2002 Fiscal Year Final Research Report Summary
Development and application of surface analysis apparatus using electron-ion coincidence spectroscopy
| Project/Area Number |
12555007
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
表面界面物性
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| Research Institution | High Energy Accelerator Research Organization |
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Principal Investigator |
MASE Kazuhiko High Energy Accelerator Research Organization, Institute of Materials Structure Science, Associate Professor, 物質構造科学研究所, 助教授 (40241244)
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| Project Period (FY) |
2000 – 2002
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| Keywords | Surface analysis / Synchrotron radiation / Electoron-ion coincidence spectroscopy / Auger spectroscopy / X-ray Photoelectron spectroscopy / Ion mass spectroscopy |
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| Research Abstract |
In 2000-2001 fiscal year we have developed a new electron-ion coincidence (EICO) apparatus composed of a coaxial symmetric mirror electron energy analyzer proposed by Kai Siegbahn, a compact time-of-flight ion mass spectrometer and a positioning mechanism. Auger electron photoion coincidence (AEPICO) measurements of condensed H_2O at 4α_1 ← O 1s resonance showed that time required for a certain coincidence ioin counts is reduced by one order of magnitude in comparison with the previous EICO analyzer using a CMA. With the apparatus we studied fluorination of Si(111) surfaces by XeF_2 using Si 2p - F^+ photbelectron photoion coincidence (PEPICO) and Si 2p photoelectron sjpectroscopy (PES), and found that fluorination of the top-most Si layer proceeds after the initial XeF_2 exposures, while fluorination of the second Si layer starts in 6400-9600 L. In 2002 fiscal year, we have developed a new polar-angle-resolved compact time-of-flight ion mass spectrometer (TOF-MS). The TOF-MS consists of an electric field shield, an ion drift electrode with three meshes, and micro channel plates (MCP) with three concentric anodes. Using it we developed electron - polar-angle-resolved-ion coincidence analjyzer, which offers information on kinetic energy and desorption polar angle of coincidence ions. Its performance was evaluated by measuring H^+ yield spectra and Auger electron - H^+ coincidence spectra of a condensed H_2O. We have written three review articles on EICO spectroscopy. We also reported a PEPICO study on site-specific ion desorption of CF_3CD(OH)CH_3 chemisorbed on Si(100), and a EICO study on H^+ desorption induced by shake up and shake off ionizations of O 1s of H_2O dissociatively chemisorbed op Si(100).
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Research Products
(15 results)
