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2002 Fiscal Year Final Research Report Summary

Development of a "near-surface"-photodetector based on anomalous above-band-gap absorption band of SiGe

Research Project

Project/Area Number 12555085
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Electronic materials/Electric materials
Research InstitutionThe University of Tokyo

Principal Investigator

FUKATSU Susumu  The University of Tokyo, Graduate School of Arts and Sciences, Associate Professor (60199164)

Co-Investigator(Kenkyū-buntansha) KAWAMOTO Kiyoshi  The University of Tokyo, Graduate School of Arts and Sciences, Assistant (40302822)
TANI Yukari  The University of Tokyo, Fine Ceramics Center, Researcher
Project Period (FY) 2000 – 2002
KeywordsSOI / oxidized SiGe / anomalous above-band-gap absorption / MSM photodetecotr / quantum photodetector / transient response / electroreflectance / electro-optic modulator
Research Abstract

Silicon-on-insulator (SOI) substrates have been in the focus of attention these days particularly from the perspective of developing high speed, less power-hungry electronics. The looming silicon-photonics on the other hand is to bring photonics/optoelectronics onto this otherwise purely electronic SOI chip. The problem then is that the conventional architecture of photonics/optoelectronics devices, at it stands, would not allow for a highly integrated circuit design, which can be traced back to the indirect band-gap of silicon that only weakly absorbs light thereby leaving a fairly large footprint.
In this study, an attempt is made to create a new class of strongly-absorbing, on-chip quantum photodetector that takes advantage of an anomalous near-surface absorption band centered near 12eV developing in oxidized SiGe due to the relevant unique electronic states as opposed to those pertaining to the bulk. This above-band-gap absorption band was reproducible even in silicon-based systems short of Ge, which shows that it has to do with Si and hence its near-surface defects launched therein. A series of MSM (metal-semiconductor-metal) photodetecotrs prototypes with Schottky links was tested to examine such characteristics as spectral sensitivity in relation to wavelength selective detection, dynamic range of photoresponse, dark current, polarization-insensitiveness, and transient response including bandwidth reaching the subnanosecond domain. Interestingly, the absence of hole burning indicates that the 1.2eV band is not homogeneously broadened. Besides the issues that had been addressed in the original proposal, electroabsorption and electroreflectance were discovered during the course of this study, which holds considerable promise in building electro-optic modulator and tunable detector. The fabrication of an arrayed detector for mulitichannel spectroscopy and transparent fringe detection will remain as a subject of future study.

  • Research Products

    (46 results)

All 2007 2006 2005 2004 2003 2002 2001 2000

All Journal Article (14 results) (of which Peer Reviewed: 7 results) Presentation (29 results) Book (3 results)

  • [Journal Article] Diminished Shockley-Read-Hall recombination in near-surface pseudomorphic Si_1-XGe_X/Si double quantum wells2006

    • Author(s)
      Y.Sugawara
    • Journal Title

      Thin Solid Films 508

      Pages: 414-417

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Diminished Shockley-Read-Hall recombination in near-surface pseudomorphic Si_<1-x>Ge_x/Si double quantum wells2006

    • Author(s)
      Y.Sugawara, N.Nakajima S.Fukatsu
    • Journal Title

      Thin Solid Films 508

      Pages: 414-417

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Anomalous surface absorption band at 1.2eV in Si_1-xGe_x alloy-based structures2005

    • Author(s)
      Y.Kishimoto
    • Journal Title

      Thin Solid Films 369

      Pages: 423-425

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Influence of band alignment on recombination in pseudomorphic Si_1-xGe_x/Si quantum wells2005

    • Author(s)
      Y.Sugawara
    • Journal Title

      Applied Physics Letters 86

      Pages: 011907-1-3

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Influence of band alignment on recombination in pseudomorphic Si_<1-x>Ge_x/Si quantum wells2005

    • Author(s)
      Y.Sugawara, Y.Kishimoto, Y.Akai, S.Fukatsu
    • Journal Title

      Applied Physics Letters 86

      Pages: 011907-1-3

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Laser-Induced Photoluminescence Enhancement in a Room-Temperature Emitting SiGe Based Alloy Quantum Well2002

    • Author(s)
      D.Hippo
    • Journal Title

      Jpn.J.Appl.Phys. 41

      Pages: L1449-1451

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Laser-Induced Photoluminescence Enhancement in a Room-Temperature Emitting SiGe Based Alloy Quantum Well2002

    • Author(s)
      D.Hippo, Y.Sugawara, Y.Kishimoto, K.Kawamoto, S.Fukatsu
    • Journal Title

      Jpn.J.Appl.Phys. 41, 12B

      Pages: L1449-L1451

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Si(Ge)/oxide-based heterostructures and their applications to optoelectronics2000

    • Author(s)
      S.Fukatsu
    • Journal Title

      Applied Surface Science 159/160

      Pages: 472-480

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Factors limiting the composition window for fabrication of SiGe-on-insulator substrate by low-energy oxygen implantation2000

    • Author(s)
      Y.Ishikawa
    • Journal Title

      Thin Solid Films 369

      Pages: 213-216

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Field-enhanced Stokes shifts in strained Si_1-yC_y/Si(001) quantum wells2000

