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2001 Fiscal Year Final Research Report Summary

Research and development of III-V quantum wire transistor-based logic and memory circuits operating near the quantum limit

Research Project

Project/Area Number 12555083
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Electronic materials/Electric materials
Research InstitutionHOKKAIDO UNIVERSITY

Principal Investigator

HASEGAWA Hideki  Hokkaido Univ., Grad. School of Eng., Prof., 大学院・工学研究科, 教授 (60001781)

Co-Investigator(Kenkyū-buntansha) KASAI Seiya  Hokkaido Univ., Grad. School of Eng., Asso. Prof., 大学院・工学研究科, 助教授 (30312383)
HASHIZUME Tamotsu  Hokkaido Univ., Res. Center for Integrated Quantum Electronics, Asso. Prof., 量子集積エレクトロニクス研究センター, 助教授 (80149898)
Project Period (FY) 2000 – 2001
Keywordsquantum wire transistor / III-V compound semiconductor / quantum limit / logic circuit / memory / integrated circuit / Schottky gate / selective MBE growth
Research Abstract

The purpose of this research was to study and develop novel logic and memory circuits that operate ultra-small delay-power product near the quantum limit by utilizing III-V compound semiconductor quantum wire transistors. The main results obtained are listed below :
(1) A novel single electron memory device having a metal nano-dot for charging and a Schottky in-plane gate (IPG) quantum wire transistor (QWRTr) for dot-charge detection was proposed, fabricated and its basic operation was confirmed.
(2) As single electron integrated circuits, single electron inverter circuits utilizing Schottky wrap gate (WPG) GaAs single electron transistor (SETs), including QWRTr road type inverters and complementary inverters, were designed, fabricated and characterized. Transfer gain larger than unity was obtained in the QWRTr road type inverter.
(3) A novel approach for quantum logic circuits operating with ultra-low delay-power product near the quantum limit. It is based on implementation of a binary d … More ecision diagram (BDD) logic architecture by quantum wire transistors, was proposed. BDD node devices were fabricated using GaAs etched nanowire and nano-Schottkys and their basic operations were confirmed. Fundamental logic circuits constructed by integrating the BDD devices operated correctly.
(4) Highly uniform and size-controllable InGaAs and GaAs embedded ridge quantum wire arrays were grown by selective MBE growth as basic starting structures for quantum wire transistors. Submicron-pitch high-density InGaAs quantum wire arrays were realized by an atomic hydrogen treatment and optimization of pre-growth process.
(5) For successful surface passivation of III-V QWRTrs, their surfaces were characterized by scanning tunneling spectroscopy (STS). The mechanism of anomalous STS spectra was clarified. From this analysis, it was found that surface states with continuously distribution in space and energy cause surface Fermi level pinning. Surface passivation method using ultrathin Si interface control layer was optimized and verified by contactless C-V, PL and STS. Less

  • Research Products

    (141 results)

All Other

All Publications (141 results)

  • [Publications] H.Hasegawa: "Unpinning of Fermi level in nanometer-sized Schottky contacts on GaAs and InP"Applied Surface Science. 166. 92-96 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Takahashi: "In situ UHV contactless C-V and XPS characterization of surface passivation process for InP using a partially nitrided Si interface control layer"Applied Surface Science. 166. 526-531 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Fujikura: "Formation of device-oriented InGaAs coupled quantum structures by selective MBE growth on patternedlnP substrates"Physica E. 7. 864-869 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] C.Jiang: "Vertical barrier layer formation during selective MBE growth of InGaAs ridge quantum wires on InP patterned substrates"Physica E. 7. 902-906 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hasegawa: "Advanced mesoscopic device concepts and technology"Microelectronic Engineering. 53. 29-36 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Negoro: "Scanning tunneling microscopy and spectroscopy study of ultrathin Si interface control layers grown on (001) GaAs for surface passivation"Applied Surface Science. 159/160. 