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2002 Fiscal Year Final Research Report Summary

Study on suppression of fluctuation in semiconductor electrical characteristics by single ion inplantaticn

Research Project

Project/Area Number 12555092
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Electronic materials/Electric materials
Research InstitutionWaseda University

Principal Investigator

ODOMARI Iwao  Waseda University, School of Science and Engineering, Professor, 理工学部, 教授 (30063720)

Co-Investigator(Kenkyū-buntansha) TOYOSHIMA Yoshiaki  Toshiba Corporation, ScC R&D Center, Chief Specialist, マイクロエレクトロニクス研究所, 主査
SHINADA Takahiro  Waseda University, School of Science and Engineering, Reseach Fellow, 理工学部・日本学術振興会, 特別研究員 (30329099)
Project Period (FY) 2000 – 2002
KeywordsSingle ion inplantation / Semicondjctor / Nano devices / Carfacn nano tube / Focused ion bean / Liquid metal ion source / Impurity control / Catalysis control
Research Abstract

In order to develop potentialities of single ion implantation through die precise control of solid-state physical and chemical properties in nano-scale semiconductors by one-by-one implantation of dopant atoms, we demonstrated the control of the electrical characteristics in ultrafine semiconductor devices and the selective growth of carbon nanotubes/fibers at catalytic ion-implanted site as follows.
Control of electrical properties in ultrafine semiconductor devices
The influence of dopant atom position on V_<th> in silicon wire MOSFETs was experimentally investigated for the first time by means of SIX. P single-ions were implanted into n-type channel region at intervals of 100nm. V_<th> was evaluated and compared with that of conventional FETs in which the dopant atoms were randomly introduced. Our results indicate that V_<th> fluctuation of FETs with ordered dopant distribution was smaller than that of FETs with random channel doping. It was also found that the average value of V_<th> … More of FETs with the ordered dopants was much lower than that of FETs with the random distribution of dopants, even though the dopant number was exactly same for both FETs. This indicates that it is important to control the dopant position for the precise control of V_<th>.
Position control of carbon nanotubes/fibers
The precise control of individual CNFs position on substrate is essential for opening up novel device applications. We attempted to control the growth position of CNFs by means of focused Ni ion implantation and the subsequent plasma chemical vapor deposition (CVD). Ni ions were implanted at 30kV into n-type Si(100) substrate through the thermally grown oxide film. After a removal of thermal oxide, an antenna edge 2450MHz microwave plasma assistant CVD was carried out at 600℃ for 10 min with pure hydrogen and methane over 99.9999% for the CNF growth. The selective growth of CNFs on Ni-implanted sites was observed. It was confirmed for the first time that the implanted Ni ions act as a catalyst for the synthesis of CNFs. Less

  • Research Products

    (27 results)

All Other

All Publications (27 results)