    • Author(s)
      Y.Sugawara
    • Journal Title

      Thin Solid Films 369

      Pages: 402-404

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Si(Ge)/oxide-based heterostructures and their applications to optoelectronics2000

    • Author(s)
      S.Fukatsu, Y.Kishimoto, Y.Ishikawa, N.Shibata
    • Journal Title

      Applied Surface Science 159/160

      Pages: 472-480

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Factors limiting the composition window for fabrication of SiGe-on-insulator substrate by low-energy oxygen implantation2000

    • Author(s)
      Y.Ishikawa, N.Shibata, S.Fukatsu
    • Journal Title

      Thin Solid Films 369

      Pages: 213-216

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Field-enhanced Stokes shifts in strained Sil-yCy/Si(001)quantum wells2000

    • Author(s)
      Y.Sugawara, S.Fukatsu, K.Brunner, K.Eberl
    • Journal Title

      Thin Solid Films 369

      Pages: 402-404

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Anomalous surface absorption band at 1.2eV in Si_<1-x>Ge_x alloy-based structures2000

    • Author(s)
      Y.Kishimoto, K.Kawamoto, S.Fukatsu
    • Journal Title

      Thin Solid Films 369

      Pages: 423-425

    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Electroabsorption of oxidized SiGe2007

    • Author(s)
      J.Igarashi
    • Organizer
      5^th Int. Symp. on Control of Semiconductor Interfaces
    • Place of Presentation
      東京都立大学
    • Year and Date
      2007-11-12
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 近表面酸化SiGeベースMSM近赤外光検出器/変調器の時間応答2007

    • Author(s)
      五十嵐潤
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-06
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] シリコンフォトニクスを支える光・電子デバイス2007

    • Author(s)
      深津晋
    • Organizer
      第6回シリコンフォトニクス研究会
    • Place of Presentation
      東京大学
    • Year and Date
      2007-07-14
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] シリコン・フォトニクスのアクティブ応用2006

    • Author(s)
      深津晋
    • Organizer
      2006年電子情報通信学会ソサイエティ大会
    • Place of Presentation
      金沢大学
    • Year and Date
      2006-09-21
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 自由キャリア吸収の抑制を狙ったSiGe歪混晶層導入シリコン導波路のラマンゲイン2006

    • Author(s)
      菅原由隆
    • Organizer
      第53回応用物理学関係連合講演会
    • Place of Presentation
      武蔵工大
    • Year and Date
      2006-03-26
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Multi-color emission wavelength switching a strained Si_1-XGe_X/Si quantum well2005

    • Author(s)
      N.Yasuhara, S.Fukatsu
    • Organizer
      2005 International Conference on Group IV Photonics
    • Place of Presentation
      Antwerp, Belgium
    • Year and Date
      2005-09-22
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Multi-color emission wavelength switching a strained Si_<1-x>Ge_x/Si quantum well2005

    • Author(s)
      N.Yasuhara, S.Fukatsu
    • Organizer
      2005 Int.Conf.on Group IV Photonics(GFP2005)
    • Place of Presentation
      Antwerp
    • Year and Date
      2005-09-22
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Si_1-XGe_X/SiタイプII歪量子井戸における電子非局在と励起子イオン化遅2005

    • Author(s)
      中嶋法子
    • Organizer
      第66回応用物理学会学術講演会
    • Place of Presentation
      徳島大学
    • Year and Date
      2005-09-11
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 誘導ラマン散乱における自由キャリア吸収の抑制を狙ったシリコン導波路へのSiGe歪混晶層導入2005

    • Author(s)
      菅原由隆
    • Organizer
      第66回応用物理学会学術講演会
    • Place of Presentation
      徳島大学
    • Year and Date
      2005-09-08
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Diminished Shockley-Read-Hall recombination in neaz-surface pseudomorphic Si_1-xGe_x/Si double quantum wells2005

    • Author(s)
      Y.Sugawara
    • Organizer
      Intl. Conf. on Silicon Epitaxy and Heterostructures
    • Place of Presentation
      Awajishima, Hyogo
    • Year and Date
      2005-05-23
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Diminished Shockley-Read-Hall recombination in near-surface pseudomorphic Si_<1-x>Ge_x/Si double quantum wells2005

    • Author(s)
      Y.Sugawara, N.Nakajima, S.Fukatsu
    • Organizer
      International Conference on Silicon Epitaxy and Heterostructures(ICSI-4)
    • Place of Presentation
      Awajishima, Hyogo
    • Year and Date
      2005-05-23
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Si_1-XGe_X/Si歪量子井戸の時間分解スペクトルにおける表面電子共鳴2004

    • Author(s)
      菅原由隆
    • Organizer
      第65回応用物理学会学術講演会
    • Place of Presentation
      東北学院大学
    • Year and Date
      2004-09-30
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Si_1-XGe_X/Si歪量子井戸の「表面」における電荷蓄積と再放出2004