292-300 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Anantathanasarn: "Surface passivation of GaAs by ultra-thin cubic GaN layer"Applied Surface Science. 159/160. 456-461 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Shiozawa: "Correlation between interface state properties and electron transport at ultrathin insulator/Si interfaces"Applied Surface Science. 159/160. 98-103 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hasegawa: "MBE growth and applications of silicon interface control layers"Thin Solid Films. 367. 58-67 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hasegawa: "Effects of gap states on scanning tunneling spectra observed on(110)-and (001)-oriented clean surfaces and ultrathin Si layer covered surfaces of GaAs prepared by molecular beam epitaxy"Journal of Vacuum Science & Technology B. 18. 2100-2108 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Iyawa: "Chemical and Electrochemical Nanofabrication Processes for Schottky In-Plane Gate GaAs Single and Coupled Quantum Wire Transistors"Jpn. J. Appl. Phys.. 39. 4651-4652 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Fujikura: "Electrochemical Formation of Uniform and Straight Nano-Pore Arrays on (001) InP Surfaces and Their Photoluminescence Characterizations"Jpn. J. Appl. Phys.. 39. 4616-4620 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Yoshida: "Ultrahigh-Vacuum Contactless Capacitance-Voltage Characterization of Hydrogen Terminated-Free Silicon Surfaces"Jpn. J. Appl. Phys.. 39. 4504-4508 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Sato: "Electrical Properties of Nanometer-Sized Schottky Contacts on n-GaAs and n-InP Formed by in Situ Electrochemical Process"Jpn. J. Appl. Phys.. 39. 4609-4615 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Yamada: "Fabrication and Characterization of Novel Oxide-Free InP Metal-Insulator-Semiconductor FETs Having an Ultra Narrow Si Surface Quantum Well"Jpn. J. Appl. Phys.. 39. 2439-2443 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Ootomo: "Nitridation of GaP (100) Surfaces by rf Nitrogen Radicals and by Electron Cyclotron Resonance Nitrogen Plasma"Jpn. J. Appl. Phys.. 39. 2407-2413 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Muranaka: "Selective MBE Growth of InGaAs Quantum Wire-Dot Coupled Structures with Controlled Double-Barrier Potential Profiles"Inst. Phys. Conf. Ser.. 166. 187-190 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kasai: "GaAs Quantum Wire Transistors and Single Electron Transistors using Schottky Wrap Gates for Quantum Integrated Circuits"Inst. Phys. Conf. Ser.. 166. 219-222 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Muranaka: "Origin of Non-Uniformity in MBE Grown Nanometer-Sized InGaAs Ridge Quantum Wires and Its Removal by Atomic Hydrogen-Assisted Cleaning"Thin Solid Films. 380. 189-191 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] B.Adamowicz: "Analysis of photoluminescence efficiency and surface recombination velocity of MBE-grown AlGaAs layers"Thin Solid Films. 367. 180-183 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] B.Adamowicz: "Computer analysis of photon-induced non-equilibrium phenomena at Si and AlGaAs surfaces"Vacuum. 57. 111-120 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] B.Adamowicz: "COMPUTER ANALYSIS OF THE FERMI LEVEL BEHAVIOR AT SiO_2/n-GaAs INTERFACES"Electron Technology. 33. 249-252 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Ootomo: "Surface passivation of AlGaN/GaN heterostructures using and ultrathin Al_2O_3 layer"Physica Status Solidi A-Applied Research. 188. 371-374 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hasegawa: "Formation and Quantum Devices Applications of III-V Compound Semiconductor Nanostructures"Journal of the Korean Physical Society. 39. S402-S409 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kasai: "GaAs-Based Single Electron Transistors and Logic Inverters Utilizing Schottky Wrap-Gate Controlled Quantum Wires and Dots"Japanese Journal of Applied Physics. 40. 2029-2032 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Sato: "Electrical Properties of Nanometer-Sized Schottky Contacts for Gate Control of III-V Single Electron Devices and Quantum Devices"Japanese Journal of Applied Physics. 40. 2021-2025 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Muranaka: "Characterization and Optimization of Atomic Hydrogen Cleaning of InP Surface for Selective MBE growth of InGaAs Quantum Structure Arrays"Japanese Journal of Applied Physics. 