  • [Publications] 谷井孝至: "シングルイオン注入法を用いたナノスケール表面改質"機械の研究. 54・11. 1141-1146 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Shinada: "Improvement of Focused Ion-Beam Optics in Single-Ion Implantation for Higher Aiming Precision of One-by-One Doping of Impurity Atoms into Nano-Scale Semiconductor Devices"Jpn.J.Appl.Phys.Part 2. 41・3A. L287-L290 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Koh: "Novel process for high-density buried nanopyramid array fabrication by means of dopant ion implantation and wet etching"Jpn.J.Appl.Phys.Part 1. 40・4B. 2837-2839 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Tanii: "Fabrication of adenosite triphosphate-molecule recognition chip by means of bioluminous enzyme luciferase"Jpn.J.Appl.Phys.Part 2. 40・10B. L1135-L1137 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Tanii: "Sinple fabrication of silicon nanopyramids for high performance field emitter array"Ext.Abst.SSDM. 578-579 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Shinada: "Reduction of fluctuation in semiconductor conductivity by one-by-one ion implantation of dopant atoms"Jpn.J.Appl.Phys.. Vol.39. L265-L268 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Koh: "New process for Si nanopyramid array (NPA) fabrication by means of ion beam irradiation and wet etching"Jpn.J.Appl.Phys. Vol.39. 2186-2188 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Koh: "High-density nanoetchpit-array fabrication on Si surface using ultrathin SiO_2 mask"Jpn.J.Appl.Phys. Vol.39. 5352-5355 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Shinada: "Flat-band voltage control of a back-gate MOSFET by single ion implantation"Appl.Surf.Sci.. Vol.162-163. 499-503 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Koh: "Simple nanostructuring of Si surfaces by means of focused beam patterning and wet etching"Appl.Surf.Sci.. Vol.162/163. 599-603 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Tanii: "Nucleation and growth of Cu clusters on highly oriented pyrolytic graphite observed with an in situ electrochemical scanning tunneling microscope"Appl.Surf.Sci.. 162/163. 662-665 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Koh: "Simple process for buried nanopyramid array(BNPA) fabrication by means of dopant ion implantation and dual wet etching"Ext.Abst.SSDM. 448-449 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 大泊巌: "第2版応用物理ハンドブック"丸善株式会社. 151 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 大泊巌: "今日からモノ知りシリーズトコトンやさしいナノテクノロジーの本"日刊工業新聞社. 1094 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 大泊巌: "図解ナノテクノロジーのすべて-クロマトグラフィチップ"工業調査会. (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T. Shinada , H. Koyama J C. Hinosihta , K. Imamura , I. Ohdoikari: "Improvement of Focused Ion-Beam Optics in Single-Ion Implantation for Higher Aimitig Precision of One-by-One Doping of Impurity Atoms into Nano-gcale Semiconductor Devices"Jpn. J. Appl. Phys. 2.. 41(4A). L287-L290 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Koh, T. Goto, A. Sugita, it Tanii, T. nda, T. Shinada, T. Matsukawa and I. Ohdomari: "Novel process for high-density buried nanopyramid array fabrication by means of dopant ion implantation and wet etching"Jpn. J. Appl. Phys., 1.. 40(4B). 2837-2839 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Tanii, T. Goto, T. lida, M. Koh-Masahara and I. Ohdomari: "Fabrication of adenosite triphosphate-molecule recognition chip by means of bioluminous enzyme luciferase"Jpn. J. Appl. Phys., 2.. 40(10B). L1135-L1137 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Tanii, T. Goto, T. lida, M. Koh-Masahara and L Ohdomari: "Sinp|le fabrication of silicon nanopyramids for high performance field emitter array"Ext. Abst. SSDM. 578-579 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Shinada, A. Ishikawa, C. Hinoshita, M. Koh, and I. Ohdomari: "Reduction of fluctuation in Semiconductor conductivity by one-by-one ion implantation of dopant atoms"Jpn. J. Appl. Phys.. 39. L265-L268 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Koh, S. Sawara, T. Goto, Y. Ando, T. Shinada, Ohdomari,: "New process for Si nanopyramid array (NPA) fabrication by means of ion beam irradiation and wet etching"Jpn. J. Appl. Phys.. 39. 2186-2188 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Koh, S. Sawara, T. Goto, Y. Ando, T. Shinada, I. Ohdomari: "High-density nanoetchpit-array fabrication on Si surface using ultraljfain SiO2 mask"Jpn. J. Appi. Phys.. 39. 5352-5355 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Sawara, M, Koh, T. Goto, Y. Ando, T. Shinada and I. Ohdomari: "Simple fabrication of high density concave nanopyramid array (NPA) ou Si surface"Appl. Surf. Sci.. 159/160. 481-485 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Shinada, A. Ishikawa, C. Hinoshita, M. Koh, and I. Ohdomari: "Flat-band voltage control of a back-gate MOSFET by single ion implantation"Appl Surf. Sci.. 162-163. 499-503 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Koh, S. Sawara, T. Shinajda, T. Goto, T. Ando and I. Ohdomari: "Simple nanostructuring of Si surfaces by means of focused beam patterning and wet etching"Appl. Surf. Sci.. 162/163. 599-603 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Tanii, K.Hara, K.Ishibashi, K.Ohta, I.Ohdomari: "Nucleation and growth of Cu clusters on highly oriented pyrolytic graphite observed with an in situ electrochemical scanning tunneling microscope"Appl. Surf. Sci.. 162/163. 662-665 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Koh, T. Goto, T. lida, A. Sugita, T. Tanii, T. Shinada, T. Matsukawa and I. Ohdomari: "Simple process for buried nanopyramid array (BNPA) fabrication by means of dopant ion implantation and dual wet etching"Ext. Abst. SSDM, 2000 (Tokyo). 448-449 (2000)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2004-04-14  

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