    • Author(s)
      安原望
    • Organizer
      第51回応用物理学関係連合講演会
    • Place of Presentation
      東京工科大学
    • Year and Date
      2004-03-30
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Si_1-XGe_X/Si歪量子井戸の再結合における表面電子共鳴2004

    • Author(s)
      菅原由隆
    • Organizer
      第51回応用物理学関係連合講演会
    • Place of Presentation
      東京工科大学
    • Year and Date
      2004-03-30
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Si_1-XGe_X/Si歪量子井戸における弱束縛電子の縦電場応答2003

    • Author(s)
      安原望
    • Organizer
      第64回応用物理学会学術講演会
    • Place of Presentation
      福岡大学
    • Year and Date
      2003-08-30
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Si_1-xGe_x/Si歪二重量子井戸の動的局在励起子系における蛍光減衰の異常2003

    • Author(s)
      安原望
    • Organizer
      第50回応用物理学関係連合講演会
    • Place of Presentation
      神奈川大学
    • Year and Date
      2003-03-30
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 定常光励起蛍光によるSi_1-XGe_X/Si歪量子井戸間接励起子の面内輸送の評価2003

    • Author(s)
      澤田和宏
    • Organizer
      第64回応用物理学会学術講演会
    • Place of Presentation
      福岡大学
    • Year and Date
      2003-03-30
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] シリコンをベースとする新光機能素子の創製2003

    • Author(s)
      深津晋
    • Organizer
      第50回応用物理学関係連合講演会
    • Place of Presentation
      神奈川大学
    • Year and Date
      2003-03-29
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] A ToF Study of lateral exciton transport in strained Si_<1-x>Ge_x/Si MQWs2001

    • Author(s)
      K.Sawada, S.Fukatsu
    • Organizer
      62^<nd> Fall Meeting
    • Place of Presentation
      Nagoya Inst.Technol.
    • Year and Date
      20010000
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Time of Flight法を用いたSi_1-xGe_x/Si歪量子井戸における面内方向の励起子輸送の観測2001

    • Author(s)
      澤田和宏
    • Organizer
      第62回応用物理学会学術講演会
    • Place of Presentation
      愛知工業大学
    • Year and Date
      2001-09-12
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] SiGe混晶における1.2eV近表面吸収バンドのアニール効果2001

    • Author(s)
      菅原由隆
    • Organizer
      第62回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2001-09-12
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Interface band-gap engineering and near-surface photodetector2000

    • Author(s)
      S.Fukatsu
    • Organizer
      47^<th> Spring Meeting
    • Place of Presentation
      Aoyamagakuin University
    • Year and Date
      20000300
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Absorption saturation of the 1.2-eV band in SiGe alloys2000

    • Author(s)
      Y.Kishimoto, S.Fukatsu
    • Organizer
      47^<th> Spring Meeting
    • Place of Presentation
      Aoyamagakuin University
    • Year and Date
      20000300
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] biquitus 1.2eV near-surface absorption band in Si-based hetero structures2000

    • Author(s)
      Y.Sugawara, Y.Kishimoto S.Fukatsu, J.Kolodzey, B.Orner, K.J.Roe, Y.Ishikawa, K.Miki, K.Sakamoto
    • Organizer
      61st Fall Meeing
    • Place of Presentation
      Hokkaido Inst.Technol.
    • Year and Date
      20000000
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Electromodulation of the 1.2-eV near-surface absorption band in SiGe alloys2000

    • Author(s)
      Y.Kishimoto, K.Kawamoto, S.Fukatsu
    • Organizer
      61st Fall Meeing
    • Place of Presentation
      Hokkaido Inst.Technol.
    • Year and Date
      20000000
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] シリコン系ヘテロ構造における欠陥起因の1.2eV表面吸収バンド2000

    • Author(s)
      菅原由隆
    • Organizer
      第61回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2000-09-05
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] SiGe混晶表面の1.2eV吸収バンドの電場変調2000

    • Author(s)
      岸本洋介
    • Organizer
      第61回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2000-09-05
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 界面バンド工学と表面光検出器2000

    • Author(s)
      深津晋
    • Organizer
      第47回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2000-03-29
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] SiGe混晶における1.2eVバンドの吸収飽和2000

    • Author(s)
      岸本洋介
    • Organizer
      第47回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2000-03-29
    • Description
      「研究成果報告書概要(和文)」より
  • [Book] シリコンフォトニクス第2章「シリコン光エミッタ」2007

    • Author(s)
      深津晋
    • Total Pages
      68
    • Publisher
      オーム社
    • Description
      「研究成果報告書概要(和文)」より
  • [Book] Achievement of SiGe-on-Insulator Technology in Science and Technology of Semiconductor-On-Insulator Structutres and Devices Operationg in a Harsh Environment"2005

    • Author(s)
      Y.Ishikawa
    • Total Pages
      11
    • Publisher
      Springer社,Neitherlands
    • Description
      「研究成果報告書概要(和文)」より
  • [Book] 結晶成長のダイナミクス3第4章3節「サーファクタントを利用した成長」2002

    • Author(s)
      深津晋
    • Total Pages
      17
    • Publisher
      共立出版
    • Description
      「研究成果報告書概要(和文)」より

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Published: 2011-06-18  

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