40. 1874-1877 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] F.Ishikawa: "Bulk and Interface Deep Levels in InGaP/GaAs Heterostructures Grown by Tertiarybutyl Phosphine-Based Gas Source Molecular Beam Epitaxy"Japanese Journal of Applied Physics. 40. 2769-2774 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Z.Jin: "In-Situ XPS Study of Etch Chemistry of Methane-Based RIBE of InP Using N_2"Japanese Journal of Applied Physics. 40. 2757-2761 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] C.Jiang: "Improvement of Growth Process to Achieve High Geometrical Uniformity in InGaAs Ridge Quantum Wires Grown by Selective MBE on Patterned InP Substrate"Japanese Journal of Applied Physics. 40. 3003-3008 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Okada: "Novel Single Electron Memory Device Using Metal Nano-Dots and Schottky In-Plane Gate Quantum Wire Transistors"Japanese Journal of Applied Physics. 40. 2797-2800 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Miczek: "Computer analysis of photoluminescence efficiency at InP surface with U-shaped surface state continuum"Vacuum. 63. 223-227 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Yoshida: "Realization of UHV-Compativle Defect-Free Hydrogen Terminated Silicon Surfaces with the Use of UHV Contactless Capacitance-Voltage Method"Applied Surface Science. 175/176. 163-168 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Sato: "Current Transport and Capacitance-Voltage Characteristics of GaAs and InP Nanometer-Sized Schottky Contacts Formed by in situ Electrochemical Process"Applied Surface Science. 175/176. 181-186 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kasai: "Conductance Gap Anomaly in Scanning Tunneling Spectra of MBE-Grown (001) Surfaces of III-V Compound Semiconductors"Applied Surface Science. 175/176. 255-259 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.-G.Xie: "Fabrication and characterization of InGaAs/InAlAs insulated gate pseudomorphic HEMTs having a silicon interface control layer"IEICE-C. E84-C10. 1335-1343 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Takahashi: "Process Characterization and Optimization for a Novel Oxide-Free Insulated Gate Structure for InP MISFETs Having Silicon Interface Control Layer"IEICE-C. E84-C10. 1344-1349 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hashizume: "Surface passivation process for GaN-based electronic devices utilizing ECR-CVD SiN_x film"IEICE-C. E84-C10. 1455-1461 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 謝永桂: "InP系高速デバイス用多層エピタキシャル構造のSi超薄膜による表面不活性化"電子情報通信学会論文誌C. J84-C. 872-882 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Yamada: "Quantum-Dot Logic Circuits Based on the Shared Binary-Decision Diagram"Japanese Journal of Applied Physics. 40. 4485-4488 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.G.Xie: "A Novel InGaAs/InAlAs Insulated Gate Pseudomorphic HEMT with a Silicon Interface Control Layer Showing High DC-and RF-Performance"IEEE Electron Device Letter. 22. 312-314 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Anantathanasarn: "Surface passivation of GaAs using an ultrathin cubic GaN interface control layer"Journal of Vacuum Science & Technology B. 19. 1589-1596 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hashizume: "Chemistry and electrical properties of surfaces of GaN and GaN/AlGaN heterostuctures"Journal of Vacuum Science & Technology B. 19. 1675-1681 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hasegawa: "Ultra high vacuum-based in situ characterization of compound semiconductor surfaces by a contactless capacitance-voltage technique"Materials Science & Engineering. B80. 147-151 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hashizume: "Surface characterization of GaN and AlGaN layers grown by MOVPE"Materials Science & Engineering. B80. 309-312 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hasegawa: "Hexagonal binary decision diagram quantum logic circuits using Schottky in-plane and wrap-gate control of GaAs and InGaAs nanowires"Physica E. 11. 