn.J.Appl.Phys.. 41. 4275-4278 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Sam Dylan More: "Hydrophobic/hydrophilic interactions of cytochrome C with functionalized self-assembled monolayers on silicon"Surf.Sci.. 532-535. 993-998 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Zhi-Hong Wang: "Three pairs of doublet bands assigned to SiH_2 scissoring modes observed in H_2O-induced oxidation of Si(100) surfaces"Phys.Rev.. B69. 045309-045315 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Changshun Wang: "Patterning SiO_2 thin films using synchrotron radiation stimulated etching with a Co contact mask"J.Vac.Sci.Technol.. B21. 818-822 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Shusaku Yamamura: "Fabrication of CoSi_2-Buried-Metal-Layer Si Substrates for Infrared Reflection Absorption Spectroscopy by Wafer-Bonding"Jpn J.Appl.Phys.. 42. 3942-3945 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Changshun Wang: "Synchrotron radiation stimulated etching SiO_2 thin films with a Co contact mask for the area selective deposition of self-assenbled monolayer"Jpn.J.Appl.Phys.. 42. 4016-4019 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Kanbara: "N-channel field effect transistors with fullerene thin films and their application to a logic gate circuit"Chem.Phys.Lett.. 379. 223-229 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Morio Takizawa: "Deposition of DPPC monolayers by Langmuir-Blodget method on SiO_2 surfaces covered by octadecyltrichlorosilane self-assembled monolayer islands"Chem.Phys.Lett.. 385. 220-224 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hidekazu Watanabe: "Theoretical analysis of the oxygen insertion process in the oxidation reactions of H_2O+H/Si(100) and 2H+H_2O/Si(100): a molecular orbital calculation and an analysis of tunneling reaction"Chem.Phys.Lett.. 383. 523-527 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Satoshi Fujiki: "Scanning tunneling microscopy of Dy@C82 and Dy@C60 adsorbed on Si(111)-(7x7) surfaces"Phys Rev.. B69. 045415-1-045415-5 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Yan-Jun Li: "Deposition of 10-undecenoic acid self-assembled layers on H-Si (111) surfaces studied with AFM and FT-IR"Appl.Surf.Sci.. (in printing). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Ryugo Tero: "Deposition of phospholipid layers on SiO_2 surface modified by hydrophobic SAM islands"Appl.Surf.Sci.. (in printing). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Yong-Hoop Kim: "Characterization of dipalmitoylphosphatidylcholine (DPPC)/cholesterol Langmuir-Blodgett monolayers by AFM and FT-JR"Jpn.J.Appl.Phys. (in printing). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Md.Mashiur Rahman: "Shrinking of spin-on-glass films induced by synchrotron radiation and its application to three-dimensional microfabrications"Jpn.J.Appl.Phys.. (in printing). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Yan Jun Li: "Structure and Deposition Mechanism of 10-Undecenoic Acid Self-assembled Layers on H-Si (111) Surfaces Studied by AFM and FT-IR"Jpn.J.Appl.Phys.. 43(in printing). (2004)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2005-04-19  

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