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2002 Fiscal Year Final Research Report Summary

Synthesis of Berried Nanocrystals by Heavy-Ion Implantation and Stabilized High-Efficient Luminescence

Research Project

Project/Area Number 12480138
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Nuclear engineering
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

IMANISHI Nobutsugu  GRADUATE SCHOOL OF ENGINEERING, PROFESSOR, 工学研究科, 教授 (10027138)

Co-Investigator(Kenkyū-buntansha) IMAI Makoto  GRADUATE SCHOOL OF ENGINEERING, INSTRUCT., 工学研究科, 助手 (60263117)
ITOH Akio  GRADUATE SCHOOL OF ENGINEERING, PROFESSOR, 工学研究科, 教授 (90243055)
Project Period (FY) 2000 – 2002
KeywordsNANOCRYSTAL / LUMINESCENCE / HEAVY-ION IMPLANTATION / HYDROGEN BEHAVIOR / QUANTUM DOT / ANNEALING / SiO_2 / Si
Research Abstract

The purpose of this work is to produce nanocrystals of 1-10 nm in diameter by heavy ion implantation and subsequent thermal annealing, to reveal the basic synthesis mechanism, to establish luminescence-related quantum states of crystalline interface and to activate the nanocrystals as quantum dots with stable luminescence property. These will contribute to the application as photo devises and to understanding of radiation-induced fundamental processes in solids
1. Fabrication of Ge nanocrystals in SiO_2 was studied for a procedure of implantation and subsequent thermal annealing. A comparison between experimental and simulated changes of the depth profile of implanted Ge atoms led to effective values of solubility and diffusion coefficient of Ge atoms in the SiO_2 matrix. The mean diameter of precipitates calculated using those values are 10-15 nm, depending on ion dose and annealing duration.
2. Hydrogen plays very important role in luminescence of Si nanocrystals embedded in SiO_2. Si-containing SiO_2 samples produced by ion implantation followed by thermal annealing are very complex systems having high density defects, locally concentrated Si segregates and Si nanocrystals. Hydrogen was implanted into the system which was controlled by applying an appropriate annealing procedure, and the trapping-detrapping process of hydrogen has been revealed by applying the elastic recoil detection technique. It was found for hydrogen to successfully terminate Si dangling bonds on the interface of Si nanocrystal/SiO_2 under a controlled implantation and thermal annealing condition.
3. Broad photoluminescence was observed around wave lengths of 720 nm and 550 nm, respectively, for Si and Ge implanted samples of SiO_2 followed by thermal annealing in N_2 atmosphere.

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] 池田 光晴: "Behavior of Hydrogen Implanted into Si-Implanted SiO_2"Nuclear Instruments and Methods B. (In press).

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 池田 光晴: "Behavior of Hydrogen in SiO_2 with Si Nanocrystals Synthesized by Ion Beam"Proc. of the 18^<th> Japan-Russia Int. Symp. on Interaction of Fast Charged Particles with Solids. Kyoto Japan, 2002. 172-176 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 近藤 諭: "Thermal Behavior of Hydrogen Implanted into Si-Implanted SiO_2"Annual Report of Quantum Science and Engineering Center, Kyoto University. 4. 10-12 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 光末竜太: "Simulation on the Growth of Ge Nanocrystal in SiO_2Layer"Annual Report of Quantum Science and Engineering Center, Kyoto University. 3. 7-10 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 中川勝晴: "Effect of Implanted Silicon on Hydrogen Diffusion in SiO_2"Annual Report of Quantum Science and Engineering Center, Kyoto University. 3. 4-6 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 今西 信嗣: "Effects of Implanted Silicon on Hydrogen Behavior in Aluminum and Nickel"Nuclear Instruments and Methods B. 161-163. 401-405 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] IKEDA MITSUHARU: "Behavior of Hydrogen Implanted into Si-Implanted SiO_2"Nuclear Instruments and Methods B. in press.

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] IKEDA MITSUHARU: "Behavior of Hydrogen in SiO_2 with Si Nanocrystals Synthesized by Ion Beam"Proc. of the 18^<th> Japan-Russia Int. Symp. on Interaction of Fast Charged Particles with Solids. Kyoto Japan. 2002. 172-176 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] KONDO SATOSHI: "Thermal Behavior of Hydrogen Implanted into Si-Implanted SiO_2"Annual Report of Quantum Science and Engineering Center. 4. 10-12 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] MITSUSUE RYUTA: "Simulation on the Growth of Ge Nanocrystal in SiO_2 Layer"Annual Report of Quantum Science and Engineering Center. 3. 7-10 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] NAKAGAWA MASAHARU: "Effect of Implanted Silicon on Hydrogen Diffusion in SiO_2"Annual Report of Quantum Science and Engineering Center. 3. 4-6 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] IMANISH NOBUTSUGU: "Effects of Implanted Silicon on Hydrogen Behavior in Aluminum and Nickel"Nuclear Instruments and Methods B. 161-163. 401-405 (2000)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2004-04-14  

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