149-154 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Z.Jin: "Effects of Nitrogen Addition on Methane-Based ECR Plasma Etching of GaN and Related Materials"Applied Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Oyama: "Mechanism of Current Leakage through Metal/n-GaN Interfaces"Applied Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Konishi: "In-situ XPS and Photoluminescence Characterization of GaN Surfaces Grown by MBE on MOVPE GaN Templates"Institute of Physics Conference Series. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Sato: "Selective MBE Growth of GaAs/AlGaAs Nanowires on Patterned GaAs (001) Substrates and Its Application to Hexagonal Nanowire Network Formation"Institute of Physics Conference Series. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] F.Ishikawa: "Self-consistent Computer Analysis of Cathodoluminescence In-Depth Spectra for Compound Semiconductor Heterostructures"Institute of Physics Conference Series. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kasai: "GaAs and InGaAs Single Electron Hexagonal Nanowire Circuits Based on Binary Decision Diagram Logic Architecture"Physica E. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Muranaka: "Control of Morphology and Wire Width in InGaAs Ridge Quantum Wires Grown by Atomic Hydrogen-Assisted Selective Molecular Beam Epitaxy"Physica E. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Yumoto: "Graph-Based Quantum Logic Circuits and Their Realization by Novel GaAs Multiple Quantum Wire Branch Switches Utilizing Schottky Wrap Gates"Microelectronics Engineering. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] C.Jiang: "MBE Growth Mechanism and Wire Width Control for Formation of Dense Networks of Narrow InGaAs Quantum Wires"Microelectronics Engineering. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hirano: "Electrochemical Formation of Self-Assembled InP Nanopore Arrays and Their Use as Templates for Molecular Beam Epitaxy Growth of lnGaAs Quantum Wires and Dots"Japanese Journal of Applied Physics. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Z.Fu: "Optimization of Novel Oxide-Free Insulated Gate Structure for InP Having An Ultrathin Silicon Interface Control Layer"Japanese Journal of Applied Physics. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] C.Jiang: "Realization of Submicron-Pitch Linear Arrays of Nanometer-Sized InGaAs Ridge Quantum Wires by Selective MBE Growth on Patterned InP Substrates"Japanese Journal of Applied Physics. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Yumoto: "Novel Quantum Wire Branch-Switches for Binary Decision Diagram Logic Architecture Utilizing Schottky Wrap-Gate Control of GaAs/AlGaAs Nanowires"Japanese Journal of Applied Physics. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] C.Jiang: "Structural and Optical Properties of 10 nm-Class InGaAs Ridge Quantum Wire Arrays with Sub-Micron Piitches Grown by Selective MBE on Patterned InP Substrate"Japanese Journal of Applied Physics. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Endo: "Reactive Ion Beam Etching of GaN and AlGaN/GaN for Nanostructure Fabrication Using Methane-Based Gas Mixtures"Japanese Journal of Applied Physics. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Nakano: "Strong Photoluminescence and Low Surface State Densities on Clean and Silicon Deposited(001) Surfaces of GaAs with (4x6) Reconstruction"Japanese Journal of Applied Physics. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kasai: "III-V Quantum Devices and Circuits Based on Nano-scale Schottky Gate Control of Hexagonal Quantum Wire Networks"Applied Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Ito: "Formation of High-Density Hexagonal Networks of InGaAs Ridge Quantum Wires by Atomic Hydrogen Assisted Selective Molecular Beam Epitaxy"Applied Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Yumoto: "Gate Control Characteristics in GaAs Nanometer-Scale Schottky Wrap Gate Structure"Applied Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Negoro: "Scanned-Probe Topological and Spectroscopic Study of Surface States on Clean and Si-Deposited GaAs(001)-c(4x4) surfaces"Applied Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] F.Ishikawa: "Depth Resolved Cathodluminescence Characterization of Buried InGaP/GaAs Heterointerfaces"Applied Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Anantathanasarn: "Photoluminescence and Capacitance-Voltage Characterization of GaAs Surface Passivated by an Ultrathin GaN Interface Control Layer"Applied Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Z.Fu: "Gated Photoluminescence Study of Oxide-Free InP MIS Structure Having an Ultrathin Silicon Interface Control Layer"Applied Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H. Hasegawa, T. Sato, S. Kasai: "Unpinning of Fermi level in nanometer-sized Schottky contacts on GaAs and InP"Applied Surface Science. 