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2001 Fiscal Year Final Research Report Summary

Development of TEM specimen Holder Enabling Atomic Level Observation under One Atomospheric Pressure

Research Project

Project/Area Number 12555017
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Applied physics, general
Research InstitutionOsaka University

Principal Investigator

TAKAI Yoshizo  Graduate School of Engineering, Osaka University, Professor, 大学院・工学研究科, 教授 (30236179)

Co-Investigator(Kenkyū-buntansha) FUKUSHIMA Kurio  JEOL Ltd., Researcher, 副主幹研究員
NAGATOMI Takaharu  Graduate School of Engineering, Osaka University, Assistant Prof., 工学研究科, 助手 (90314369)
KIMURA Yoshihide  Graduate School of Engineering, Osaka University, Associate Prof., 大学院・工学研究科, 助教授 (70221215)
Project Period (FY) 2000 – 2001
KeywordsTransmission Elecron Microscope / Environmental Cell / Bio Medical Sample / Sealing Film / Aberration-Free observation / Phase Electron Microscope / Spherical aberration Correction / 位相像観察
Research Abstract

An environmental cell (EC) technique is useful for the study of hydrated and catalytic specimens etc. under various environmental atmosphere by a transmission electron microscope. In the present study, we have developed a film-sealed type EC which enables atomic level observation under one atmospheric pressure. The developed EC has the passages connecting the EC and the outside of the microscope column, therefore, the gas pressure of the specimen environment can be controlled by adjusting the gas flow. In general, the EC must have some windows for electron beam passage and some sealing films covering the windows are necessary to protect the gas leakage into the microscope column. The most important component of the EC is the sealing film. The film must withstand above atmospheric pressure with maintaining properties such as high electron transmittance, amorphousness of the film and so on. In the present study, we succeeded to make a carbon film of 20 nm thick which,withstands the pressure of one atmospheric pressure or more. A buffer layer of triacetylcellulose (TAG) film of about 150 nm in thickness was sandwiched between the carbon film and the metal supporting grid, which works very effectively to realize the resistance to the gas pressure difference. An apparatus to insert the TEM specimen holder with the EC was also developed and TiO2 powder sample was successfully observed at one atmospheric air pressure. By introducing reaction gas to the sample, catalytic behavior of TiO2 might be possible to observe in atomic scale. Precise evaluation on the achieved resolution is now under examining as a function of the atmospheric pressure and the thickness of the sealing film. Plasma induced by high speed electrons incidence sometimes gave damages to the observed sample, which is under investigation based on Monte Cairo computer simulations.

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] T.Yoshida et al.: "Monte Calro simulation study of backscattered electron imaging in a chemical vapor deposition scanning electron microscope"Jpn. J. Appl. Phys.. 40. 3457-3462 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Nagatomi et al.: "Monte Carlo Modelling of X-ray Generation by Electron Impact"ECASIA '01. 1. 200-200 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Mizuhara et al.: "Quantitative Measurement of Amount of Charging in Insulator Sample under Electron Beam Irradiation"ECAIA '01. 1. 198-198 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Nagatomi et al.: "Monte Carlo Simulation of X-ray Generation iunder electron Bombardment"3rd International Symposium on Atomic Level Characterizations for New Materials and Devices '01. 1-37 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Kawasaki et al.: "Distorted surface and interface structures of catalytic gold nanoparticles observed by spherical aberration-free phase electron microscopy"J. Appl. Phys.. 79. 3509-3511 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Takai et al.: "Dynamic Observation of An Atom Size Gold Wire by Phase Electron Microscope"Phys. Rev. Lett.. 87. 106105-1-106105-4 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T. Yoshida, K. Nishikata, T. Nagatomi, Y. Kimura and Y. Takai: "Monte Carlo Simulation Study of Backscattered Electron Imaging in A Chemical Vapor Deposition Scanning Electron Microscope"Jpn. J. Appl. Phys.. 40, No.5A. 3457-3462 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Nagatomi, Y. Kimura, Y. Takai, S. Awata, T. Yurugi and K. Obori: "Monte Carlo Modeling of X-ray Generation by Electron Impact"9th European Conferene on Applications of Surface and Interface Analysis (ECASIA '01)(Avignon, France, Sep.30-Oct.5). 200-200 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Mizuhara, T. Nagatomi, Y. Kimura, Y. Takai and M. Inoue: "Quantitative Measurement of Amount of Charging in Insulator Sample under Electron Beam Irradiation"9th European Conference on Applications of Surface and Interface Analysis (ECASIA '01)(avignon, France, Sep. 30-Oct. 5). 198-198 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Nagatomi, T. Shimada, Y. Kimura, Y. Takai, S. Awata, T. Yurugi and K. Obori: "Monte Carlo Modeling of X-ray Generation under Electron Bombardment"3rd International Symposium on Atomic Level Characterization for New Material and Deveices '01 (ALC '01)(Nara, Japan, Nov.11-14). 37-37 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Kawasaki, Y. Takai and R. Shimizu: "Disorted Surface And Interface Structures of Catalytic Gold Nanoparticles Observedd by Spherical Aberration-Free Electron Microscopy"Appl. Phys. Lett.. 79, No.21. 3509-3511 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Takai, T. Kawasaki, Y. Kimura, T. Ikuta and R. Shimizu: "Dynamic Observation of An Atom Size Gold Wire by Phase Electron Microscope"Phys. Rev. Lett. 87, No.3. 106105-1-10615-4 (2001)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2003-09-17  

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