166. 92-96 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Takahashi, H. Hasegawa: "In situ UHV contactless C-V and XPS characterization of surface passivation process for InP using a partially nitrided Si interface control layer"Applied Surface Science. 166. 526-531 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Fujikura, T. Muranaka, H. Hasegawa: "Formation of device-oriented InGaAs coupled quantum structures by selective MBE growth on patterned InP substrates"Physica E.. 7. 864-869 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] C. Jiang, H. Fujikura, H. Hasegawa: "Vertical barrier layer formation during selective MBE growth of InGaAs ridge quantum wires on InP patterned substrates"Physica E.. 7. 902-906 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Hasegawa: "Advanced mesoscopic device concepts and technology"Microelectronic Engineering. 53. 29-36 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Negoro, H. Fujikura, H. Hasegawa: "Scanning tunneling microscopy and spectroscopy study of ultrathin Si interface control layers grown on (001) GaAs for surface passivation"Applied Surface Science. 159/160. 292-300 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Anantathanasarn, S. Ootomo, T. Hashizume, H. Hasegawa: "Surface passivation of GaAs by ultra-thin cubic GaN layer"Applied Surface Science. 159/160. 456-461 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Shiozawa, T. Yoshida, T. Hashizume, H. Hasegawa: "Correlation between interface state properties and electron transport at ultrathin insulator/Si interfaces"Applied Surface Science. 159/160. 98-103 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Hasegawa: "MBE growth and applications of silicon interface control layers"Thin Solid Films. 367. 58-67 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Hasegawa: "Microscopic understanding and control of surfaces and interfaces of compound semiconductors for mesoscopic devices"Surface Review and Letters. 7. 583-588 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Haseeawa, N. Negoro, S. Kasai, Y. Ishikawa, H. Fujikura: "Effects of gap states on scanning tunneling spectra observed on (110)- and (001)-oriented clean surfaces and ultrathin Si layer covered surfaces of GaAs prepared by molecular beam epitaxy"Journal of Vacuum Science & Technology B.. 18. 2100-2108 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Iwaya, S. Kasai, H. Okada, J. Nakamura, H. Hasegawa: "Chemical and Electrochemical Nanofabrication Processes for Schottky In-Plane Gate GaAs Single and Coupled Quantum Wire Transistors"Jpn. J. Appl. Phys.. 39. 4651-4652 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Fujikura, A. Liu, A. Hamamatsu, T. Sato, H. Hasegawa: "Electrochemical Formation of Uniform and Straight Nano-Pore Arrays on (001) InP Surfaces and Their Photoluminescence Characterizations"Jpn. J. Appl. Phys.. 39. 4616-4620 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Yoshida, H. Hasegawa: "Ultrahigh-vacuum Contactless Capacitance-Voltage Characterization of Hydrogen Terminated-Free Silicon Surfaces"Jpn. J. Appl. Phys.. 39. 4504-4508 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Sato, S. Kasai, H. Okada, H. Hasegawa: "Electrical Properties of Nanometer-Sized Schottky Contacts on n-GaAs and n-InP Formed by in Situ Electrochemical Process"Jpn. J. Appl. Phys.. 39. 4609-4615 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Yamada, H. Takahashi, T. Hashizume, H. Hasegawa: "Fabrication and Characterization of Novel Oxide-Free InP Metal-Insulator-Semiconductor FETs Having an Ultra Narrow Si Surface Quantum Well"Jpn. J. Appl. Phys.. 39. 2439-2443 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Ootomo, T. Hashizume, H. Hasegawa: "Nitridation of GaP (100) Surfaces by rf Nitrogen Radicals and by Electron Cyclotron Resonance Nitrogen Plasma"Jpn. J. Appl. Phys.. 39. 2407-2413 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Muranaka, H. Fujikura, H. Hasegawa: "Selective MBE Growth of InGaAs Quantum Wire-Dot Coupled Structurers with Controlled Double-Barrier Potential Profiles"Inst. Phys. Conf. Ser.. 166. 187-190 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Kasai, Y. Satoh, H. Hasegawa: "GaAs Quantum Wire Transistors and Single Electron Transistors using Schottky Wrap Gates for Quantum Integrated Circuits"Inst. Phys. Conf. Ser.. 166. 219-222 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Muranaka, C. Jiang, A. Ito, H. Hasegawa: "Origing of Non-Uniformity in MBE Grown Nanometer-Sized InGaAs Ridge Quantum Wires and Its Reoval by Atomic Hydrogen-Assisted Cleaning"Thin Solid Films. 380. 189-191 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] B. Adamowicz, H. Hasegawa: "Analysis of photoluminescence efficiency and surface recombination velocity of MBE-grown AlGaAs layers"Thin Solid Films. 367. 180-183 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] B. Adamowicz, H. Hasegawa: "Computer analysis of photon-induced non-equilibrium phenomena at Si and AlGaAs surfaces"Vacuum. 57. 111-120 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] B. Adamowicz, M. Miczek, H. Hasegawa: "COMPUTER ANALYSIS OF THE FERMI LEVEL BEHAVIOR AT SiO_2/n-GaAs INTERFACES"Electron Technology. 33. 249-252 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] R. Nakasaki, T. Hashizume, H. Hasegawa: "Insulator-GaN Interface Structures Formed by Plasma-Assisted Chemical Vapor Deposition"Physica E.. 7. 953-957 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Kasai, H. Hasegawa: "GaAs-Based Single Electron Transistors and Logic Inverters Utilizing Schottky Wrap-Gate Controlled Quantum Wires and Dots"Japanese Journal of Applied Physics. 40. 2029-2032 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Sato, S. Kasai, H. Hasegawa: "Electrical Properties of Nanometer-Sized Schottky Contacts for Gate Control of III-V Single Electron Devices and Quantum Devices"Japanese Journal of Applied Physics. 40. 2021-2025 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Muranaka, C. Jiaing, A. Ito, H. Hasegawa: "Characterization and Optimization of Atomic Hydrogen Cleaning of InP Surface for Selective MBE growth of InGaAs Quantum Structure Arrays"Japanese Journal of Applied Physics. 40. 1874-1877 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] F. Ishikawa, A. Hirama, H. Hasegawa: "Bulk and Interface Deep Levels in InGaP/GaAs Heterostructures Grown by Tertiarybutyl Phosphine-Based Gas Source Molecular Beam Epitaxy"Japanese Journal of Applied Physics. 40. 2769-2774 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Z. Jin, T. Hashizume, H. Hasegawa: "In-Situ XPS Study of Etch Chemistry of Methane-Based RIBE of InP Using N_2"Japanese Journal of Applied Physics. 40. 2757-2761 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] C. Jiang, T. Muranaka, H. Hasegawa: "Improvement of Growth Process to Achieve High Geometrical Uniformity in InGaAs Ridge Quantum Wires Grown by Selective MBE on Patterned InP Substrate"Japanese Journal of Applied Physics. 40. 3003-3008 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Okada, H. Hasegawa: "Novel Single Electron Memory Device Using Metal Nano-Dots and Schottky In-Plane Gate Quantum Wire Transistors"Japanese Journal of Applied Physics. 40. 2797-2800 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Miczek, B. Adamowicz, J. Szuber, H. Hasegawa: "Computer analysis of photoluminescence efficiency at InP surface with U-shaped surface state continuum"Vacuum. 63. 223-227 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Yoshida, H. Hasegawa: "Realization of UHV-Compatible Defect-Free Hydrogen Terminated Silicon Surfaces with the Use of UHV Contactless Capacitance-Voltage Method"Applied Surface Science. 175/176. 163-168 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Sato, S. Kasai, H. Hasegawa: "Current Transport and Capacitance-Voltage Characteristics of GaAs and InP Nanometer-Sized Schottky Contacts Formed by in situ Electrochemical Process"Applied Surface Science. 175/176. 181-186 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Kasai, N. Negoro, H. Hasegawa: "Conductance Gap Anomaly in Scanning Tunneling Spectra of MBE-Grown (001) Surfaces of III-V Compound Semiconductors"Applied Surface Science. 175/176. 255-259 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.-G. Xie, S. Kasai, H. Takahashi, C. Jiang, H. Hasegawa: "Fabrication and characterization of InGaAs/InAlAs insulated gate pseudomorphic HEMTs having a silicon interface control layer"IEICE-C, E84-C. 10. 1335-1343 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Takahashi, M. Yamada, Y. G. Xie, S. Kasai, H. Hasegawa: "Process Characterization and Optimization for a Novel Oxide-Free Insulated Gate Structure for InP MISFETs Having Silicon Interface Control Layer"IEICE-C. E84-C 10. 1344-1349 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Hashizume, R. Nakasaki, S. Ootomo, H. Hasegawa: "Surface passivation process for GaN-based electronic devices utilizing ECR-CVD SiNx film"IEICE-C. E84-C 10. 1455-1461 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. G. Xie, K. Takahashi, H. Takahashi, C. Jiang, S. Kasai, H. Hasegawa: "Surface Passivation of Epitaxial Multi-Layer Structures for InP-Based High Speed Devices by an Ultrathin Silicon Layer"IEICE-C. J84-C9. 872-882 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Yamada, Y. Kinoshita, S. Kasai, H. Hasegawa, Y. Amemiya: "Quantum-Dot Logic Circuits Based on the Shared Binary-Decision Diagram"Japanese Journal of Applied Physics. 40. 4485-4488 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. G. Xie, S. Kasai, H. Takahashi, C. Jiang, H. Hasegawa: "A Novel InGaAs/InAlAs Insulated Gate Pseudomorphic HEMT with a Silicon Interface Control Layer Showing High DC- and RF-Performance"IEEE Electron Device Letter. 22. 312-314 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Anantathanasarn, H. Hasegawa: "Surface passivation of GaAs using an ultrathin cubic GaN interface control layer"Journal of Vacuum Science & Technology B. 19. 1589-1596 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Hashizume S Ootomo, S. Oyama, M. Konishi, H. Hasegawa: "Chemistry and electrical properties of surfaces of GaN and GaN/AlGaN heterostructurers"Journal of Vacuum Science & Technology B. 19. 1675-1681 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Hasegawa, H. Takahashi, T. Yoshida, T. Sakai: "Ultra high vacuum-based in situ characterization of compound semiconductor surfaces by a contactless capacitance-voltage technique"Materials Science & Engineering. B80. 147-151 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Hashizume, R. Nakasaki, S. Ootomo, S. Oyama, H. Hasegawa: "Surface characterization of GaN and AlGaN layers grown by MOVPE"Materials Science & Engineering. B80. 309-312 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Hasegawa: "QUANTUM DEVICES AND INTEGRATED CIRCUITS BASED ON QUANTUM CONFINEMENT IN III-V NANOWIRE NETWORKS CONTROLLED BY NANO-SCHOTTKY GATES"The Electrochemical Society Proceedings Volumes 2001-19 "Quantum Confinement : Nanostrcutured Materials and Devices.. 189-208 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Hasegawa, S. Kasai: "Hexagonal binary decision diagram quantum logic circuits using Schottky in-plane and wrap-gate control of GaAs and InGaAs nanowires"Physica E.. 11. 149-154 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Ootomo, T. Hashizume, H. Hasegawa: "Surface passivation of AlGaN/GaN heterostructures using and ultrathin Al_2O_3 layer"Physica Status Solidi, A-Applied Research. 188. 371-374 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Hasegawa: "Formation and Quantum Devices Applications of III-V Compound Semiconductor Nanostructures"Journal of the Korean Physical Society. 39. S402-S409 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Konishi, S. Anantathanasarn, T. Hashizume, H. Hasegawa: "In-situ XPS and Photoluminescence Characterization of GaN Surfaces grown by MBE on MOVPE GaN Templates"Institute of Physics Conference Series. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Sato, I. Tamai, C Jiang, H. Hasegawa: "Selective MBE Growth of GaAs/AlGaAs Nanowires on Patterned GaAs (001) Substrates and Its Application to Hexagonal Nanowire Network Formation"Institute of Physics Conference Series. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] F. Ishikawa, H. Hasegawa: "Self-consistent Computer Analysis of Cathodolumihescence In-Depth Spectra for Compound Semiconductor Heterostructures"Institute of Physics Conference Series. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Kasai, H. Hasegawa: "GaAs and InGaAs Single Electron Hexagonal Nanowire Circuits Based on Binary Decision Diagram Logic Architecture"Physica E.. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Muranaka, S. Kasai, C. Jiang, H. Hasegawa: "Control of Morphology and Wire Width in InGaAs Ridge Quantum Wires Grown by Atomic Hydrogen-Assisted Selective Molecular Beam Epitaxy"Physica E.. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Yumoto, S. Kasai, H. Hasegawa: "Graph-Based Quantum Logic Circuits and Their Realization by Novel GaAs Multiple Quantum Wire Branch Switches Utilizing Schottky Wrap Gates"Microelectronics Engineering. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] C. Jiang, T. Muranaka, H. Hasegawa: "MBE Growth Mechanism and Wire Width Control for Formation of Dense Networks of Narrow InGaAs Quantum Wires"Microelectronics Engineering. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Hirano, A. Ito, T. Sato, F. Ishikawa, H. Hasegawa: "Electrochemical Formation of Self-Assembled InP Nanopore Arrays and Their Use as Templates for Molecular Beam Epitaxy Growth of InGaAs Quantum Wires and Dots"Japanese Journal Applied Physics. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Z. Fu, H. Takahashi, T. Hashizume, S. Kasai, H. Hasegawa: "Optimization of Novel Oxide-Free Insulated Gate Structure for InP Having An Ultrathin Silicon Interface Control Layer"Japanese Journal Applied Physics. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] C. Jiang, T. Muranaka, H. Hasegawa: "Realization of Submicron-Pitch Linear Arrays of Nanometer-Sized InGaAs Ridge Quantum Wires by Selective MBE Growth on Patterned Substrates"Japanese Journal Applied Physics. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Yumoto, S. Kasai, H. Hasegawa: "Novel Quantum Wire Branch-Switches for Binary Decision Diagram Logic Architecture Utilizing Schottky Wrap-Gate Control of GaAs/AlGaAs Nanowires"Japanese Journal Applied Physics. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] C. Jiang, T. Muranaka, H. Hasegawa: "Structural and Optical Properties of 10 nm-Class InGaAs Ridge Quantum Wire Arrays with Sub-Micron Pitches Grown by Selective MBE on Patterned InP Substrate"Japanese Journal Applied Physics. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Endo, Z. Jin, S. Kasai, H. Hasegawa: "Reactive Ion Beam Etching of GaN and AIGaN/GaN for Nanostructure Fabrication Using Methane-Based Gas Mixtures"Japanese Journal Applied Physics. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Nakano, N. Negoro, H. Hasegawa: "Strong Photoluminescence and Low Surface State Densities on Clean and Silicon Deposited (001) Surface of GaAs with (4x6) Reconstruction"Japanese Journal Applied Physics. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Kasai, H. Hasegawa: "III-V Quantum Devices and Circuits Based on Nano-scale Schottky Gate Control of Hexagonal Quantum Wire Networks"Applies Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A. Ito, T. Muranaka, C. Jiang, H. Hasegawa: "Formation of High-Density Hexagonal Networks of InGaAs Ridge Quantum Wires by Atomic Hydrogen Assisted Selective Molecular Beam Epitaxy"Applies Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Yumoto, M. Iwaya, S. Kasai, H. Hasegawa: "Gate Control Characteristics in GaAs Nanometer-Scale Schottky Wrap Gate Structure"Applies Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Negoro, S. Kasai, H. Hasegawa: "Scanned-Probe Topological and Spectroscopic Study of Surface State on Clean and Si-Deposited GaAs (001)-c(4x4) Surfaces"Applies Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] F. Ishikawa, H. Hasegawa: "Depth Resolved Cathodoluminescence Characterization of Buried InGaP/GaAs Heterointerface"Applies Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Anantathanasarn, H. Hasegawa: "Photoluminescence and Capacitance-Voltage Characterization of GaAs Surface Passivated by an Ultrathin GaN Interface Control Layer"Applies Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Z. Fu, S. Kasai, H. Hasegawa: "Gated Photoluminescence Study of Oxide-Free InP MIS Structure Having Ultrathin Silicon Interface Control Layer"Applies Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Z. Jin, T, Hashizume, H. Hasegawa: "Effects of Nitrogen Addition on Methane-Based ECR Plasma Etching of GaN and Related Materials"Applies Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Oyama, T. Hashizume, H. Hasegawa: "Mechanism of Current Leakage through Metal/n-GaN Interfaces"Applies Surface Science. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2003-09-17  

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